SEMICONDUCTOR POWER DEVICE

Abstract

Provided is a semiconductor power device. The semiconductor power device includes a semiconductor substrate and p-type body regions disposed in the semiconductor substrate. The p-type body regions are in contact with a source metal layer. The semiconductor substrate includes at least one first region, and a region of the semiconductor substrate outside the at least one first region is a second region. A p-type body region of p-type body regions in the first region is provided with a first p-type body region contact region, and the source metal layer is in contact with the first p-type body region contact region to form an ohmic contact. Each of p-type body regions in the second region forms no ohmic contact with the source metal layer.

Description

Claims

1. A semiconductor power device, comprising: a semiconductor substrate; andp-type body regions disposed in the semiconductor substrate, wherein the p-type body regions are in contact with a source metal layer;wherein the semiconductor substrate comprises at least one first region, and a region of the semiconductor substrate outside the at least one first region is a second region;a p-type body region of p-type body regions in the at least one first region is provided with a first p-type body region contact region, and the source metal layer is in contact with the first p-type body region contact region to form an ohmic contact; andeach of p-type body regions in the second region forms no ohmic contact with the source metal layer.

2. The semiconductor power device according to claim 1, wherein a shape of the at least one first region comprises at least one of a polygon, a circle, or an ellipse.

3. The semiconductor power device according to claim 1, wherein a p-type body region of the p-type body regions in the second region is provided with a second p-type body region contact region, and a doping concentration of the second p-type body region contact region is lower than a doping concentration of the first p-type body region contact region.

4. The semiconductor power device according to claim 3, wherein the source metal layer is in contact with the second p-type body region contact region but no ohmic contact is formed between the source metal layer and the second p-type body region contact region.

5. The semiconductor power device according to claim 1, further comprising n-type source regions disposed in the p-type body regions, wherein the n-type source regions are in contact with the source metal layer.

6. The semiconductor power device according to claim 1, wherein the semiconductor substrate comprises an n-type drain region and an n-type drift region disposed above the n-type drain region, and each of the p-type body regions forms a PN junction structure with the n-type drift region.

7. The semiconductor power device according to claim 1, further comprising gate structures, each of the gate structures comprises a gate dielectric layer and a gate.

8. The semiconductor power device according to claim 7, further comprising gate trenches recessed in the semiconductor substrate, wherein the gate dielectric layer and the gate are disposed in a respective one of the gate trenches.

9. The semiconductor power device according to claim 8, further comprising shielded gates, wherein each of the shielded gates is disposed at lower portion in a respective one of the gate trenches, the gate is disposed at upper portion in the respective one of the gate trenches, and each of the shielded gates is isolated from the semiconductor substrate and the respective gate via an insulating dielectric layer.

10. The semiconductor power device according to claim 9, wherein each of the shielded gates extends upward from the lower portion to the upper portion in the respective one of the gate trenches.

11. The semiconductor power device according to claim 7, wherein each of the gate structures is isolated from the source metal layer via an interlayer insulating layer.

12. The semiconductor power device according to claim 7, wherein the gate structures are planar gate structures or trench gate structures.