Claims
- 1. A method of fabricating a three-dimensional, free-standing microstructure including the steps of:
- preparing a substrate for said microstructure;
- depositing a sacrificial layer on said substrate;
- removing at least a portion of said layer in a desired pattern to form holes through said sacrificial layer which expose portions of said substrate, said holes having bottoms and having sloping sides defined by the remaining sacrificial layer;
- depositing at least one relatively thin layer in a pattern atop said sacrificial layer;
- depositing a relatively thick structural material in a pattern to continuously cover the sides and bottoms of said holes through said sacrificial layer and to cover at least a portion of said relatively thin layer;
- and exposing the structure from the preceeding steps to heat and electromagnetic radiation in an oxidizing atmosphere to cause sublimeton of the remaining sacrificial layer, whereby a structure is produced which has said relatively thin layer supported above said substrate by posts of said structural material.
Government Interests
The invention described herein may be manufactured, used, and licensed by the U.S. Government for governmental purposes without the payment of any royalties thereon.
US Referenced Citations (6)