Claims
- 1. A process for making a photoresist which comprises: preparing a photopolymerizable layer comprising:
- A. from 10 to 60 parts by weight of an addition polymerizable material consisting essentially of and being solely one or more non-gaseous compounds, containing at least two terminal ethylenic groups, having a boiling point above 100.degree. C. and being selected from the group consisting of an unsaturated ester of a polyol, an unsaturated amide, and a vinyl ester;
- B. from 0.001 to 10 parts by weight of a photoinitiated free-radical generating addition polymerizing initiating system;
- C. from 0.001 to 5 parts by weight of a thermaladdition polymerization inhibitor; and
- D. from 40 to 90 parts by weight of a preformed macromolecular polymeric binding agent which is a polymer of:
- a first monomeric material which contains one or more non-acidic vinyl compounds selected from the group having the general formula: ##SPC2##
- wherein R is hydrogen, an alkyl group having from 1 to 6 carbon atoms or a halo group; and
- a second monomeric material which consists essentially of one or more alpha,beta-unsaturated carboxyl-containing monomers having from 3 to 15 carbon atoms;
- wherein the ratio of the first monomeric material to the second monomeric material is sufficient to render the binding agent soluble in a dilute aqueous solution containing from 0.01 to 10% of a water-soluble base; exposing a portion of said photopolymerizable layer to actinic light; and washing said layer with a dilute aqueous alkaline solution to dissolve the unexposed portion of the photopolymerizable layer.
- 2. The process of claim 1 wherein the photopolymerizable layer is supported on a metallic substrate prior to said washing step.
- 3. The process of claim 1 wherein the copolymer is of styrene and an unsaturated carboxyl-containing monomer.
- 4. The process of claim 1 wherein the unsaturated carboxyl-containing monomer is methacrylic acid.
- 5. The process of claim 1 wherein the unsaturated carboxyl-containing monomer is acrylic acid.
- 6. The process of claim 1 wherein the unsaturated carboxyl-containing monomer is maleic anhydride, maleic acid, a half-ester of maleic acid, or mixture thereof.
- 7. A process for making a photoresist which comprises: preparing a photopolymerizable layer comprising:
- A. from 10 to 60 parts by weight of an addition polymerizable material consisting essentially of and being solely one or more non-gaseous compounds, containing at least two terminal ethylenic groups, having a boiling point above 100.degree. C. and being selected from the group consisting of an unsaturated ester of a polyol, an unsaturated amide, and a vinyl ester;
- B. from 0.001 to 10 parts by weight of a photoinitiated free-radical generating addition polymerizing initiating system;
- C. from 0.001 to 5 parts by weight of a thermaladdition polymerization inhibitor; and
- D. from 40 to 90 parts by weight of a preformed macromolecular polymeric binding agent which is a polymer of:
- a first monomeric material which contains one or more non-acidic vinyl compounds selected from the group having the general formula: ##EQU2## wherein, when X is hydrogen, Y is OOCR.sub.1, OR.sub.1, OCR.sub.1, COOR.sub.1, CN, CH=CH.sub.2, ##EQU3## or Cl; when X is methyl, Y is COOR.sub.1, CN, CH=CH.sub.2, or ##EQU4## and when X is chlorine, Y is Cl; and wherein R.sub.1 is an alkyl group having from 1 to 12 carbon atoms, a phenyl group or a benzyl group and R.sub.3 and R.sub.4 are hydrogen, an alkyl group having from 1 to 12 carbon atoms or a benzyl group; and
- a second monomeric material which consists essentially of one or more alpha,beta-unsaturated carboxyl-containing monomers having from 3 to 15 carbon atoms;
- wherein the ratio of the first monomeric material to the second monomeric material is sufficient to render the binding agent soluble in a dilute aqueous solution containing from 0.01 to 10% of a water-soluble base; exposing a portion of said photopolymerizable layer to actinic light; and washing said layer with a dilute aqueous alkaline solution to dissolve the unexposed portion of the photopolymerizable layer.
