Claims
- 1. A method of manufacturing an ink-jet recording head comprising a substrate having a surface on which protrusion portions and recess portions between them are formed, comprising steps of:forming an oxide film on the surface of the substrate; forming a photosensitive resin film on the oxide film; photolithographically patterning the photosensitive film so as to form regularly arranged areas for the protrusion portions; removing the oxide film at areas for recess portions in accordance with the patterned photosensitive film; etching the surface of the substrate in arranged areas for the recess portions in accordance with the etched oxide film as a mask, so as to form the protrusion portions; forming nozzle holes in the substrate; and depositing a water repellant material on the surface of the substrate.
- 2. The method of manufacturing an ink-jet recording head according to claim 1, wherein said protrusion portions and recess portion have such sizes that a liquid drop cannot enter each of the recess portions keeping an air layer therein, and said surface has water repellency function as a result.
- 3. The method of manufacturing an ink-jet recording head according to claim 1, wherein said protrusion portions are square poles.
- 4. The method of manufacturing an ink-jet recording head according to claim 1, wherein said protrusion portions are arranged lines.
- 5. The method of manufacturing an ink-jet recording head according to claim 1, wherein said protrusion portions are arranged in a lattice.
- 6. The method of manufacturing an ink-jet recording head according to claim 1, wherein said substrate is made of silicon, glass or quartz.
- 7. In a method of manufacturing from a substrate a recording head that jets ink, the improvements comprising:providing an oxide film on a surface of the substrate; providing a photosensitive film on the oxide film; photolighographically patterning the photosensitive film in regularly arranged areas for protrusions; removing the films about the areas for recesses; etching the surface of the substrate tp form the protrusions and recesses thereon; forming at least one nozzle hole into the surface of the substrate; and providing a water repellant material on the etched surface of the substrate.
- 8. The method according to claim 7, wherein the protrusions and recesses have sizes such that a drop of the ink on one or more of the protrusions does not enter the recesses, thereby defining an air layer in the recesses and providing ink repellence to the surface of the substrate.
Priority Claims (2)
Number |
Date |
Country |
Kind |
9-245121 |
Sep 1997 |
JP |
|
10-170952 |
Jun 1998 |
JP |
|
Parent Case Info
“This application is a divisional of application Ser. No. 09/307,992 filed on May 10, 1999 , now U.S. Pat. No. 6,467,876, which is a continuation-in-part of International Application PCT/JP98/04034 filed on Sep. 9, 1998, which designated the U.S., claims the benefit thereof and incorporates the same by reference.
US Referenced Citations (8)
Foreign Referenced Citations (4)
Number |
Date |
Country |
06093121 |
Apr 1994 |
JP |
10130844 |
May 1998 |
JP |
10156282 |
Jun 1998 |
JP |
410203819 |
Aug 1998 |
JP |
Non-Patent Literature Citations (4)
Entry |
Introduction to Fluorochemistry the Nikkan Kogyo Shinbun Ltd., Published Mar. 1, 1997, from Line 10 of p. 59 to Line 6 of p. 63 and English Translation Thereof. |
Patent Abstracts of Japan of JP 10-130,844 of May 19982. |
Patent Abstracts of Japan of JP 06093121 of Apr. 1994. |
Patent Abstracts of Japan of JP 10156282 of Jun. 1998. |
Continuation in Parts (1)
|
Number |
Date |
Country |
Parent |
PCT/JP98/04034 |
Sep 1998 |
US |
Child |
09/307992 |
|
US |