The present invention relates to a probe, a method for producing a probe, a probe microscope, a magnetic head, a method for producing a magnetic head, and a magnetic record and reproduction apparatus, and particularly relates to a probe suitable for use for observation of a micro area, a probe microscope using the probe, or a magnetic head suitable for use for high density magnetic recording, and a magnetic record and reproduction apparatus using the magnetic head.
In recent years, for a probe of a micro area of a surface of a sample, a scanning microscope such as a scanning tunneling microscope and an atomic force microscope, etc. is often used.
On the other hand, in a magnetic record and reproduction apparatus, with further improvement of recording density of magnetic recording media, a magnetic head which enables to make high density recording is requested. As a method for producing a magnetic head which enables to make such high density recording, conventionally a top-down method applying a fine processing technology is used (for example, see Japanese Patent Laid-open Publication No. 270322/1997, Japanese Patent Laid-open Publication No. 2000-149214, and Japanese Patent Laid-open Publication No. 2005-122838).
In a conventional scanning probe microscope, a probe having an atomic-scale sharp front edge is used. However, it was difficult to produce such a probe with high controllability and productivity. Further, as the probe was fragile, it was difficult to handle.
On the other hand, in a method for producing a magnetic head using a conventional fine processing technology, it is very difficult to produce a magnetic head with a gap length of nanometer or sub-nanometer order.
In recent years, there is proposed an element wherein two thin pieces, each of which is composed of a periodic structure having conductor layers and dielectric layers, are stacked such that those layers intersect each other, and that the edges of the conductor layers face each other with a gap (see International Publication No. 06/035610 and International Publication No. 09/041239). However, these elements cannot be used as a probe probing a surface of a sample or a magnetic head. Also, there is proposed a magnetic head wherein striped metal magnetic films and insulator thin films are arranged alternately (see Japanese Patent Laid-open Publication No. 277612/1987). The magnetic head is formed by forming a laminated film wherein metal magnetic films and insulator thin films are laminated alternately on the first nonmagnetic substrate, joining the second nonmagnetic substrate on the laminated film, and cutting the joined body along the direction at right angle to the laminated film. Also, there is proposed a thin film magnetic head wherein a lower magnetic pole layer, an upper magnetic pole layer, a recording gap layer and a thin film coil are provided and the thin film coil is taken up in spirals around the upper magnetic pole layer in a state wherein the thin film coil is insulated for the lower magnetic pole layer and the upper magnetic pole layer (see Japanese Patent Laid-open Publication No. 2004-310975). However, it is very difficult to record and reproduce a signal for a micro-recording area of nanometer or sub-nanometer order size by these magnetic heads.
Therefore, a subject to be solved by the present invention is to provide a probe with a gap length of nanometer or sub-nanometer order and with durability that can be easily obtained, and can probe a surface of a micro area of nanometer or sub-nanometer order size, and a method for producing the probe, and a probe microscope using such a probe.
Another subject to be solved by the present invention is to provide a magnetic head with a gap length of nanometer or sub-nanometer order and with durability that can be easily obtained, and can record and reproduce a signal for a micro recording area of nanometer or sub-nanometer order size, and a method for producing the magnetic head, and a magnetic record and reproduction apparatus using such a magnetic head.
The aforementioned subjects and the other subjects will be apparent from these descriptions referring to the attached drawings.
To solve the aforementioned subjects, according to the present invention, there is provided a probe wherein one or more pseudo zero-dimensional area formed by facing conductors is formed in the two-dimensional plane, and the pseudo zero-dimensional area is exposed on a surface, thereby making it possible to detect a signal from the direction intersecting to the surface.
Here, the pseudo zero-dimensional area means an area of nanometer or sub-nanometer order size that can be regarded as a zero-dimensional area pseudically, and for example, the size of an area is 20 nm or less, typically 10 nm or less.
Further, according to the present invention, there is provided a method for producing a probe comprising steps of:
forming a stacked structure by stacking at least two thin pieces, each of which is composed of a structure having conductor layers and dielectric layers laminated therein, such that those layers intersect each other and the edges of the conductor layers face with a gap to form one or more pseudo zero-dimensional area; and
cutting the stacked structure along a diving plane passing the intersecting section of the layers or the vicinity of the intersecting section and dividing the intersecting angle of the layers.
