The present invention has utility as a process for the deposition of oxide and/or nitride films simultaneously on multiple semiconductor wafer substrates. In situ radical formation in a uniform manner throughout a reaction volume allows for batch CVD deposition. The present invention in addition to achieving film deposition in a batch process, also affords several process condition advantages over the prior art illustratively including properties such as conformality, wafer deposition temperature, successive disparate layer deposition, and reagent handling.
In order to overcome prior difficulties associated with uniform precursor distribution within a batch chamber, a chamber is utilized inclusive of a liner having a series of exhaust ports and surrounding elongated reactant injector tubes, each rotatable about a tube axis with the tubes including orifices in registry with wafer carrier positions. The result of reactant flow from tubes flowing towards liner exhaust ports creates a flow across the multiple wafer surfaces in a laminar flow pattern. Such a reactor is disclosed in WO 2005/031233 filed Sep. 22, 2004. Such a reactor is currently commercially available from Aviza Technology (Scotts Valley, Calif.) under the trade names RVP 550 and Verano 5500. Referring now to
A vessel 11 that encloses a volume V to form a process chamber 12 having a support 14 adapted for receiving a batch wafer carrier 16 having a number of heating elements, 20, 20′, 20″ (referred to collectively hereinafter as heating elements 112) for raising a temperature of a wafer batch on the carrier 16 to the desired temperature for thermal processing. The reactor 10 optionally includes one or more optical or electrical temperature sensing elements, such as a thermocouple (T/C), for monitoring the temperature within the process chamber 12 and controlling operation of the heating elements 20-20″. Thermal uniformity is thereby achieved alone the vertical extent of the carrier 16 when disposed within the process chamber 12. The reactor 10 includes two or more injectors 22, 22′, and 22″ for in situ introducing a precursor in the form of a gas or vapor into the process chamber 12 for the deposition of an oxide or nitride film simultaneously on the multiple wafers through a radical generated CVD process. It is appreciated that purge gases are also optionally supplied to the process chamber 12 via any or all of the injectors 22-22″. A purge vent 24 is provided for exhausting the process chamber 12. A liner 26 includes slots 28 preferably in registry with wafer surfaces within a carrier 16 and orifices 30-30″ of injectors 22-22″ as denoted by the fluid flow arrows.
Generally, the vessel 11 has a seal, such as an O-ring 32, to a base-plate 34.
Openings for the injectors 22-22′ are shown at 36, T/Cs and vents are sealed with O-rings, VCR®, or CF® fittings. Fluids released or deposition byproducts created during processing are evacuated through a foreline or exhaust port 42 formed in a wall of the process chamber 12 or in a plenum of the support 14. The process chamber 12 is operated at a pressure between 0.1 millitor and atmospheric at a variety of temperatures ranging from 100° C. to 900° C. The reactor 10 is equipped with a pumping system illustratively including a roughing pump; a blower; a hi-vacuum pump; and roughing-, throttle-, and foreline-valves.
The vessel 11 and liner 26 are made of a variety of materials illustratively including metal, ceramic, crystalline or amorphous material that is capable of withstanding the thermal and mechanical stresses of high-temperature and high-vacuum operation, and which is resistant to erosion from gases and vapors used or released during processing. Preferably, the vessel 11 and liner 26 are made from an opaque, translucent, or transparent quartz glass having a sufficient thickness to withstand the mechanical stresses of the thermal processing operation and resist deposition of process byproducts.
Wafers in the carrier 16 are introduced into the reactor 10 through a load lock or loadport (not shown) and then into the process chamber 12 through an opening in the base-plate 34 capable of forming a gas-tight seal therewith. In the configuration shown in
The reactor 10 optionally also includes a wafer rotation system 42 that rotates the support 14 and the carrier 16 during processing. Rotating the carrier 16 during processing improves within wafer uniformity by averaging out any non-uniformities in temperature and process gas flow to create a uniform wafer temperature and species reaction profile. Generally, the wafer rotation system 42 is capable of rotating at a speed of from about 0.1 to about 10 revolutions per minute (RPM).
As depicted in
An exemplary gas flow schematic for a three injector reactor is depicted in
Inventive embodiments inclusive of only two injectors 22 and 22′, gas feed interconnection is provided for the cationic ion deposition source 56 and one of: the stable counter ion source 50 or the in situ radical source 54. Inert gas is supplied simultaneously and or separately from a reactant.
An inventive process for film deposition assisted by in situ radical formation simultaneously on multiple wafer substrates includes loading multiple wafers within a reactor and purging the reactor with an inert fluid and evacuating the reactor. It is appreciated that the reactor is either maintained at deposition temperature prior to a wafer stack loaded and a wafer carrier being loaded therein, or alternatively, the reactor is brought to deposition temperature subsequent to evacuation.
Thereafter, the chamber pressure is stabilized at the desired value with an inert fluid and a stable species source of oxide ions or nitride ions is introduced.
A stable species source as used herein as defined to include a molecule thermodynamically dominant equilibrium to related species at a deposition temperature.
Representative stable oxide species sources include molecular oxygen, carbon monoxide, nitrous oxide, nitric oxide and water. Stable nitride species sources operative herein illustratively include molecular nitrogen, ammonia, and N2H4. With the stable species source flowing within the batch reactor, an in situ radical generating reactant is introduced into the reactor. It is appreciated that the stable species source and the in situ radical generating reactant are introduced sequentially in either order, or simultaneously within the reactor volume. Representative in situ radical generating reactants operative herein illustratively include molecular hydrogen, oxygen, ammonia, and combinations thereof. It is noted that the in situ radical generating reactant is itself a thermodynamically stable form at deposition temperature yet reacts with the stable species source at deposition temperatures to form in situ radicals that facilitate film deposition.
