"Metallization for ULSI," Hideo Kotani, Extended Abtracts of the 20th (1988 Int'l) Conference on Solid State Devices and Materials, Tokyo, 1988, pp. 565-568. |
"Fabrication of Low-Resistance Polysilicon Via Plugs in Borophosphosilicate Glass," Raley et al., Journal of the Electrochemical Society, vol. 135, No. 10, Oct. 1988, pp. 2640-643. |
A. Ipri et al., "Selective Epitaxial Growth for the Fabrication of CMOS Integrated Circuits," IEEE Transactions on Election Devices, vol. ED-31, No. 12, Dec. 1984. |
H. Shibata et al., "High Performance Half-Micron PMOSETs with 0.1 .mu.m Shallows P.sup.+ N Junction Utilizing Selective Silicon Growth and Rapid Thermal Annealing," Proceeding of the IEDM (1987). |