Number | Date | Country | Kind |
---|---|---|---|
63-326467 | Dec 1988 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4140558 | Murphy et al. | Feb 1979 | |
4466180 | Sollof | Aug 1984 | |
4569701 | Oh | Feb 1986 | |
4711017 | Lammert | Dec 1987 |
Number | Date | Country |
---|---|---|
0112489 | Jul 1984 | EPX |
0134443 | Aug 1983 | JPX |
0166541 | Jul 1987 | JPX |
0124547 | May 1988 | JPX |
63-1045 | Jun 1988 | JPX |
7900684 | Sep 1979 | WOX |
Entry |
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"A Variable-Size Shallow Trench Isolation (STI) Technology with Diffused Sidewall Doping for Submicron CMOS", CH 2528-8/88, 92-95 IDEM 88, IEEE (1988). |
"New Effects of Trench Isolated Transistor using Side-Wall Gates", CH 2515-5/87, 736-739-IDEM 87, IEEE (May 1987). |