Number | Name | Date | Kind |
---|---|---|---|
2937085 | Seven et al. | May 1960 | |
3085008 | Case | Apr 1963 | |
3317320 | Reber | May 1967 | |
3380825 | Webers | Apr 1968 | |
3482977 | Baker | Dec 1969 | |
3486900 | Tsunoda et al. | Dec 1969 | |
3518084 | Barson et al. | Jun 1970 | |
3549368 | Collins et al. | Dec 1970 | |
3567453 | Borden | Mar 1971 | |
3591378 | Altman | Jul 1971 | |
3634082 | Christensen | Jan 1972 | |
3716390 | Garbarini | Feb 1973 | |
3827908 | Johnson, Jr. et al. | Aug 1974 | |
3873313 | Horst et al. | Mar 1975 | |
3955981 | Stachniak | May 1976 | |
3982943 | Feng et al. | Oct 1976 | |
4009033 | Bakos et al. | Feb 1977 | |
4036644 | Kaplan et al. | Jul 1977 | |
4088490 | Duke et al. | May 1978 | |
4212935 | Canavello et al. | Jul 1980 | |
4237216 | Skarvinko | Dec 1980 | |
4256829 | Daniel | Mar 1981 | |
4296194 | Harper et al. | Oct 1981 | |
4352870 | Howard et al. | Oct 1982 |
Entry |
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IBM TDB, vol. 15, No. 1, Jun. 1972, p. 46, "Resist Process", Horst et al. |
Basseous et al., IBM Technical Disclosure Bulletin, vol. 23, No. 7B, pp. 3387-3390, 12/1980. |
King, M. C., IEEE Trans. on Electron Devices, Ed. 26, No. 4, 4/1979, pp. 711-716. |
Griffin, B. F., J. Vac. Sci. Tech., 19(4), 11/1981, pp. 1423-1428. |