Number | Date | Country | Kind |
---|---|---|---|
61-82244 | Apr 1986 | JPX | |
61-121277 | May 1986 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
3466172 | Skarvinko | Sep 1969 | |
3649283 | Christenson et al. | Mar 1972 | |
3728123 | Gipe | Apr 1973 | |
4210569 | Sysjuk et al. | Jul 1980 | |
4217407 | Watanabe et al. | Aug 1980 | |
4342820 | Kinashi et al. | Aug 1982 | |
4358522 | Fujita et al. | Nov 1982 | |
4496647 | Kawabe et al. | Jan 1985 | |
4504566 | Dueber | Mar 1985 | |
4557996 | Aoyama et al. | Dec 1985 | |
4571374 | Vikoslanl | Feb 1986 | |
4690886 | Naritomi et al. | Jan 1987 |
Number | Date | Country |
---|---|---|
0087582 | Sep 1983 | EPX |
58-133108 | Feb 1985 | JPX |
511560 | Aug 1976 | SUX |
850954 | Oct 1960 | GBX |
2034911 | Jun 1980 | GBX |
Entry |
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Chemical Abstracts, vol. 94, 1981 Mar., No. 5, Columbus, Ohio, U.S.A. |
IBM Technical Disclosure Bulletin, vol. 15, No. 1, Jun. 1972., Resist Process, R. S. Horst, L. H. Kaplan and D. P. Merritt, p. 46. |
English Language Abstract of Japanese Publication #59-69751 published 4/1984. |