Claims
- 1. The process of developing an image-wise exposed photoresist-coated substrate comprising:
- (1) coating said substrate with a radiation-sensitive composition useful as a photoresist, said composition comprising an admixture in a solvent of:
- (a) at least one alkali-soluble binder resin;
- (b) at least one photoactive o-quinonediazide compound; and
- (c) an effective absorbence-increasing amount of an actinic dye having the formula (I): ##STR5## the amount of said binder resin being about 60 to 95% by weight, the amount of said photoactive component being about 5% to about 40% by weight, based on the total solids content of said radiation-sensitive composition;
- (2) subjecting said coating on said substrate to an image-wise exposure of radiant light energy at a wavelength of 365.+-.10 nonometers; and
- (3) subjecting said image-wise exposed coated substrate to a developing solution to form an image-wise pattern in the coating.
- 2. The process of claim 1 wherein said alkali-soluble binder resin is a novolak resin.
- 3. The process of claim 1 wherein said photoactive o-quinonediazide compound or compounds are present in the amount of about 10% to about 25% by weight, said binder resin is present in the amount of about 75% to about 90% by weight, and said due is present in the amount of 0.2% to about 4% by weight, all based on the total solids content of said radiation-sensitive composition.
- 4. The process of claim 3 wherein said dye is present in the amount of from about 0.4% to about 2% by weight, based on the total solids content of said radiation-sensitive composition.
- 5. The process of claim 1 wherein said radiation-sensitive composition further comprises solvents, other actinic dyes, visual contrast dyes, plasticizers, anti-striation agents, and speed enhancers.
Parent Case Info
This application is a division of application Ser. No. 07/891,011 filed Jun. 1, 1992, now allowed.
US Referenced Citations (4)
Number |
Name |
Date |
Kind |
3525618 |
Keller et al. |
Aug 1970 |
|
3558316 |
Keberle et al. |
Jan 1971 |
|
3615551 |
Farnley |
Oct 1971 |
|
5001040 |
Blakeney et al. |
Mar 1991 |
|
Non-Patent Literature Citations (1)
Entry |
Miles Product Information Sheet on Blankophor FBW, T.D.S. No. 1592/2 dated Mar., 1990. |
Divisions (1)
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Number |
Date |
Country |
Parent |
891011 |
Jun 1992 |
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