Number | Date | Country | Kind |
---|---|---|---|
8423265 | Sep 1984 | GBX |
This is a division of application Ser. No. 775,529, filed 9/13/85, now abandoned.
Number | Name | Date | Kind |
---|---|---|---|
4468308 | Scovell et al. | Aug 1984 | |
4528744 | Shibata | Jul 1985 | |
4545116 | Law | Oct 1985 | |
4567058 | Koh | Jan 1986 | |
4599196 | Anderson | May 1986 | |
4622735 | Shibata | Nov 1986 |
Number | Date | Country |
---|---|---|
A1-0127281 | May 1984 | EPX |
Entry |
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C. Y. Ting and M. Wittmer, Thin Solid Films, 96 (1982), pp. 327-345. |
M. A. Nicollet, Thin Solid Films, 52 (1978), pp. 415-445. |
C. Y. Ting, J. Vac. Sci. Technol., 21 (1), May/Jun. 1982, pp. 14-18. |
P. J. Rossez, G. J. Tomkins, "Self Aligned Nitridation of TiSi.sub.2 : a TiN/TiSi.sub.2 Contact Structure", Materials Res. Soc. Symp. Proc., vol. 37 (Gibson et al. ed.), pp. 607-612, 1985, Mat. Res. Soc. |
Number | Date | Country | |
---|---|---|---|
Parent | 775529 | Sep 1985 |