Further, according to the present invention, there is provided a probe microscope comprising a probe wherein one or more pseudo zero-dimensional area formed by facing conductors is formed in the two-dimensional plane, and the pseudo zero-dimensional area is exposed on a surface, thereby making it possible to detect a signal from the direction intersecting to the surface.
Further, according to the present invention, there is provided a magnetic head wherein one or more pseudo zero-dimensional area formed by facing magnetic materials is formed in the two-dimensional plane, and the pseudo zero-dimensional area is exposed on a surface, thereby making it possible to detect a signal from the direction intersecting to the surface.
Further, according to the present invention, there is provided a method for producing a magnetic head comprising steps of:
forming a stacked structure by stacking at least two thin pieces, each of which is composed of a structure having magnetic layers and dielectric layers laminated therein, such that those layers intersect each other and the edges of the magnetic layers face with a gap to form one or more pseudo zero-dimensional area; and
cutting the stacked structure along a diving plane passing the intersecting section of the layers or the vicinity of the intersecting section and dividing the intersecting angle of the layers.
Further, according to the present invention, there is provided a magnetic record and reproduction apparatus comprising a magnetic head wherein one or more pseudo zero-dimensional area formed by facing magnetic materials is formed in the two-dimensional plane, and the pseudo zero-dimensional area is exposed on a surface, thereby making it possible to detect a signal from the direction intersecting to the surface.
In the probe, typically the pseudo zero-dimensional area formed by stacking at least two thin pieces, each of which is composed of a structure having conductor layers and dielectric layers laminated therein, such that those layers intersect each other, and that the edges of the conductor layers face with a gap, is formed in the two-dimensional plane, and the pseudo zero-dimensional area is exposed on the surface, thereby making it possible to detect a signal from the direction that intersect at right angle to the surface. Or, in the probe, typically, at least two thin pieces having a structure that a conductor layer is sandwiched by dielectric layers are stacked such that those layers intersect each other and that the edges of the conductor layers face with a gap, and the pseudo zero-dimensional area is exposed on a surface made of the two-dimensional plane including the sides of at least two thin pieces. Or, the probe has typically a shape formed by cutting a stacked structure wherein at least two thin pieces, each of which is composed of a structure having conductor layers and dielectric layers laminated therein, are stacked such that those layers intersect each other, and that the edges of the conductor layers face with a gap along a dividing plane passing the intersecting section of the layers or the vicinity of the intersecting section and dividing the intersecting angle of the layers. The structure having conductor layers and dielectric layers laminated therein is typically a periodic structure having conductor layers and dielectric layers laminated therein, but is not limited to this. The number of the conductor layers and dielectric layers included in a thin piece is not limited, and is selected as necessary. Also, when the plural conductor layers or the plural dielectric layers exist in a thin piece, their thickness may be whether identical or non-identical.
In the magnetic head, typically the pseudo zero-dimensional area formed by stacking at least two thin pieces, each of which is composed of a structure having magnetic layers and dielectric layers laminated therein, such that those layers intersect each other and the edges of the magnetic layers face with a gap, is formed in the two-dimensional plane and the pseudo zero-dimensional area is exposed on a surface, thereby making it possible to detect a signal from the direction that intersect at right angle to the surface. Or, in the magnetic head, typically, at least two thin pieces having a structure that a magnetic layer is sandwiched by dielectric layers are stacked such that those layers intersect each other and that the edges of the magnetic layers face with a gap, and the pseudo zero-dimensional area is exposed on a surface made of the two-dimensional plane including the sides of at least two thin pieces. Or, the magnetic head has typically a shape formed by cutting a stacked structure wherein at least two thin pieces, each of which is composed of a structure having magnetic layers and dielectric layers laminated therein, are stacked such that those layers intersect each other, and that the edges of the magnetic layers face with a gap along a dividing plane passing the intersecting section of the layers or the vicinity of the intersecting section and dividing the intersecting angle of the layers. The structure having magnetic layers and dielectric layers laminated therein is typically a periodic structure having magnetic layers and dielectric layers laminated therein, but is not limited to this. The number of the magnetic layers and dielectric layers included in a thin piece is not limited, but is selected as necessary. Also, when the plural magnetic layers or the plural dielectric layers exist in a thin piece, the thickness of these layers may be whether identical or non-identical.
