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6528228 | Hauck et al. | Mar 2003 | B2 |
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---|---|---|
626 273 | Nov 1994 | EP |
0864420 | Sep 1998 | EP |
0908305 | Apr 1999 | EP |
0908307 | Apr 1999 | EP |
0908779 | Apr 1999 | EP |
0908784 | Apr 1999 | EP |
0914941 | May 1999 | EP |
0919868 | Jun 1999 | EP |
0960728 | Dec 1999 | EP |
WO9620429 | Jul 1996 | WO |
WO 0146318 | Jun 2001 | WO |
Entry |
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Reiser, Photoreactive Polymers, The Science and Technology of Resists, Wiley-Interscience, New York, 1989, pp. 161-167. |