- 8. A process for making photoresist which comprises: preparing a photopolymerizable layer comprising:
- A. from 10 to 60 parts by weight of an addition polymerizable material consisting essentially of trimethylolpropane triacrylate and tetraethyleneglycol diacrylate;
- B. from 0.001 to 10 parts by weight of a photoinitiated free-radical generating addition polymerizing initiating system;
- C. from 0.001 to 5 parts by weight of a thermaladdition polymerizable inhibitor; and
- D. from 40 to 90 parts by weight of a preformed macromolecular polymeric binding agent which is a polymer of sytrene and monobutyl maleate, wherein the ratio of the sytrene to the monobutyl maleate is sufficient to render the binding agent soluble in a dilute aqueous solution containing from 0.01 to 10% of a water-soluble base; exposing a portion of said photopolymerizable layer to actinic light; and washing said layer with a dilute aqueous alkaline solution to dissolve the unexposed portion of the photopolymerizable layer.
- 9. A process for making a photoresist which comprises: preparing a photopolymerizable layer comprising:
- A. from 10 to 60 parts by weight of an addition polymerizable material consisting essentially of pentaerythritol acrylates;
- B. from 0.001 to 10 parts by weight of a photoinitiated free-radical generating addition polymerizing initiating system;
- C. from 0.001 to 5 parts by weight of a thermaladdition polymerizable inhibitor; and
- D. from 40 to 90 parts by weight of a preformed macromolecular polymeric binding agent which is a polymer of styrene and monobutyl maleate, wherein the ratio of the sytrene to the monobutyl maleate is sufficient to render the binding agent soluble in a dilute aqueous solution containing from 0.01 to 10% of a water-soluble base; exposing a portion of said photopolymerizable layer to actinic light; and washing said layer with a dilute aqueous alkaline solution to dissolve the unexposed portion of the photopolymerizable layer.
- 10. A process for making a photoresist which comprises: preparing a photopolymerizable layer comprising:
- A. from 10 to 60 parts by weight of an addition polymerizable material consisting essentially of pentaerythritol acrylates;
- B. from 0.001 to 10 parts by weight of a photoinitiated free-radical generating addition polymerizing initiating system;
- C. from 0.001 to 5 parts by weight of a thermaladdition polymerizable inhibitor; and
- D. from 40 to 90 parts by weight of a preformed macromolecular polymeric binding agent which is a polymer of vinyl acetate and crotonic acid, wherein the ratio of the vinyl acetate to the crotonic acid is sufficient to render the binding agent soluble in a dilute aqueous solution containing from 0.01 to 10% of a water-soluble base; exposing a portion of said photopolymerizable layer to actinic light; and washing said layer with a dilute aqueous alkaline solution to dissolve the unexposed portion of the photopolymerizable layer.
- 11. The process of claim 8 wherein the photoinitiated free-radical generating addition polymerizing initiating system is an admixture of benzophenone and 4,4'-bis-(dimethylamino)-benzophenone and the thermal-addition polymerizable inhibitor is 2,2'-methylene-bis(4-ethyl-6-tert-butyl phenol).
- 12. The process of claim 8 wherein the ratio of the styrene to monobutyl maleate in the binding agent is from about 35:65 to 70:30.
- 13. The process of claim 9 wherein the photoinitiated free-radical generating addition polymerizing initiating system is an admixture of benzophenone and 4,4'-bis(dimethylamino)-benzophenone and the thermal-addition polymerizable inhibitor is 2,2'-methylene-bis(4-ethyl-6-tert-butyl phenol).
- 14. The process of claim 9 wherein the ratio of the styrene to monobutyl maleate in the binding agent is from about 35:65 to 70:30.
- 15. The process of claim 10 wherein the vinyl acetate-crotonic acid ratio is from 70:30 to 95:5.
