Other characteristics and advantages of the invention will become clear in the following description provided in reference to the appended drawings, provided by way of illustration but in no way restrictively, in which:
It is first of all pointed out that, in the figures, the same references designate the same members, regardless of the figure in which they appear and regardless of the form in which these members are represented. Similarly, if the members are not specifically referenced on one of the figures, their references may be easily found by referring to another figure.
It is also pointed out that the figures show several embodiments of the object according to the invention, but there may be other embodiments which satisfy the definition of this invention.
Among others it is pointed out that, when, according to the definition of the invention, the object of the invention comprises “at least one” member with a given function, the embodiment described may comprise several of these members. In return, if the embodiment of the object according to the invention as shown comprises several members with identical functions and if, in the description, it is not stated that the object according to this invention must necessarily comprise a particular number of these members, the object of the invention may be defined as comprising “at least one” of these members.
Finally, it is pointed out that when, in this description, an expression alone defines, without any specific mentions concerning it, a set of structural characteristics, these characteristics may be taken, for the definition of the object of the requested protection, when this is technically possible, either separately, or in total or partial combination.
This invention relates to a product Pr designed to be used in the semiconductor, MEM, flat screen and/or solar cell industries as mentioned in the introduction of this description. This invention relates more particularly to a product that is designed to be gripped by a handling system Bm of which a preferential embodiment will be provided below.
In reference to
The product Pr comprises, among others, a plateau 4 defined by at least one plateau face 5 opposite the first or second face of the plate 1, which is to say the second face 3 on
Among others, it is noted that the controllable liaison means 18 shown in
It should be noted that the face of the plate 1 opposite the plateau 4 will preferably not be in contact with the face 5 of the plateau. In the case of the attachment means by clamp or the like, the clamping means 15 will preferably be in contact with the peripheral part of the plate 1, and only these means. In the case of the means for attaching the plate 1 to the plateau 4 by adhesion, only an adhesive material, for example, an adhesive polymer, is designed to be in contact with the plate 1. This adhesive material may be spread over several contact pins, for example, three pins.
As concerns the first gripping means 11 defined above, it is advantageously composed by at least one of the following means: a support surface that is advantageously flat 19,
Furthermore, in the aim of perfectly pressing the plateau 4 onto part of the handling system Bm as previously mentioned and as will be explained below, the plateau 4 comprises among others means 30 of exerting on it a traction force.
It is understood that these traction means 30 may be made in different ways. However, it will be preferably chosen from the means that is capable of creating one of the following forces: magnetic force (for example: a permanent magnet positioned opposite another magnet with inverted polarity or opposite a magnetic material, an embodiment according to
Among others, the first centering means 40 may be provided to apply the centering forces onto the plateau 4 so that it is possible to centre the plateau and/or so that it centers itself automatically with respect to a part of the handling arm Bm, as for example, in the case of the embodiments according to
As shown diagrammatically in
Among others, the annular magnet 42 is fitted so that it may be plunged (or placed), for example, in an additional recess 46,
In the aim of being able to adapt the position of the plateau 4 with respect to the part of the handling system on which it has to rest during the handling, for example, to transport and position it so that the silicon plate is correctly orientated, the plateau 4 advantageously comprises a central thrust portion 50 connected, either directly or indirectly, to the face 45 of the plateau opposite its face 5 opposite the plate 1. On this central thrust portion 50, it is possible to apply a translation force Fp to move the plateau 4 and its associated plate in a translation direction, in one direction or the other, more or less perpendicularly to the face 5 opposite the plate 1, and a rotation moment Fr to pivot the plateau 4, and thus simultaneously the plate 1, more or less around the translation direction, very advantageously when the plateau is no longer in contact with the deck.
This central thrust portion 50 may have different forms. It may be composed of the central part itself of the face 45 defined above, as in the embodiments according to
In fact, it should be remembered that it is known that the plate 1 comprises an identifier to orientate it angularly with respect to a reference connected to the deck or robot bearing it.
