Claims
- 1. A normally positive-working radiation-sensitive mixture, consisting essentially of, in admixture:
- from 50 to 85% by weight, relative to the weight of the non-volatile components of the radiation-sensitive mixture, of a binder that is a polycondensation product or polymer having free phenolic hydroxyl groups, said binder being insoluble in water and soluble in aqueous/alkaline solutions;
- a 1,2-quinone diazide; and
- at least one urethane compound in an amount sufficient to diminish the developer solubility of exposed regions of a layer of said mixture coated on a substrate when said layer is subjected to heat treatment, subsequently blanket-exposed and finally developed with a developer solution to produce a negative image, said at least one urethane represented by formula I: ##STR38## in which R.sub.1 is hydrogen or methyl,
- R.sub.2 is hydrogen, alkyl, substituted or unsubstituted aryl, or substituted or unsubstituted arylaminocarbonyl,
- R.sub.3 is substituted or unsubstituted arylene or arylenealkylene,
- Q is hydrogen, carbonyl, oxygen, sulfur, sulfonyl, --CH.sub.4-p, or --CR.sub.5 R.sub.6 in which R.sub.5 and R.sub.6 can be identical or different and are selected from the group consisting of hydrogen, alkyl and aryl,
- m is 1, 2 or 3,
- n is at least 1 and not more than 50, and
- is 1, 2 or 3.
- 2. A mixture as claimed in claim 1, wherein
- R.sub.1 is hydrogen or methyl,
- R.sub.2 is hydrogen, C.sub.1 -C.sub.2 -alkyl, phenyl, naphthyl, or phenylaminocarbonyl, which can be substituted by alkyl,
- R.sub.3 is phenylene, which can be substituted by alkyl,
- Q is hydrogen or methylene,
- m is 1 or 2,
- n is at least 3 and not more than 25, and
- p is 1 or 2.
- 3. A mixture as claimed in claim 1, wherein
- R.sub.1 is hydrogen,
- R.sub.2 is phenyl, phenylaminocarbonyl, which can be substituted by alkyl,
- R.sub.3 is phenylene,
- Q is hydrogen,
- m is 1,
- n is at least 3 and not more than 25, and
- p is 1.
- 4. A radiation-sensitive mixture as claimed in claim 1, comprising between about 0.5 and 30 percent by weight, relative to the weight of the non-volatile components of the mixture, of compounds of the formula I.
- 5. A radiation-sensitive mixture as claimed in claim 2, wherein the urethane compound comprises about 0.5 to 30 percent by weight, relative to the weight of the non-volatile components of the radiation-sensitive mixture.
- 6. A radiation-sensitive mixture as claimed in claim 1, wherein the 1,2-quinone diazide is a 1,2-naphthoquinone-2-diazide derivative which has an electronegative substituent in the 4- or 5-position.
- 7. A radiation-sensitive mixture as claimed in claim 6, wherein the electronegative substituent is an aryloxysulfonyl group.
- 8. A radiation-sensitive mixture as claimed in claim 1, wherein the binder is a polycondensation product or polymer having a phenolic hydroxyl group content in a range from about 1 to 10 mmol/g of binder.
- 9. A radiation-sensitive mixture as claimed in claim 1, wherein the urethane compound comprises about 1 to 25 percent by weight, relative to the weight of the non-volatile components of the radiation-sensitive mixture.
- 10. A radiation-sensitive mixture as claimed in claim 9, wherein the 1,2-quinone diazide comprises about 3 to 50 percent by weight, relative to the overall solid content of the radiation-sensitive mixture.
- 11. A radiation-sensitive mixture as claimed in claim 9, wherein the 1,2-quinone diazide comprises about 7 to 35 percent by weight, relative to the overall solid content of the radiation-sensitive mixture.
- 12. A radiation-sensitive mixture as claimed in claim 1, wherein Q is hydrogen, sulfur, or --CH.sub.4-p, or --CR.sub.5 R.sub.6 in which R.sub.5 and R.sub.6 can be identical or different and are selected from the group consisting of hydrogen, alkyl and aryl.
- 13. A radiation-sensitive mixture as claimed in claim 12, wherein n in Formula I is not more than 25.
- 14. A radiation-sensitive mixture as claimed in claim 13, wherein the urethane compound comprises not more than 25 percent by weight, relative to the weight of the non-volatile components of the radiation-sensitive mixture.
- 15. A radiation-sensitive recording material comprising:
- a substrate; and
- a radiation-sensitive layer of a mixture as claimed in claim 1 coated on said substrate.
Priority Claims (1)
Number |
Date |
Country |
Kind |
4004719 |
Feb 1990 |
DEX |
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Parent Case Info
This application is a continuation of application Ser. No. 07/651,210, filed Feb. 6, 1991, now abandoned.
US Referenced Citations (21)
Foreign Referenced Citations (7)
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EPX |
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Non-Patent Literature Citations (1)
Entry |
Scott A. MacDonald et al., "Image Reversal: The Production of a Negative Image in a Positive Photoresist", Interface 82, 1982, San Diego, pp. 1-6. |
Continuations (1)
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Number |
Date |
Country |
Parent |
651210 |
Feb 1991 |
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