- 16. The process of claim 7 wherein the photopolymerizable layer is supported on a metallic substrate prior to said washing step.
- 17. A coated composition which comprises a metallic substrate of copper or a copper alloy coated with a photopolymerizable composition comprising:
- A. from 10 to 60 parts by weight of an addition polymerizable material consisting essentially of and being solely one or more non-gaseous compounds, containing at least two terminal ethylenic groups, having a boiling point above 100.degree. C. and being selected from the group consisting of an unsaturated ester of a polyol, an unsaturated amide, and a vinyl ester;
- B. from 0.001 to 10 parts by weight of a photoinitiated free-radical generating addition polymerizing initiating system;
- C. from 0.001 to 5 parts by weight of a thermaladdition polymerization inhibitor; and
- D. from 40 to 90 parts by weight of a preformed macromolecular polymeric binding agent which is a polymer of:
- a first monomeric material which contains one or more non-acidic vinyl compounds selected from the group having the general formula: ##SPC3##
- wherein R is hydrogen, an alkyl group having from 1 to 6 carbon atoms or a halo group; and
- a second monomeric material which consists essentially of one or more alpha,beta-unsaturated carboxyl-containing monomers having from 3 to 15 carbon atoms;
- wherein the ratio of the first monomeric material to the second monomeric material is sufficient to render the binding agent soluble in a dilute aqueous solution containing from 0.01 to 10% of a water-soluble base.
- 18. The coated composition of claim 17 wherein the photopolymerizable composition is cast into a film onto the substrate from solution.
- 19. The coated composition of claim 17 wherein the photopolymerizable composition is laminated as a precast film onto the substrate.
- 20. The coated composition of claim 17 wherein a portion of the photopolymerizable composition is insolubilized by exposure to actinic light.
- 21. A coated composition which comprises a metallic substrate of copper or a copper alloy; alloy coated with a photopolymerizable composition comprising:
- A. from 10 to 60 parts by weight of an addition polymerizable material consisting essentially of and being solely one or more non-gaseous compounds, containing at least two terminal ethylenic groups, having a boiling point above 100.degree. C. and being selected from the group consisting of an unsaturated ester of a polyol, an unsaturated amide, and a vinyl ester;
- B. from 0.001 to 10 parts by weight of a photoinitiated free-radical generating addition polymerizing initiating system;
- C. from 0.001 to 5 parts by weight of a thermaladdition polymerization inhibitor; and
- D. from 40 to 90 parts by weight of a preformed macromolecular polymeric binding agent which is a polymer of:
- a first monomeric material which contains one or more non-acidic vinyl compounds selected from the group having the general formula: ##EQU5## wherein, when X is hydrogen, Y is OOCR.sub.1, OR.sub.1, OCR.sub.1, COOR.sub.1, CN, CH=CH.sub.2, ##EQU6## or Cl; when X is methyl, Y is COOR.sub.1, CN, CH=CH.sub.2, ##EQU7## and when X is chlorine, Y is Cl; and wherein R.sub.1 is an alkyl group having from 1 to 12 carbon atoms, a phenyl group or a benzyl group and R.sub.3 and R.sub.4 are hydrogen, an alkyl group having from 1 to 12 carbon atoms or a benzyl group; and
- a second monomeric material which consists essentially of one or more alpha,beta-unsaturated carboxyl-containing monomers having from 3 to 15 carbon atoms;
- wherein the ratio of the first monomeric material to the second monomeric material is sufficient to render the binding agent soluble in a dilute aqueous solution containing from 0.01 to 10% of a water-soluble base.
- 22. The coated composition of claim 21 wherein the photopolymerizable composition is cast into a film onto the substrate from solution.
- 23. The coated composition of claim 21 wherein the photopolymerizable composition is laminated as a precast film onto the substrate.
- 24. The coated composition of claim 21 wherein a portion of the photopolymerizable composition is insolubilized by exposure to actinic light.
