Number | Name | Date | Kind |
---|---|---|---|
3907660 | Gillery | Sep 1975 | |
4113599 | Gillery | Sep 1978 | |
4300989 | Chang | Nov 1981 | |
4629635 | Brors | Dec 1986 | |
4637853 | Bumble et al. | Jan 1987 | |
4664938 | Walker | May 1987 | |
4692344 | Kaganowicz et al. | Sep 1987 | |
4736087 | Whitlock et al. | Apr 1988 | |
4738748 | Kisa | Apr 1988 | |
4960488 | Law et al. | Oct 1990 | |
4962049 | Chang et al. | Oct 1990 |
Number | Date | Country |
---|---|---|
0070278 | Apr 1982 | JPX |
0018639 | Jan 1984 | JPX |
0220929 | Nov 1985 | JPX |
0114210 | May 1988 | JPX |
0118081 | May 1988 | JPX |
Entry |
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Coburn, J., Plasma-Assisted Etching, Plasma Chemistry and Plasma Processing, vol. 2, No. 1, 1982, pp. 1-7. |