In the probe or the magnetic head, the dividing plane dividing the stacked structure wherein at least two thin pieces, each of which is composed of a structure having conductor layers and dielectric layers laminated therein or a structure having magnetic layers and dielectric layers laminated therein, are stacked is typically a bisecting plane of the intersection angle of the layers, but is not limited to this. Also, typically, at least the two thin pieces are stacked such that those layers intersect each other at the angle of 90°, but is not limited to this. The conductor layers of the probe is typically made of metal, and as metal, for example, gold, palladium, platinum, titanium etc., and various kinds of alloys can be used, and is selected as necessary. Also, the magnetic layers of the magnetic head is typically made of ferromagnetic materials, and as ferromagnetic materials, various kinds of materials, for example, nickel, iron, nickel-iron alloy, iron-nickel-chromium alloy, etc. can be used and is selected as necessary. Also, the dielectric layers of the probe or the magnetic head is made of an organic or inorganic dielectric material. As organic dielectric material, various polymers (resin), etc. such as, for example, polyethylene naphthalate, polyethylene terephthalate, polytrimethylene terephtalate, polybutylene terephthalate, polybutylene naphthalate, polyimide, etc. can be used, and as inorganic dielectric materials, for example, silicon dioxide and aluminum oxide, etc. can be used. The thickness of the conductor layer or magnetic layer (the thickness of in-plane direction of a thin piece) is selected as necessary, but typically, is 0.2 nm or more and 100 nm or less. Here, 0.2 nm, the minimum thickness, is the minimum thickness which enables to make a film by a vacuum evaporation method, etc. The thickness of the dielectric layer (the thickness of in-plane direction of a thin piece) is not limited, and is selected as necessary, but typically, is 0.2 nm and more and 50 μm or less. The minimum thickness of 0.2 nm of the dielectric layer is also the minimum thickness which enables to make a film by vacuum evaporation method, etc.
A method for producing a thin piece which is composed of the structure having the conductor layers and dielectric layers laminated therein, or a thin piece which is composed of the structure having the magnetic layers and dielectric layers laminated therein, is not especially limited. For example, a disc-shaped roll wherein the conductor layers and the dielectric layers are formed alternately and periodically in the radial direction, or a disc-shaped roll wherein the magnetic layers and dielectric layers are formed alternately and periodically in the radial direction is produced by a roll-to-roll process. The thin piece can be produced by cutting the roll. The number of stacked layers of a thin piece is selected as necessary. The thin piece is typically a square or a rectangle, but is not limited to these. Also, the size and thickness of the thin piece is selected as necessary. Further, the thin piece to be stacked may be either identical or non-identical, for example, two thin pieces having different interval of conductor layers each other may be stacked, or two thin pieces having different interval of magnetic layers each other may be stacked.
According to the present invention, one or more pseudo zero-dimensional area formed by facing conductors or magnetic materials is formed in the two-dimensional plane, and the pseudo zero-dimensional area is exposed on the surface, thereby making it possible to detect a signal from the direction intersecting to the surface. Therefore, a probe which enables to probe a surface of a micro area of nanometer or sub-nanometer order size or a magnetic head which enables to record and reproduce of a signal for a micro recording area of nanometer or sub-nanometer order size can be realized. Also, these probes and magnetic heads can be produced easily by only stacking at least two thin pieces produced by a roll-to-roll process, etc. and cutting them. In this case, when thin pieces are stacked, a spacer layer of a nanometer order thickness is sandwiched between them, and when a thin piece is produced, the upper surface of the conductor layers or the magnetic layers is dented to a nanometer order distance from the both major surfaces of the thin piece, thereby making it possible to produce the probe or the magnetic head with a gap length of nanometer or sub-nanometer order easily. The probe or the magnetic head to be produced by the method has high mechanical strength and is easy to handle because they are composed of the stacked structure having thin pieces stacked therein.
