Number | Name | Date | Kind |
---|---|---|---|
3269861 | Schneble | Aug 1966 | |
3457638 | Johnson | Jul 1969 | |
3855692 | Dugan | Dec 1974 | |
4608275 | Kukanskis et al. | Aug 1986 | |
4756795 | Bakos et al. | Jul 1988 | |
4863758 | Rhodenizer et al. | Sep 1989 | |
4876177 | Akahoshi et al. | Oct 1989 | |
4897118 | Ferrier et al. | Jan 1990 | |
4931148 | Kukanskis et al. | Jun 1990 | |
4976990 | Bach et al. | Dec 1990 | |
5032427 | Kukanskis et al. | Jul 1991 | |
5153987 | Takahashi et al. | Oct 1992 | |
5160579 | Larson | Nov 1992 | |
5235139 | Bengston et al. | Aug 1993 | |
5362334 | Adams et al. | Nov 1994 |
Number | Date | Country |
---|---|---|
1207631 | Oct 1970 | GBX |
1259304 | Jan 1972 | GBX |
9326145 | Dec 1993 | WOX |
Entry |
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Anthony "Forming Electrical Interconnections Through Semiconductor Wafers" GE R&D Center New York, Aug. 1981 pp. 5340-5349 J. Appl. Physics. |