It is appreciated that the addition of two or more in situ radical generating reactants is noted to impact the deposition rate and quality of the resultant film based on parameters including order of introduction, stoichiometry of radical generating reactants, stoichiometry of plural radical generating reactants relative to stable species source for a given constant reactor pressure and deposition temperature. By way of example, and without intending to be limited to a particular theory, the deposition rate of silicon nitride from SiH4 as a cationic deposition ion source reacted with a stable species source of ammonia and an in situ radical generating reactant of hydrogen is improved by the inclusion of O2 Particular improvement in film deposition occurs at relative molar ratios of 0.1-10:1 H2:O2. Still further improvement is noted when dinitrogen oxide is introduced into the reactor in concert with hydrogen. Silicon nitride deposition is noted to proceed at <450° C. and a total reactor pressure of from 50 mT to 10 T according to the present invention with these conditions being desirable as compared to plasma assisted or conventional CVD processes as well as the fact that such deposition occurs simultaneously on multiple wafer substrates in a batch reactor.
Stable oxide or nitride ion source, and an in situ radical generating source are allowed while within the reactor and in contact with the multiple wafer surfaces for a time typically ranging from 0 to 2000 seconds prior to introduction of a cationic deposition source. It is appreciated that a single injector can be used for the simultaneous or sequential delivery of multiple reactants or inert gases. Preferably, to assure only in situ radical generation within the reactor, as opposed to within an injector, the stable oxide or nitride ion source is not delivered from the same injector as an in situ radical generating species.
Cationic ion deposition sources operative within the present invention are virtually unlimited and dependent only upon the nature of the cationic ion being incorporated within a film, wafer deposition temperature, and deposition byproduct volatility. Oxides and nitrides are formed from a variety of cationic ions illustratively including silicon, tantalum, aluminum, titanium, niobium, zirconium, hafnium, zinc, manganese, tin, indium, tungsten, and gallium. Specific cationic ion deposition sources operative herein include TEOS, trisilylamine (TSA), hexamethyldislane; trimethyl gallium; tantalum pentachloride; trimethyl aluminum, aluminum trichloride; titanium tetrachloride; titanium tetraoxide; niobium pentachloride; zirconium tetrachloride; hafnium tetrachloride; zinc dichloride; molybdenum hexafluoride, molybdenum pentachloride; magnesium dichloride; tin tetrachloride; indium trichloride, trimethyl indium; tungsten hexafluoride; and amidocomplexes of mentioned elements (e.g., tetrakis-dimethylamido hafnium (TDMAHf)).
Referring now to
A stable oxide or nitride ion source is introduced into the batch reactor through an injector 112. The introduced stable oxide or nitride ion source flows across vertically displaced wafer substrates within the batch reactor. In concert with or subsequent to step 112, in situ radical generating source(s) are introduced into the reactor 114. Preferably, the in situ radical generating species is delivered to the reactor through an injector different than that used to provide stable oxide or nitride ion source to the reactor. In the instances where multiple iii sit radical generating sources are provided, such sources are provided in concert or in sequence.
The wafer substrates within the batch reactor are allowed to remain in contact with the in situ generated radicals for a time of between 0 and 2000 seconds at step 116. The cationic ion deposition source is then introduced into the batch reactor at step 118 by way of an across-flow positioned injector. Wafer-to-wafer thickness variations among a batch of 100 wafers of less than 5 thickness percent are routinely noted and typically less than 3 thickness percent. After allowing sufficient time to deposit a film thickness at step 120, the batch reactor volume is purged to terminate deposition at step 122.
It is appreciated that the process sequence depicted in
The present invention is further detailed with respect to the following non-limiting examples.
A stack of wafers are loaded into a wafer carrier introduced into a reactor as detailed with respect to
The process of Example 1 is repeated with the oxygen gas flow being shut off after 30 seconds and replaced with a flow of ammonia at a rate of 1 slpm. After 30 seconds of ammonia flow, TSA is introduced instead of the TEOS of Example 1 to deposit silicon nitride with WTW uniformity of ±3% for 280 nanometer film.
The process of Example 1 is repeated with ammonia gas passing through a 5000 V electric arc discharge replacing the oxygen gas and TSA replacing the TEOS of Example 1 to deposit silicon nitride.
The process of Example 1 is performed with a maintained flow time of 90 seconds and without the removal of the wafers from the reactor, the process of Example 2 is performed with a maintained flow time of 140 seconds. The resultant wafer substrates have a 20 nanometer thick layer of silicon dioxide overlayered with a 20 nanometer thick layer of silicon nitride.
The procedure of Example 1 is repeated with the substitution of a like flow rate of TDMAHf for TEOS. Under the same reaction conditions, a high quality film of hafnium oxide is obtained.
Patent documents and publications mentioned in the specification are indicative of the levels of those skilled in the art to which the invention pertains. These documents and publications are incorporated herein by reference to the same extent as if each individual document or publication was specifically and individually incorporated herein by reference.
The foregoing description is illustrative of particular embodiments of the invention, but is not meant to be a limitation upon the practice thereof. The following claims, including all equivalents thereof, are intended to define the scope of the invention.
This application claims priority of U.S. Provisional Patent Application Ser. No. 60/821,308 filed Aug. 3, 2006, which is incorporated herein by reference.
Number | Date | Country | |
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60821308 | Aug 2006 | US |