The best mode for carrying out the invention (hereafter refer to embodiment) is explained in detail below with reference to the accompanying drawings. In all drawings of the embodiment, the same reference numerals are given to the same parts.
First, the first embodiment of the present invention is explained. In the first embodiment, a magnetic head and a method for producing the magnetic head are explained.
As shown in
By being taken up the dielectric layer 13 with the magnetic film by the take up roller 15 as explained above, as shown in
Next, as necessary, both sides of the disc-shaped spiral structure are flattened by polishing using a chemical mechanical polishing (CMP) method, etc.
Next, a part of the disc-shaped spiral structure, both sides of which has been polished in this way, is cut down as shown by a dot and dashed-lined quadrangle(a rectangle or a square) of
Next, as shown in
When forming the stacked structure by stacking the thin pieces 18 and 20, for example, the thin piece 18 is put on a support plate, then the thin piece 20 is put on it, and pressed to closely adhere the thin pieces 18 and 20 each other through the spacer layer 19. In the state, a support plate made of, for example, polymethylmethacrylate (PMMA), etc. is stuck for the four sides (end face) of the stacked structure of the thin pieces 18 and 20, by adhesive, for example, epoxy-based adhesive, etc. Then, after releasing the press for the thin piece 20, a support plate made of, for example, PMMA, etc. is stuck for the support plate stuck to both sides of the stacked structure of the thin pieces 18 and 20 and sides of the stacked structure by adhesive, for example, epoxy-based adhesive. In this way, the stacked structure wherein the thin pieces 18 and 20 are closely-adhered each other through the spacer layer 19 is formed.
Next, as shown in
One triangular prism fragment two-divided by the method is shown in
In each head part of the magnetic head 22, electric current can be flown between the magnetic film 17 of the thin piece 18 and the magnetic film 17 of the thin piece 20 by the outside power supply. In this case, as each head part has a structure wherein the edge of the magnetic film 17 of the thin piece 18 and the edge of the magnetic film 17 of the thin piece 20 face, it is possible to concentrate lines of magnetic force in the gap G formed by the spacer layer 19 and to record and reproduce easily (see a related explanation of
When using the magnetic head 22 for a magnetic record and reproduction apparatus, a manner of recording or reproducing for magnetic recording media by the magnetic head 22 is shown in
An example is explained.
Using a polyethylene naphthalate (PEN) film (trade name: TEONEX Q65) having 5-mm-width and 100-μm-thickness supplied by Teijin DuPont Japan Limited as the dielectric layer 13, the PEN film is cut down to 2-mm-width by using a slitter with the film-rolling-up system in clean environment. On the PEN film having 2-mm-width and 100-μm-thickness prepared by the process, while forming a nickel thin film as the magnetic film 13 by a vacuum evaporation method, the film is taken up by a take up roll. Forming a nickel thin film, for example, is made by the same process by the same vacuum evaporator as described in the International Publication No. 09/041239. The thickness of the nickel thin film is 17 nm. Next, from a roll taking up the PEN film formed the nickel thin film, a quadrangle-shaped thin piece laminated body shown by a dot and dashed line in
Next, two laminated bodies fully enclosed by the PMMA plates formed by the method is cut down along a bisecting plane 21 shown by a dot and dashed line in
As an example, a cross sectional transmission electron microscopic image (a cross sectional TEM image) of the sample having the 20-nm-thick nickel thin film formed on the PEN film by vacuum evaporation method is shown in
As described above, according to the first embodiment, it is possible to obtain easily a multi-type magnetic head 22 wherein the plural head parts structured such that the magnetic film 17 of the thin piece 18 and the magnetic film 17 of the thin piece 20 face with the gap G having the gap length determined by the thickness of the spacer layer 19 in the direction of its width, are arranged in equal distance in linear fashion. In the magnetic head 22, by selecting the thickness of the spacer layer 19 to nanometer or sub-nanometer order, a gap length of each head part can be made quite small as nanometer or sub-nanometer order. For this, by the magnetic head 22, it is possible to keep up fully with the trend of ultra-high recording density of magnetic recording media. Also, as the magnetic head 22 has the plural head parts, record and reproduction can be made for the plural points of the surface of magnetic record media at the same time, and the speed of record and reproduction can be improved drastically. Further, as the magnetic head 22 is made of the stacked structure having the two thin pieces 18 and 20 stacked, not only its mechanical strength is high, lifetime is long, but also is easy to handle.
