Claims
- 1. Apparatus for measuring the distance from the apparatus to a surface comprising;
- optical means for passing a beam of radiation to the surface at an angle other than normal;
- optical means positioned to receive said beam of radiation after it has been specularly reflected from the surface;
- means for measuring a position of the specularly reflected beam with respect to the optical axis of the second mentioned optical means whereby to indicate the distance from the part of the surface struck by the beam to the apparatus;
- and means for scanning said beam across the surface.
- 2. Apparatus as claimed in claim 1 in which the across sectional size of the beam at the surface is substantially 5 micron.
- 3. Apparatus as claimed in claim 1 in which the optical axis of the second mentioned optical means is at right angles to the optical axis of the first mentioned optical means whereby, if the surface is at the focus of the second mentioned optical means, movement of the beam due to change of distance between the apparatus and the surface will be in the focal plane of the second mentioned optical means.
- 4. Apparatus as claimed in claim 1 in which automatic focusing means is provided so that the beam is focused on the surface at all times.
- 5. Apparatus as claimed in claim 1 in which the means for scanning the beam across the surface includes a rotatable mirror.
- 6. Apparatus as claimed in claim 1 in which the beam of radiation passing to the surface is initially focused at an intermediate scan line, the intermediate scan line and the surface being conjugate with respect to optical components between the intermediate scan line and the surface.
- 7. Apparatus as claimed in claim 1, in which the first and second mentioned optical menas are the same optical means.
- 8. Apparatus as claimed in claim 7, in which the beam of radiation passed to the surface by the optical means passes to the surface from one side of the optical axis of the optical means, and the beam of radiation received by the optical means from the surface after it has been specularly reflected passes to the optical means on the opposite side of the optical axis from the incident beam.
Priority Claims (1)
Number |
Date |
Country |
Kind |
8626812 |
Nov 1986 |
GBX |
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Parent Case Info
This application is a continuation-in-part of Ser. No. 07/116,314, filed Nov. 4, 1987, and now U.S. Pat. No. 4,861,984.
US Referenced Citations (10)
Continuations (1)
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Number |
Date |
Country |
Parent |
116314 |
Nov 1987 |
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