Number | Date | Country | Kind |
---|---|---|---|
196 22 276.1 | Jun 1996 | DEX |
Number | Name | Date | Kind |
---|---|---|---|
4574468 | Slotboom et al. | Mar 1986 | |
5376678 | Hsu et al. | Dec 1994 |
Number | Date | Country |
---|---|---|
4112045A1 | Oct 1991 | DEX |
Entry |
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"Improved Narrow Trench Profile Using A Composite Spacer Process" (Garling et al.), Motorolla, Aug. 1996, p. 143. |