- 25. A laminate which comprises: (1) a metallic substrate of copper or a copper alloy, (2) an intermediate photopolymerizable layer comprising:
- A. from 10 to 60 parts by weight of an addition polymerizable material consisting essentially of and being solely one or more non-gaseous compounds, containing at least two terminal ethylenic groups, having a boiling point above 100.degree. C. and being selected from the group consisting of an unsaturated ester of a polyol, an unsaturated amide, and a vinyl ester;
- B. from 0.001 to 10 parts by weight of a photoinitiated free-radical generating addition polymerizing initiating system;
- C. from 0.001 to 5 parts by weight of a thermaladdition polymerization inhibitor; and
- D. from 40 to 90 parts by weight of a preformed macromolecular polymeric binding agent which is a polymer of:
- a first monomeric material which contains one or more non-acidic vinyl compounds selected from the group having the general formula: ##SPC4##
- wherein R is hydrogen, an alkyl group having from 1 to 6 carbon atoms or a halo group; and
- a second monomeric material which consists essentially of one or more alpha,beta-unsaturated carboxyl-containing monomers having from 3 to 5 carbon atoms;
- wherein the ratio of the first monomeric material to the second monomeric material is sufficient to render the binding agent soluble in a dilute aqueous solution containing from 0.01 to 10% of a water-soluble base, and (3) a cover layer which is impervious to oxygen.
- 26. The laminate of claim 25 wherein the copolymer is of sytrene and an unsaturated carboxyl-containing monomer.
- 27. The laminate of claim 25 wherein the unsaturated carboxyl-containing monomer is methacrylic acid.
- 28. The laminate of claim 25 wherein the unsaturated carboxyl-containing monomer is acrylic acid.
- 29. The laminate of claim 25 wherein the unsaturated carboxyl-containing monomer is maleic anhydride, maleic acid, a half-ester of maleic acid, or mixture thereof.
- 30. A laminate which comprises: (1) a metallic substrate of copper or a copper alloy, (2) an intermediate photopolymerizable layer comprising:
- A. from 10 to 60 parts by weight of an addition polymerizable material consisting essentially of and being solely one or more non-gaseous compounds, containing at least two terminal ethylenic groups, having a boiling point above 100.degree. C. and being selected from the group consisting of an unsaturated ester of a polyol, an unsaturated amide, and a vinyl ester;
- B. from 0.001 to 10 parts by weight of a photoinitiated free-radical generating addition polymerizing initiating system;
- C. from 0.001 to 5 parts by weight of a thermaladdition polymerization inhibitor; and
- D. from 40 to 90 parts by weight of a preformed macromolecular polymeric binding agent which is a polymer of:
- a first monomeric material which contains one or more non-acidic vinyl compounds selected from the group having the general formula: ##EQU8## wherein, when X is hydrogen, Y is OOCR.sub.1, OR.sub.1, OCR.sub.1, COOR.sub.1, CN, CH=CH.sub.2, ##EQU9## or Cl; when X is methyl, Y is COOR.sub.1, CN, CH=CH.sub.2, or ##EQU10## and when X is chlorine, Y is Cl; and wherein R.sub.1 is an alkyl group having from 1 to 12 carbon atoms, a phenyl group or a benzyl group and R.sub.3 and R.sub.4 are hydrogen, an alkyl group having from 1 to 12 carbon atoms or a benzyl group; and
- a second monomeric material which consists essentially of one or more alpha,beta-unsaturated carboxyl-containing monomers having from 3 to 15 carbon atoms;
- wherein the ratio of the first monomeric material to the second monomeric material is sufficient to render the binding agent soluble in a dilute aqueous solution containing from 0.01 to 10% of a water-soluble base, and (3) a cover layer which is impervious to oxygen.