To orientate the plate connected to 4, which is to say in fact the product, it is preferable that the product not be pressed on the second gripping means 12 of the handling system Bm. To this end, the product must be moved away from the second gripping means 12 by exerting the force Fp on the product, then pivoting it by exerting on it the moment Fr until the identifier connected to the plate is in the correct position. The product is then brought towards the handling system so that its first gripping means 11 cooperates with the second gripping means 12.
It may be conceived that there are different possible embodiments of a handling system to grip, transport and orientate the product designed to be used in the semiconductor, MEM, flat screen and/or solar cell industries, according to the invention as described above.
However, another purpose of this invention is to create a handling system Bm specially structured to cooperate with the product Pr defined above.
One embodiment of the handling system according to the invention is shown in
This handling system Bm of the product Pr comprises a deck 60, second gripping means 12 in addition to the first gripping means 11 defined above, wherein the second gripping means 12 is made in the deck 60, and known means 61 of moving the deck 60 according to a desired trajectory (not entirely shown). These means 61 for moving the deck 60 is only shown very diagrammatically in
The deck 60 is composed of a pallet that may have different forms.
To permit the product to be handled according to the embodiment shown in
To permit the product to be handled according to the embodiments shown in
The space defined between the two arms of the pallet when it is U shaped, or the central orifice when it is crown shaped, forms a central orifice 63 designed, as will be explained below, to provide free access to the central thrust portion 50 of the plateau.
This central orifice 63 is created so that, when the first gripping means 11 cooperates with the second additional gripping means 12, the plateau 4 is more or less centered on it and therefore the central thrust portion 50 is aligned with this central orifice 63.
Advantageously, in order to be able to apply the force Fp and the moment Fr automatically onto the central thrust portion 50 of the product Pr, the handling system comprises an aligning device 65 which is a device that is well known to those skilled in the art and which will not be detailed further here. However, there is a simple diagrammatical reminder that an example of this type of device comprises a body 66 and, mounted in cooperation with this body 66, a rotary control rod 68 for the moment of rotation Fr defined above, the body 66 comprising means of controlling the rod 68 in rotation, the latter forming a protrusion extending or in relief of the body 66, wherein the control rod 68 is able to extend beyond the body 66, to permit translation of the plateau 4 and the associated plate, in a translation direction more or less perpendicular to the face 5 opposite the plate 1, as explained below, and to pivot around this same translation direction.
To this end, the body 66 of the aligning device can be on board the means 61 of moving the deck 60 in a desired trajectory, as explained below, in cooperation with the deck 60 so that the axis of rotation of the control rod 68 is able to pass more or less via the centre of the central orifice 63 and is more or less perpendicular to the plane of this central orifice 63.
Preferably, the end 69 of the rod 68 which extends beyond the body 66 comprises means 70 to connect it in rotation with the plateau 4 when the latter comes into contact with the central thrust portion 50 and to orientate the product as described above. As shown in
The handling system with aligning device operates as follows, described by way of example. In order to raise and align the product Pr associated to the deck 60, the latter is brought above the end 69 of the rod 68 extending beyond the body 66 of the aligning device. To do so, a relative movement between the aligning device 65 and the deck 60 is possible. To this end, the means so that the axis of rotation of the control rod 68 may pass more or less via the centre of the central orifice 63 and be more or less perpendicular to the plane of the central orifice 63, may be composed by means 61 for moving the deck 60 described above.
Once the central thrust portion 50 of the product Pr has been positioned above the end 69 of the rod 68 and aligned with it, the deck 60 carrying the product Pr is brought into contact with the central thrust portion 50 and the end 69 so as to create a rotary connection between these two members, by all known means, for example, an adhesive connection, induced by a magnetic force or a gravitational force, or any other connection in particular controlled by an actuator. The deck 60 then continues its relative movement with respect to the aligning device so as to move the product Pr away from the deck. The end of the rod 68 is immobile with respect to the deck in movement and exerts the translation force Fp described above, this being made possible by the end 69 of the rod 68 extending beyond the aligning device which will be such that the deck 60 can be separated from the plateau. To permit separation of the plateau and the deck, the means 30 of exerting a traction force on the plateau 4 so that it can be pressed against at least one part of the handling system, will of course be deactivated.
