1. Field of the Invention
The present invention relates generally to scanning probe microscopy and more particularly to a Scanning Near-field Acoustic Photothermal/photoacoustic Spectroscopy (SNAPS) imaging tool.
2. Discussion of Related Art
Atomic force microscopy (AFM) is a well established technique for imaging surface features with nanometer or even sub-nanometer resolution. In atomic force microscopy, a cantilever with a small spring constant is dragged on the surface of a sample. The cantilever has a probe tip capable of contacting the sample with a nanometer contact area. The contact force between the tip and the sample includes short-range forces, such as the van der Walls force. Therefore, any small variation in distance between the probe tip and the surface of the sample can result in a large change in the force due to the short range nature of the forces.
When the cantilever is rastered on the top of the surface of the sample, deflection of the cantilever generates a response that creates a spatial force image of the surface with nanometer spatial resolution. However, conventional microscopy is limited only to surface topography. Also, conventional atomic force microscopy is incapable of chemical differentiation of surface features.
While atomic force microscopy provides no information concerning chemistry of the features, this limitation can be overcome using the recent development of Scanning Near-field Ultrasound Holography (SNFUH) by Shekhawat and Dravid, which can provide surface and subsurface features. The principle of acoustic holography is simple. The sample in an atomic force microscope is vibrated at MHz frequencies using a sample mount that includes a first piezoelectric crystal. The ultrasonic waves traveling through the sample couple with the motion of the atomic force microscope's cantilever that is in contact with the surface of the sample. Since the atomic force microscope's cantilever is independently vibrated by a second piezoelectric crystal at a slightly different frequency than the ultrasonic waves generated by the first piezoelectric crystal, superposition of the two separate oscillations creates a difference frequency that can be monitored using a position sensitive detector (PSD) of the atomic force microscope. When the phase of the oscillations at this difference frequency is displayed as a function of spatial location of the scanning cantilever tip, the resulting phase image map shows contrast due to acoustic impedance variation caused by material inhomogeneity of the subsurface or surface feature.
Photoacoustic technique has been well known ever since Alexander Graham Bell first observed the effect using selenium in 1881. In photoacoustic spectroscopy (PAS), an acoustic signal is produced when the sample is exposed to a pulse of light of a certain wavelength. The intensity of the acoustic signal depends on the optical absorption properties of the sample. The acoustic signal strength as a function of optical wavelength shows a unique spectrum of the sample. PAS is an excellent technique for spectroscopic characterization of samples, for example, biological specimens.
One aspect of the present invention regards an analysis system for determining chemical characteristics of a sample, the analysis system including a base with a sample positioned on a surface of said base and a first oscillator that directly applies a first acoustic wave at a first frequency to a probe. The analysis system further includes a second oscillator, independent of the first oscillator, that applies a second acoustic wave at a second frequency to the sample, wherein the first frequency is different than the second frequency and the first acoustic wave and the second acoustic wave are simultaneously applied to the probe and the sample, respectively, and form a coupling. The analysis system includes a source of electromagnetic energy that applies the electromagnetic energy to the sample, wherein the electromagnetic energy is absorbed by the sample causing a change in phase of the second acoustic wave. The probe interacts with the sample and is sensitive to the second acoustic wave and the change in phase of the second acoustic wave and generates signals representative of an effect of the coupling and a processor for receiving the signals and determining a spectrum of the sample based on the signals.
A second aspect of the present invention regards a method for determining chemical characteristics of a sample, the method including directly applying a first acoustic wave at a first frequency to a probe and applying, independent of the directly applying the first acoustic wave, a second acoustic wave at a second frequency to the sample, wherein the first frequency is different than the second frequency and the first acoustic wave and the second acoustic wave are simultaneously applied to the probe and the sample, respectively, and form a coupling. The method further including applying electromagnetic energy to the sample, wherein the electromagnetic energy is absorbed by the sample causing a change in phase of the second acoustic wave. The method further including detecting an effect of the coupling and determining a spectrum of the sample based on the detecting.
A third aspect of the present invention regards an analysis system for determining chemical characteristics of a sample, the analysis system including a source of electromagnetic energy that applies the electromagnetic energy to the sample, wherein the electromagnetic energy is absorbed by the sample and causes an acoustic wave to be generated. The analysis system includes a scanning near field ultrasonic holography system that receives the acoustic wave so that a coupling results wherein a change in phase of the acoustic wave results. The analysis system further includes a detector for detecting the acoustic wave and an effect of the coupling and a processor for receiving the signals and determining a spectrum of the sample based on the signals.
