Number | Date | Country | Kind |
---|---|---|---|
0012137 | May 2000 | GB |
Number | Name | Date | Kind |
---|---|---|---|
4574310 | Nishizawa et al. | Mar 1986 | A |
4754310 | Coe | Jun 1988 | A |
4835584 | Lancaster | May 1989 | A |
5216275 | Chen | Jun 1993 | A |
5294824 | Okada | Mar 1994 | A |
5438215 | Tihanyi | Aug 1995 | A |
5473180 | Ludikhuize | Dec 1995 | A |
6168983 | Rumennik et al. | Jan 2001 | B1 |
6294818 | Fujihira | Sep 2001 | B1 |
6452231 | Nakagawa et al. | Sep 2002 | B1 |
Number | Date | Country |
---|---|---|
WO9729518 | Aug 1997 | WO |
0033353 | Jun 2000 | WO |
Entry |
---|
“Silicon processing for the VLSI Era”, by Stanley Wolf et al., pp. 155-156. |