It should be noted that, in the embodiment according to
It should be noted that as an alternative to the configuration described above with the aid of
A handling system Bm equipped with a plateau 4 in compliance with the invention described above, may be brought to grip, with the same plateau 4, several different types of plates, for example, semiconductors, stored in different containers, these different plates having coatings or levels of cleanliness that are incompatible with one another. In order to avoid one of the coatings contaminating the plateau then the contaminated plateau in turn contaminating another plate, it may be possible to change the plateau to suit the type of plate to be handled. In this case, it is possible to use a clean plateau, which is to say decontaminated and cleaned for each plate transfer. As shown in
The plateau 4 on the deck may be replaced by another plateau of another type if the handling mode of the plate has to be changed. For example, plateaus may be envisaged to handle the plates by gripping them by their rear face or plateaus that touch and grip the plates by their edge, all these different plateaus comprising the same first gripping means 11 so as to associate to a same deck 60 equipped with second gripping means 12 in addition to the first gripping means 11.
It is also possible to adapt the plateaus to handle plates of different thicknesses in particular ultra-thin plates that are particularly flexible. To handle thick plates, which is to say whose thickness is greater than approximately 0.5 mm, three support points under the plate may be sufficient, wherein these points are advantageously spread out homogeneously on the edge of the plateau. For thinner plates, and therefore more flexible, it may be necessary to increase the number of support points and in particular to add one or several support points on the rear face of the plate close to the centre of the plateau. This increase in the number of support points permits the flexing of the ultra thin plates to be minimized.
Given that a cleaning module is accessible to the movement means 61 of the deck 60, the plateaus 4 not used could be advantageously cleaned while another plateau is used to transfer plates. The machine for processing the plates equipped with means 61 for moving the deck 60 may thus continue to operate during the cleaning phases, thus increasing the rate of availability. Automation of the cleaning of the plateaus may be envisaged in the plateaus magazine. This cleaning may be carried out by clean air blast or suction, vibrations, ultra sound, chemical dip, gas vaporization and/or by cryogenic cleaning, as well as any other known cleaning process or combination of these means.
For the traceability of the plateaus, it may be advantageous to provide identification means (not shown) for each plateau. The identification means will make it possible to determine when and where the plateau has been used, if it requires maintenance, if it is adapted to the type of handling desired, etc. This identification means may, for example, take on the form of an alpha-numerical code, a bar code, or a 2D or data-matrix type code, or a combination of these codes. These codes may be etched or written on one of the faces of the plateau 4, preferably on the lower face that is not located opposite plate 1. In order to identify advantageously the identification code automatically, the presence of a means of indexing the plateau is required, whose position with respect to that of the identification code is predetermined, so as to permit angular orientation of the plateau in rotation so that the identification means is situated in the reading position. The indexing means may be, for example, created by a mark, a slot on the plateau 4, or a magnet integrated into the plateau that actuates a Hall effect sensor.
The terms and expressions which have been employed herein are used as terms of description and not of limitation, and there is no intention in the use of such terms and expressions of excluding equivalents of the features shown and described, or portions thereof, it being recognized that various modifications are possible within the scope of the invention claimed. Moreover, any one or more features of any embodiment of the invention may be combined with any one or more other features of any other embodiment of the invention, without departing from the scope of the invention.
All references, patent applications, and patents mentioned above are herein incorporated by reference in their entirety for all purposes. None of them are admitted to be prior art to the presently claimed inventions.
One or more features from any embodiment may be combined with one or more features of any other embodiment without departing from the scope of the invention.
A recitation of “a”, “an” or “the” is intended to mean “one or more” unless specifically indicated to the contrary.