Next, a magnetic head according to the second embodiment of the present invention is explained.
In the second embodiment, instead of the spacer layer 19 used in the first embodiment, a micro spherical ball is used. More specifically, as shown in
According to the second embodiment, various advantages as the first embodiment can be obtained.
Next, a magnetic head according to the third embodiment of the present invention is explained.
In the third embodiment, the spacer layer 19 used in the first embodiment is not used. Alternatively, the upper surface of the magnetic film 17 exposed on the major surface of the thin pieces 18 and 20 is dug in a predetermined depth from the major surface, especially is dug a distance corresponding to ½ of the gap length. For this, when the both sides of the disc-shaped spiral structure shown in
After this, as the same as the first embodiment, the stacked structure is cut and is two-divided, and a magnetic head 22 is produced. The bottom surface made of a cut plane of the magnetic head 22 is shown in
The other respects are the same as the first embodiment.
According to the third embodiment, various advantages as the same as the first embodiment can be obtained.
Next, a magnetic head according to the fourth embodiment of the present invention is explained.
In the fourth embodiment, as the same as the first embodiment, after forming the stacked structure having the thin pieces 18 and 20 stacked, the stacked structure is cut along the plane shown by a double dot and dashed line in
The other respects are the same as the first embodiment.
According to the fourth embodiment, various advantages as the same as the first embodiment can be obtained.
Next, the fifth embodiment of the present invention is explained. In the fifth embodiment, a probe used for a probe microscope and the method for producing the probe are explained.
In the fifth embodiment, instead of the magnetic film 17 in the first embodiment, a nonmagnetic metal film is used. More specifically, in the vacuum evaporator shown in
Next, as the same as the first embodiment, on the thin piece 25, another thin piece having just the same structure as the thin piece 25 is stacked through a spacer layer made of a dielectric material such that those dielectric layers 13 and metal films 26 intersect each other at the angle of 90° to form the stacked structure. The thickness of the spacer layer is appropriately selected according to the gap length of the probe part. The spacer layer is the same as the first embodiment.
Next, the stacked structure wherein the thin piece 25 and another thin piece having the same structure as the thin piece 25 are stacked is cut down as the same as the first embodiment, and is two-divided. One triangular prism fragment two-divided this way is shown in
According to the fifth embodiment, it is possible to obtain easily a multi-type probe 28 wherein the plural probe parts having a structure that the metal film 26 of the thin piece 25 and the metal film 26 of the thin piece 27 face with a gap G having a gap length determined by the thickness of the spacer layer 19 to the direction of its width is arranged in equal distance in linear fashion. The probe 28, by selecting the thickness of the spacer layer 19 to nanometer or sub-nanometer order, a gap length of each probe part can be made very small to nanometer or sub-nanometer order. For this, the probe 28 can keep up fully with the probe of a micro area of a sample surface. Also, as the probe 28 has the plural probe parts, the plural points of a sample surface can be probed at the same time, and the speed of the probe can be improved drastically. Further, as the probe 28 is made of the stacked structure having two thin pieces 25 and 27 stacked, not only the probe is high in mechanical strength, long in lifetime, but also is easy to handle.
Next, a probe according to the sixth embodiment of the present invention is explained.
In the sixth embodiment, instead of the spacer layer 19 used in the fifth embodiment, a micro spherical ball is used. The other respects are the same as the fifth embodiment.
According to the sixth embodiment, various advantages as the same as the fifth embodiment can be obtained.
Next, a probe according to the seventh embodiment of the present invention is explained.
