Number | Date | Country | Kind |
---|---|---|---|
44 38 791 | Oct 1994 | DE | |
44 38 777 | Oct 1994 | DE | |
195 38 531 | Oct 1995 | DE |
Filing Document | Filing Date | Country | Kind | 102e Date | 371c Date |
---|---|---|---|---|---|
PCT/DE95/01501 | WO | 00 | 4/2/1997 | 4/2/1997 |
Publishing Document | Publishing Date | Country | Kind |
---|---|---|---|
WO96/12051 | 4/25/1996 | WO | A |
Number | Name | Date | Kind |
---|---|---|---|
4717587 | Suhr et al. | Jan 1988 | |
4965090 | Gartner et al. | Oct 1990 | |
5019415 | Oehr et al. | May 1991 | |
5561082 | Matsuo et al. | Oct 1996 |
Number | Date | Country |
---|---|---|
681758A5 | May 1993 | CH |
3510982 | Mar 1985 | DE |
3828211 | Mar 1985 | DE |
3716235 | Nov 1988 | DE |
3744062 | Jul 1989 | DE |
3806587 | Sep 1989 | DE |
4316679 | Jul 1994 | DE |
0321734 | Jun 1989 | EP |
0329845 | Aug 1989 | EP |
9326143 | Dec 1993 | WO |
Entry |
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Suhr et al., Thin Palladium Films Prepared by Metal-Organic Plasma-Enhanced Chemical Vapour Deposition, Thin Solid Films, vol. 157, pp81-86, 1988.* |
Einfuhrung in die Leiterplattentechnologie, pp. 95-97. |
Thin Palladium Films Prepared by Metal-Organic Plasma-Enhanced Chemical Vapour Deposition, E. Feurer and H. Suhr, Dept. of Organic Chemistry, University of Tubingen, Thin Solid Films, 157 (1988) pp. 81-86, Preparation and Characterization. |