removing a sacrificial layer

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B81C1/00476

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/00476removing a sacrificial layer

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Dual micro-electro mechanical system and manufacturing method thereof
- Patent number 11,993,512
- Issue date May 28, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yang-Che Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a microelectromechanical structure and mic...
- Patent number 11,975,964
- Issue date May 7, 2024
- ROBE IT BOSCH GMBH
- Jochen Reinmuth
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Engineered substrates, free-standing semiconductor microstructures,...
- Patent number 11,952,268
- Issue date Apr 9, 2024
- Lawrence Semiconductor Research Laboratory, Inc.
- Chantal Arena
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device, manufacturing method of the same, and integrated MEMS...
- Patent number 11,939,212
- Issue date Mar 26, 2024
- Industrial Technology Research Institute
- Heng-chung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing an integrated MEMS transducer device and i...
- Patent number 11,878,906
- Issue date Jan 23, 2024
- Sciosense B.V.
- Kailash Vijayakumar
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods of fabricating micro electro-mechanical systems structures
- Patent number 11,845,654
- Issue date Dec 19, 2023
- The University of British Columbia
- Edmond Cretu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Support structure for MEMS device with particle filter
- Patent number 11,807,521
- Issue date Nov 7, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for processing a layer structure and microelectromechanical...
- Patent number 11,787,686
- Issue date Oct 17, 2023
- Infineon Technologies AG
- Andre Brockmeier
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method of semiconductor structure
- Patent number 11,708,262
- Issue date Jul 25, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- Yi-Hsien Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing an etch stop layer and MEMS sensor compris...
- Patent number 11,572,271
- Issue date Feb 7, 2023
- ams AG
- Alessandro Faes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing an etch stop layer and MEMS sensor compris...
- Patent number 11,535,512
- Issue date Dec 27, 2022
- ams AG
- Alessandro Faes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Single crystalline diamond part production method for stand alone s...
- Patent number 11,512,409
- Issue date Nov 29, 2022
- Ecole Polytechnique Federale de Lausanne
- Niels Quack
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing hollow structure and hollow structure
- Patent number 11,505,456
- Issue date Nov 22, 2022
- Canon Kabushiki Kaisha
- Takayuki Sumida
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing an integrated MEMS transducer device and i...
- Patent number 11,492,251
- Issue date Nov 8, 2022
- Sciosense B.V.
- Kailash Vijayakumar
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing at least one three-dimensional component for t...
- Patent number 11,467,226
- Issue date Oct 11, 2022
- Leibniz-Institut für Festkörper-und Werkstoffforschung Dresden e.V.
- Daniil Karnaushenko
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a micromechanical layer structure
- Patent number 11,405,010
- Issue date Aug 2, 2022
- Robert Bosch GmbH
- Stefan Majoni
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for forming MEMS cavity structure
- Patent number 11,332,364
- Issue date May 17, 2022
- AAC Technologies Pte. Ltd.
- Wooicheang Goh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dual micro-electro mechanical system and manufacturing method thereof
- Patent number 11,274,037
- Issue date Mar 15, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yang-Che Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method of semiconductor structure
- Patent number 11,267,693
- Issue date Mar 8, 2022
- Taiwan Semiconductor Manufacturing Company Ltd.
- Yi-Hsien Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for processing a layer structure and microelectromechanical...
- Patent number 11,180,362
- Issue date Nov 23, 2021
- Infineon Technologies AG
- Andre Brockmeier
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for forming a MEMS device layer on an active device layer a...
- Patent number 11,180,366
- Issue date Nov 23, 2021
- General Electric Company
- Marco Francesco Aimi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 11,174,160
- Issue date Nov 16, 2021
- International Business Machines Corporation
- Anthony K. Stamper
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity mems and related structures, methods of manufacture a...
- Patent number 11,111,138
- Issue date Sep 7, 2021
- International Business Machines Corporation
- Anthony K. Stamper
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 11,111,139
- Issue date Sep 7, 2021
- International Business Machines Corporation
- Christopher V. Jahnes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 11,104,572
- Issue date Aug 31, 2021
- International Business Machines Corporation
- Christopher V. Jahnes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-device having a metal-semiconductor compound layer protected...
- Patent number 11,027,969
- Issue date Jun 8, 2021
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Stephanus Louwers
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 11,021,364
- Issue date Jun 1, 2021
- International Business Machines Corporation
- Russell T. Herrin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fabrication and self-aligned local functionalization of nanocups an...
- Patent number 11,002,908
- Issue date May 11, 2021
- California Institute of Technology
- Chieh-feng Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Support structure for MEMS device with particle filter
- Patent number 10,968,097
- Issue date Apr 6, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for manufacturing a microelectromechanical device having a...
- Patent number 10,961,117
- Issue date Mar 30, 2021
- STMicroelectronics S.r.l.
- Enri Duqi
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