According to the seventh embodiment, the spacer layer 19 used in the fifth embodiment is not used. Alternatively, the upper surface of the metal film 26 exposed on the major surface of the thin pieces 25 and 27 is dug a predetermined depth from the major surface, especially is dug a distance corresponding to ½ of the gap length. And, the thin piece 27 is stacked on the thin piece 25 such that a major surface wherein the upper surface of the metal film 26 of the thin piece 25 is dug a distance corresponding to ½ of the gap length and a major surface wherein the upper surface of the metal film 26 of the thin piece 27 is dug a distance corresponding to ½ of the gap length contact each other, thereby forming the stacked structure.
After this, as the same as the first embodiment, the stacked structure is cut and is two-divided, thereby producing a probe 28.
The other respects are the same as the fifth embodiment.
According to the seventh embodiment, various advantages as the same as the fifth embodiment can be obtained.
Next, a probe according to the eighth embodiment of the present invention is explained.
In the eighth embodiment, a thin piece 25 as shown in
These thin pieces 25 and 27 can be formed as follows, for example. That is, as the same as the first embodiment, in the vacuum evaporator shown in
Next, as shown in
After this, the stacked structure is cut along the bisecting plane 21 passing the intersecting section of the dielectric layer 13 and the metal film 26 of the thin pieces 25 and 27 and bisecting the intersection angle of the dielectric layer 13 and the metal film 26, and is two-divided. At this time, the cutting is made to pass both intersecting sections of the metal film 26 closely arranged to the direction parallel to the bisecting plane 21.
The other respects are the same as the first embodiment.
According to the eight embodiment, in addition to various advantages as the same as the fifth embodiment, following advantages can be obtained. That is, according to the eighth embodiment, a multi-type probe wherein a pair of probe parts are closely arranged each other in equal distance on a bottom surface made of a cut plane can be obtained. Also, in this case, for example, a pair of metal films 26 structuring a probe part of the pair of probes closely-arranged each other can be used as the first electrode and the second electrode, and another pair of metal films 26 structuring the other probe part can be used as the third electrode and the fourth electrode, thereby making it possible to realize a proximal 4-electrode type probe.
Next, a probe according to the ninth embodiment of the present invention is explained.
According to the ninth embodiment, the same kind of thin piece as the eighth embodiment is used as the thin piece 25, and the same kind of thin piece as the fifth embodiment is used as the thin piece 27. And, as shown in
After this, the stacked structure is cut along the bisecting plane 21 bisecting the intersection angle of the dielectric layer 13 and the metal film 26, and is two-divided. At this time, the cutting is made pass to only one intersecting section of the metal film 26 of the thin pieces 25 and 27 arranged closely each other in a direction parallel to the metal film 26 of the thin piece 27.
The other respects are the same as the first embodiment.
According to the ninth embodiment, in addition to various advantages as the same as the fifth embodiment, following advantages can be obtained. That is, according to the ninth embodiment, when a pair of metal films 26 structuring a probe part exposed on the bottom surface made of a cut plane are used as the first electrode and the second electrode, each metal film 26 structuring the intersecting section of the metal film 26 close to the probe part can be used as the third electrode, thereby making it possible to realize a probe with a proximal 3-electrode.
The embodiments and examples of the present invention are precisely explained. However, the present invention is not limited to the embodiments and examples, and a variety of variation based on the technical idea of the present invention is possible.
For example, numerical numbers, materials, shapes, arrangements, structures, etc. presented in the aforementioned embodiments and examples are only examples, and the different numerical numbers, materials, shapes, arrangements, structures, etc. may be used as necessary.
Also, as necessary, more than two embodiments from the first to the ninth embodiments may be combined. For example, in the fifth embodiment, the stacked structure of the thin pieces 25 and 27 may be cut down along the different direction from the bisecting plane 21 as the same as the fourth embodiment. Further, in the first embodiment, the thin pieces 18 and 20 are structured as the same as the thin pieces 25 and 27 of the fourth embodiment, and by cutting the stacked structure of these thin pieces 18 and 20 along the bisecting plane 21, a multi-type magnetic head may be produced as well.
Number | Date | Country | Kind |
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2009-154644 | Jun 2009 | JP | national |
Filing Document | Filing Date | Country | Kind | 371c Date |
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PCT/JP2010/061290 | 6/25/2010 | WO | 00 | 2/3/2012 |