One or more aspects of the invention provide the advantage of the acquisition of spatial surface and sub-surface information of a sample simultaneously with the acquisition of chemical (spectral) characteristics of the same sample.
Another possible advantage of one or more aspects of the present invention is the ability to detect embedded nanostructures without the need for a destructive approach.
Further characteristics and advantages of the present invention will become apparent in the course of the following description of an exemplary embodiment by the drawings.
In the embodiments of the invention described hereinafter, like numerals will be used to identify like elements. In addition, one or more of the described embodiments will employ a reverse photoacoustic effect method wherein an acoustic wave is applied to a sample as a probe beam to investigate the effect of infrared absorption by the sample. The reverse photoacoustic method can be used to obtain spectroscopic information on samples.
The principle of the reverse photoacoustic effect can be simply stated. As an example, a first acoustic wave is generated from a source and directed through a first side of a sample and an acoustic wave is detected with a sensitive detector, such as a piezoelectric detector, on the opposite side, wherein the phase difference between the first acoustic wave generated by the source and the acoustic wave detected by the detector is determined. A second acoustic wave is generated by the source at the same frequency as the first acoustic wave and is directed through the first side of the sample while the sample is illuminated with a certain wavelength of infrared light (IR) and the phase difference is noted. The above described process is repeated by applying different wavelengths for the infrared light while maintaining the same frequency for the second acoustic wave.
When the sample absorbs the infrared light, the vibrational states of the constituent molecules modify the velocity of the second acoustic wave through the sample, and, thus, the phase of the second acoustic wave is modified. If a sample absorbs more energy from the infrared light, there is a greater change in phase. A plot of the phase difference with and without illumination as a function of the incident wavelength of the infrared illumination will show a unique absorption spectrum of the sample. The spectroscopic aspect of this innovation brings selectivity to detection.
The observed phase change in the reverse photo-acoustic effect is a result of the light-induced local temperature increase and the thermal expansions of the sample and nearby medium. The speed of sound v in a gas can be written as:
wherein, v is the velocity of the first and second acoustic wave, E is the Young's modulus, and ρ is the density of the material. Since Young's modulus varies with local temperature, the velocity of the first and second acoustic wave depends on the local temperature of the medium. The possibility also exists for the velocity of the first and second acoustic waves to vary due to density change. When a sample absorbs infrared waves the individual atoms and molecules undergo electronic and vibrational excitations depending on the energy of the exciting wave. Once excited the atoms and molecules relax, they dissipate energy which results in a local change in the temperature. The sound velocity is modified due to local change in temperature. Although these changes in velocity are extremely small to be measured, its effect can be easily seen in the phase of the wave. As long as the interaction time of the electromagnetic waves with the molecules, or the relaxation time, is large enough to affect the propagating acoustic wave, there will be an observable change in phase of the acoustic wave.
With the above description in mind, an analysis system 100 is shown in
The sample 102 is placed on top of the prism 110 so that there is good contact between the two. In addition, the sample 102 is in contact with a tip 112 of a microcantilever 114 of an atomic force microscope (AFM). As shown in
In operation, a reverse photoacoustic effect is initially analyzed by inactivating the PZT oscillator 116 and having the PZT oscillator 108 controlled by a first function generator 126 so that the PZT oscillator 108 generates acoustic waves at a frequency of fs and amplitude as. The acoustic waves have a frequency fs with a value ranging from a few kilohertz to a few megahertz. The acoustic waves travel through the sample 102 at ultrasonic speeds and are sensed by the microcantilever 114. Besides being subjected to the acoustic waves generated by PZT oscillator 108, the sample 102 is illuminated from below using evanescent waves of light. In particular, a second light source, such as laser 128, directs light 130 at a fixed frequency through prism 110. The light 130 generated by laser 128 is preferably infrared (IR) light that is collimated prior to entering the prism 110. A portion 132 of the light 130 is totally internally reflected by the prism 110 and exits the prism 110. Another portion of the light 130 interacts with the sample 102 to set up an evanescent wave field that is exponentially decaying into the ambient. As a result of this interaction, the molecular vibrations in the sample 102 create localized temperature changes depending on the chemical composition of sample 102 and affect the phase of the ultrasonic acoustic waves traveling from the PZT oscillator 108 to the tip 112 of the microcantilever 114 through the sample 102. The ultrasonic acoustic wave and its phase are detected via the motion of the tip 112. Motion of the tip 112 is detected by an optical beam deflection method, piezoresistive method or a piezoelectric method.