DUAL MICRO-ELECTRO MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF
- Publication number 20240262681
- Publication date Aug 8, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yang-Che CHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ENGINEERED SUBSTRATES, FREE-STANDING SEMICONDUCTOR MICROSTRUCTURES,...
- Publication number 20240208805
- Publication date Jun 27, 2024
- Lawrence Semiconductor Research Laboratory, Inc.
- Chantal Arena
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20240158225
- Publication date May 16, 2024
- UNITED MICROELECTRONICS CORP.
- Jung-Hao Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING MEMS DEVICE AND MEMS DEVICE
- Publication number 20240051819
- Publication date Feb 15, 2024
- AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD
- Ping-He Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HYBRID RELEASE LAYER FOR MICRODEVICE CARTRIDGE
- Publication number 20230230869
- Publication date Jul 20, 2023
- VueReal Inc.
- Gholamreza CHAJI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL INFRARED SENSING DEVICE AND FABRICATION METH...
- Publication number 20230045432
- Publication date Feb 9, 2023
- Industrial Technology Research Institute
- Chin-Jou KUO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for Manufacturing an Integrated MEMS Transducer Device and I...
- Publication number 20230036935
- Publication date Feb 2, 2023
- Sciosense B.V.
- Kailash Vijayakumar
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ENGINEERED SUBSTRATES, FREE-STANDING SEMICONDUCTOR MICROSTRUCTURES,...
- Publication number 20220396476
- Publication date Dec 15, 2022
- Lawrence Semiconductor Research Laboratory, Inc.
- Chantal Arena
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF MANUFACTURING A MICROSTRUCTURE
- Publication number 20220388837
- Publication date Dec 8, 2022
- MEMSSTAR LIMITED
- Anthony O'HARA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND DEVICE FOR LOCALLY REMOVING AND/OR MODIFYING A POLYMER M...
- Publication number 20220306461
- Publication date Sep 29, 2022
- ROBERT BOSCH GmbH
- Barbara Will
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR STRUCTURE
- Publication number 20220185656
- Publication date Jun 16, 2022
- Taiwan Semiconductor Manufacturing company Ltd.
- YI-HSIEN CHANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
POLYMER-BASED MICROFABRICATED THERMAL GROUND PLANE
- Publication number 20220155025
- Publication date May 19, 2022
- KELVIN THERMAL TECHNOLOGIES, INC.
- Ryan John Lewis
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING A MICROELECTROMECHANICAL STRUCTURE AND MIC...
- Publication number 20220081286
- Publication date Mar 17, 2022
- ROBERT BOSCH GmbH
- Jochen Reinmuth
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS OF FABRICATING MICRO ELECTRO-MECHANICAL SYSTEMS STRUCTURES
- Publication number 20210395081
- Publication date Dec 23, 2021
- The University of British Columbia
- Edmond Cretu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for Manufacturing an Integrated MEMS Transducer Device and I...
- Publication number 20210387854
- Publication date Dec 16, 2021
- Sciosense B.V.
- Kailash Vijayakumar
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE, MANUFACTURING METHOD OF THE SAME, AND INTEGRATED MEMS...
- Publication number 20210380404
- Publication date Dec 9, 2021
- Industrial Technology Research Institute
- Heng-chung CHANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for Processing a Layer Structure and Microelectromechanical...
- Publication number 20210363002
- Publication date Nov 25, 2021
- INFINEON TECHNOLOGIES AG
- Andre Brockmeier
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SUPPORT STRUCTURE FOR MEMS DEVICE WITH PARTICLE FILTER
- Publication number 20210238030
- Publication date Aug 5, 2021
- Taiwan Semiconductor Manufacturing Co., LTD
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING A MICROMECHANICAL LAYER STRUCTURE
- Publication number 20210167745
- Publication date Jun 3, 2021
- ROBERT BOSCH GmbH
- Stefan Majoni
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) VARIABLE CAPACITOR APPARATUS...
- Publication number 20210134532
- Publication date May 6, 2021
- wiSpry, Inc.
- Arthur S. Morris
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for Processing a Layer Structure and Microelectromechanical...
- Publication number 20200277183
- Publication date Sep 3, 2020
- INFINEON TECHNOLOGIES AG
- Andre Brockmeier
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and System for Fabricating a Microelectromechanical System D...
- Publication number 20200071161
- Publication date Mar 5, 2020
- Paul D. Swanson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20200024127
- Publication date Jan 23, 2020
- International Business Machines Corporation
- Christopher V. JAHNES
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING AT LEAST ONE THREE-DIMENSIONAL COMPONENT FOR T...
- Publication number 20200025839
- Publication date Jan 23, 2020
- Leibniz-Institut fuer Festkoerper-und Werkstoffforschung Dresden E.V.
- Daniil KARNAUSHENKO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20200017355
- Publication date Jan 16, 2020
- International Business Machines Corporation
- Anthony K. Stamper
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20200017356
- Publication date Jan 16, 2020
- International Business Machines Corporation
- Christopher V. JAHNES
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
POLYMER-BASED MICROFABRICATED THERMAL GROUND PLANE
- Publication number 20190390919
- Publication date Dec 26, 2019
- KELVIN THERMAL TECHNOLOGIES, INC.
- Ryan John Lewis
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR MANUFACTURING A MICROELECTROMECHANICAL DEVICE HAVING A...
- Publication number 20190375629
- Publication date Dec 12, 2019
- STMicroelectronics S.r.l.
- Enri DUQI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) VARIABLE CAPACITOR APPARATUS...
- Publication number 20190362899
- Publication date Nov 28, 2019
- wiSpry, Inc.
- Arthur S. Morris
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20190315619
- Publication date Oct 17, 2019
- International Business Machines Corporation
- Russell T. HERRIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY

