Number | Name | Date | Kind |
---|---|---|---|
4585668 | Asmussen | Apr 1986 | |
4630566 | Asmussen et al. | Dec 1986 | |
4727293 | Asmussen et al. | Feb 1988 | |
4792772 | Asmussen | Dec 1988 | |
4906900 | Asmussen | Mar 1990 | |
4943345 | Asmussen et al. | Jul 1990 | |
5311103 | Asmussen | May 1994 | |
5382311 | Ishikawa et al. | Jan 1995 | |
5571577 | Zhang et al. | Nov 1996 |
Number | Date | Country |
---|---|---|
5-36637 | Feb 1993 | JPX |
Entry |
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Zhang, J., et al., J. Vac. Sci. Technol. A 8 (1990) pp. 2124-2128 No Month. |