Note that light 130 can cover ultraviolet, visible, or infrared light. In the case of light 130 being infrared light, the prism 110 is preferably made of ZnSe, Ge or ZnS. In the case of ultraviolet or visible light, the prism 110 is made of quartz. As mentioned previously, the second light source that generates light 130 can be a laser 128, wherein the laser can be tunable such as a quantum cascade laser. The second light source can also be a scanning monochromator, a spectrophotometer, or the light source of a Fourier Transform Infrared spectrometer.
An example of the optical beam deflection method is shown in
The above described process is repeated for different wavelengths for the light 130 while maintaining a constant frequency fs of the acoustic wave. After the different wavelengths for the light 130 are applied and detected, the light 130 is turned off and the above described process is repeated by maintaining the frequency fs of the function generator 126 and detecting the resultant deflection of the tip 112. Of course, the order of turning on or off the light 130 can be reversed.
As shown in
The phase changes using the above described reverse photoacoustic technique are shown as vertical bars in
While the reverse photoacoustic technique of
In the case of the above described holographic imaging, the image contrast comes from variation in sound velocity due to elastic property differences. Illuminating the sample using infrared waves such that the sample is in the evanescent field will result in a different phenomenon. Certain molecules will absorb infrared light creating a localized change in temperature, which in turn changes the image contrast. Image contrast as a function of wavelength will resemble a chemical map of the sample at a given fixed wavelength. The variation of the signal of the microcantilever 114 at a given fixed point of the sample 102, when scanning the wavelength, will resemble an IR absorption spectrum of the sample 102. This technique has the potential of obtaining chemical information at 5 nm resolution. An atomic force microscopy system 134 involves the microcantilever 114 and tip 112 that perform x-y-z scanning of the top surface of the sample 102 by use of the x-y movement of the base 106. The atomic force microscopy system 134 is operated to image and monitor 1) the topography of the sample 102 and 2) the response of the sample 102 to the light 130. The microcantilever 114 is optimized to be extremely sensitive to temperature changes (while keeping a high resolution imaging). One example of such optimization is to have the microcantilever 114 be made of a bimaterial by depositing a metal layer on its surface. Therefore, the microcantilever 114 response is related to the photothermal effect. A plot of the microcantilever 114 response as a function of illuminating wavelength of light 130 shows infrared absorption spectra of the sample 102.
Note that prior to determining the infrared absorption spectra of the sample 10, a spectra representing the signature of the microcantilever 114 alone is performed without the sample present. An example of such spectra is shown in
As shown in
As shown in
The signal generated by detector 122 is then sent to the controller 138 which processes the signal for image formation and further maneuvers the tip 112 over the sample 102. Regarding image formation, the signal from detector 122 is sent, via controller 138, to a lock-in amplifier 140 to monitor the nonlinear coupling resulting from the excitation of the microcantilever 114 and the sample 102 brought in contact with one another. The lock-in amplifier 140 extracts the amplitude and the phase corresponding to the component of the signal with a frequency of |fs−fp|. The amplitude and phase signals extracted by the lock-in amplifier 140 are sent back to the controller 138, wherein AFM software contained within the controller 138 operates on the amplitude and phase signals so as to generate regular AFM images. The amplitude and phase information in the coupled mode (in the form of |fs−fp|, used as reference in the lock-in amplifier 140) are detected and are displayed on display 143 as a function of spatial location of the scanning cantilever tip 112 as shown in
In summary, the system 100 of
In the other operation, the acoustic waves are applied to the sample 102 and the probe 114 while a multi-wavelength beam of light 130 is applied to sample 102. In this operation, the microcantilever 114 will be used to record the localized spectrum of the sample 102. The initial image will be used to determine the location of interest, the microcantilever 114 will be positioned and the scanning light source activated. By monitoring the evolution of the deflection of the microcantilever 114, as well as the evolution of the amplitude and phase of the coupling, one will obtain the chemical signature of the sample 102 at the nanoscale.
An alternative variation of the embodiment of
A second alternative variation of the embodiment of
A third alternative variation of the embodiment of
In system 500, the amplitude of the excitation will depend on the intensity of the light source 128, and the chemical composition of the sample 102. The region of interest of the sample 102 should be imaged first, using standard techniques. Then the same region should be imaged using the ultrasonic excitation of the microcantilever 114 and the illumination of the sample 102, and monitoring the coupling at the difference frequency |fs−fp|. One wavelength at a time should be used to illuminate the sample 102.
The foregoing description is provided to illustrate the invention, and is not to be construed as a limitation. Numerous additions, substitutions and other changes can be made to the invention without departing from its scope as set forth in the appended claims. For example, the previously described SNFUH imager can be applied to the reverse photoacoustic systems of
This invention was made with government support under Contract No. DE-ACO5-00OR22725 awarded by the U.S. Department of Energy. The government has certain rights in the invention.