Number | Name | Date | Kind |
---|---|---|---|
3795557 | Jacob | Mar 1974 | |
3867216 | Jacob | Feb 1975 | |
3880684 | Abe | Apr 1975 | |
3975252 | Fraser et al. | Aug 1976 | |
4011113 | Thompson et al. | Mar 1977 | |
4030967 | Ingrey et al. | Jun 1977 | |
4110661 | Harris et al. | Aug 1978 |
Entry |
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Mogab et al., "Plasma . . . Undercutting", Electronics, vol. 51, No. 18, (8/78), pp. 117-121. |
Burstell et al., "Preferential Etch . . . -GaAlAs", IBM Technical Disclosure Bull., vol. 20, No. 6, (11/77), p. 2451. |