- 31. A laminate which comprises: (1) a metallic substrate of copper or a copper alloy, (2) an intermediate photopolymerizable layer comprising:
- A. from 10 to 60 parts by weight of an addition polymerizable material consisting essentially of trimethylolpropane triacrylate and tetraethyleneglycol diacrylate;
- B. from 0.001 to 10 parts by weight of a photoinitiated free-radical generating addition polymerizing initating system;
- C. from 0.001 to 5 parts by weight of a thermaladdition polymerizable inihibitor; and
- D. from 40 to 90 parts by weight of a preformed macromolecular polymeric binding agent which is a polymer of styrene and monobutyl maleate, wherein the ratio of the styrene to the monobutyl maleate is sufficient to render the binding agent soluble in a dilute aqueous solution containing from 0.01 to 10% of a water-soluble base, and (3) a cover layer which is impervious to oxygen.
- 32. The laminate of claim 31 wherein the photoinitiated free-radical generating addition polymerizing initiating system is an admixture of benzophenone and 4,4'-bis-(dimethylamino)-benzophenone and the thermal-addition polymerizable inhibitor is 2,2'-methylene-bis(4-ethyl-6-tert-butyl phenol).
- 33. The laminate of claim 31 wherein the ratio of the styrene to monobutyl maleate in the binding agent is from about 35:65 to 70:30.
- 34. A laminate which comprises: (1) a metallic substrate of copper or a copper alloy, (2) an intermediate photopolymerizable layer comprising:
- A. from 10 to 60 parts by weight of an addition polymerizable material consisting essentially of pentaerythritol acrylates;
- B. from 0.001 to 10 parts by weight of a photoinitiated free-radical generating addition polymerizing initiating system;
- C. from 0.001 to 5 parts by weight of a thermaladdition polmerizable inhibitor; and
- D. from 40 to 90 parts by weight of a preformed macromolecular polymeric binding agent which is a polymer of styrene and monobutyl maleate, wherein the ratio of the styrene to the monobutyl maleate is sufficient to render the binding agent soluble in a dilute aqueous solution containing from 0.01 to 10% of a water-soluble base, and (3) a cover layer which is impervious to oxygen.
- 35. The laminate of claim 34 wherein the photoinitiated free-radical generating addition polymerizing initiating system is an admixture of benzophenone and 4,4'-bis(dimethylamino)-benzophenone and the thermal-addition polymerizable inhibitor is 2,2'-methylene-bis(4-ethyl-6-tert-butyl phenol).
- 36. The laminate of claim 34 wherein the ratio of the styrene to monobutyl maleate in the binding agent is from about 35:65 to 70:30.
- 37. A laminate which comprises: (1) a metallic substrate of copper or a copper alloy, (2) an intermediate photopolymerizable layer comprising:
- A. from 10 to 60 parts by weight an addition polymerizable material consisting essentially of pentaerythritol acrylates;
- B. from 0.001 to 10 parts by weight of a photoinitiated free-radical generating addition polymerizing initiating system;
- C. from 0.001 to 5 parts by weight of a thermal-addition polymerizable inhibitor; and
- D. from 40 to 90 parts by weight of a preformed macromolecular polymeric binding agent which is a polymer of vinyl acetate and crotonic acid, wherein the ratio of the vinyl acetate to the crotonic acid is sufficient to render the binding agent soluble in a dilute aqueous solution containing from 0.01 to 10% of a water-soluble base, and (3) a cover layer which is impervious to oxygen.
- 38. The laminate of claim 37 wherein the vinyl acetate-crotonic acid ratio is from 70:30 to 95:5.
Parent Case Info
This is a division, of application Ser. No. 315,153, filed Dec. 14, 1972 and now U.S. Pat. 3,887,450, which, in turn, is a continuation of U.S. Ser. No. 112,797 filed Feb. 4, 1971, now abandoned.
US Referenced Citations (4)
Divisions (1)
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Number |
Date |
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315153 |
Dec 1972 |
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Continuations (1)
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Number |
Date |
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112797 |
Feb 1971 |
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