removing a sacrificial layer

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Dual micro-electro mechanical system and manufacturing method thereof

Method for manufacturing a microelectromechanical structure and mic...

Engineered substrates, free-standing semiconductor microstructures,...

MEMS device, manufacturing method of the same, and integrated MEMS...

Method for manufacturing an integrated MEMS transducer device and i...

Methods of fabricating micro electro-mechanical systems structures

Support structure for MEMS device with particle filter

Method for processing a layer structure and microelectromechanical...

Manufacturing method of semiconductor structure

Method for manufacturing an etch stop layer and MEMS sensor compris...

Method for manufacturing an etch stop layer and MEMS sensor compris...

Single crystalline diamond part production method for stand alone s...

Method for producing hollow structure and hollow structure

Method for manufacturing an integrated MEMS transducer device and i...

Method for producing at least one three-dimensional component for t...

Method for manufacturing a micromechanical layer structure

Method for forming MEMS cavity structure

Dual micro-electro mechanical system and manufacturing method thereof

Manufacturing method of semiconductor structure

Method for processing a layer structure and microelectromechanical...

Methods for forming a MEMS device layer on an active device layer a...

Planar cavity MEMS and related structures, methods of manufacture a...

Planar cavity mems and related structures, methods of manufacture a...

Planar cavity MEMS and related structures, methods of manufacture a...

Planar cavity MEMS and related structures, methods of manufacture a...

Micro-device having a metal-semiconductor compound layer protected...

Planar cavity MEMS and related structures, methods of manufacture a...

Fabrication and self-aligned local functionalization of nanocups an...

Support structure for MEMS device with particle filter

Process for manufacturing a microelectromechanical device having a...

Patents Applicationslast 30 patents

DUAL MICRO-ELECTRO MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF

ENGINEERED SUBSTRATES, FREE-STANDING SEMICONDUCTOR MICROSTRUCTURES,...

MEMS DEVICE AND METHOD FOR MANUFACTURING THE SAME

METHOD FOR MANUFACTURING MEMS DEVICE AND MEMS DEVICE

HYBRID RELEASE LAYER FOR MICRODEVICE CARTRIDGE

MICROELECTROMECHANICAL INFRARED SENSING DEVICE AND FABRICATION METH...

Method for Manufacturing an Integrated MEMS Transducer Device and I...

ENGINEERED SUBSTRATES, FREE-STANDING SEMICONDUCTOR MICROSTRUCTURES,...

METHOD OF MANUFACTURING A MICROSTRUCTURE

METHOD AND DEVICE FOR LOCALLY REMOVING AND/OR MODIFYING A POLYMER M...

MANUFACTURING METHOD OF SEMICONDUCTOR STRUCTURE

POLYMER-BASED MICROFABRICATED THERMAL GROUND PLANE

METHOD FOR MANUFACTURING A MICROELECTROMECHANICAL STRUCTURE AND MIC...

METHODS OF FABRICATING MICRO ELECTRO-MECHANICAL SYSTEMS STRUCTURES

Method for Manufacturing an Integrated MEMS Transducer Device and I...

MEMS DEVICE, MANUFACTURING METHOD OF THE SAME, AND INTEGRATED MEMS...

Method for Processing a Layer Structure and Microelectromechanical...

SUPPORT STRUCTURE FOR MEMS DEVICE WITH PARTICLE FILTER

METHOD FOR MANUFACTURING A MICROMECHANICAL LAYER STRUCTURE

MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) VARIABLE CAPACITOR APPARATUS...

Method for Processing a Layer Structure and Microelectromechanical...

Method and System for Fabricating a Microelectromechanical System D...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

METHOD FOR PRODUCING AT LEAST ONE THREE-DIMENSIONAL COMPONENT FOR T...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

POLYMER-BASED MICROFABRICATED THERMAL GROUND PLANE

PROCESS FOR MANUFACTURING A MICROELECTROMECHANICAL DEVICE HAVING A...

MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) VARIABLE CAPACITOR APPARATUS...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...