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4239842 | Sandhu | Dec 1980 | |
4565756 | Needs et al. | Jan 1986 | |
4721999 | Takemura et al. | Jan 1988 | |
4808501 | Chiulli | Feb 1989 | |
4808511 | Holmes | Feb 1989 | |
4999280 | Hiraoka | Mar 1991 | |
5059500 | Needham et al. | Oct 1991 |
Number | Date | Country |
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5-019115 | Jan 1993 | JPX |
7-331102 | Dec 1995 | JPX |
Entry |
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Hiraoka et al., J. Vac. Sci. Technol. B, 7(6), 1760 (1989). |
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