Number | Name | Date | Kind |
---|---|---|---|
4608589 | Goth et al. | Aug 1986 | |
4686763 | Thomas et al. | Aug 1987 | |
4735916 | Homma et al. | Apr 1988 | |
4745087 | Iranmanesh | May 1988 | |
4800171 | Iranmanesh et al. | Jan 1989 | |
4808548 | Thomas et al. | Feb 1989 | |
4824796 | Chiu et al. | Apr 1989 |
Entry |
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"A Self-Aligning Polysilicon Electrode Technology (SPEL) for Future LSIS", by Y. Misawa et al. (Hitachi Research Laboratory) IEEE 1987, pp. IEDM 87-33 through IEDM 87-35. |