Number | Name | Date | Kind |
---|---|---|---|
3777364 | Schinella et al. | Dec 1975 | |
3795557 | Jacob | Mar 1974 | |
3871067 | Bogardus | Mar 1975 | |
3881971 | Greer et al. | May 1975 | |
3918149 | Roberts | Nov 1975 | |
3942243 | Murray | Mar 1976 | |
3971684 | Muto | Jul 1976 |
Entry |
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Tsang, "Forming Thick Metal Silicide for Contact Barrier," IBM Technical Disclosure Bulletin, vol. 19, No. 9, (Feb. 1977), pp. 3383-3385. |