Number | Name | Date | Kind |
---|---|---|---|
2979868 | Emeis | Apr 1961 | |
3559346 | Paola | Feb 1971 | |
4104099 | Scherrer | Aug 1978 | |
4165584 | Scherrer | Aug 1979 | |
4256535 | Banks | Mar 1981 | |
4735679 | Lasky | Apr 1988 | |
4910155 | Cote et al. | Mar 1990 | |
5032544 | Ito et al. | Jul 1991 | |
5110428 | Prigge et al. | May 1992 | |
5191738 | Nakazato et al. | Mar 1993 | |
5274960 | Karlsrud | Jan 1994 |
Number | Date | Country |
---|---|---|
2521895 | Aug 1983 | FRX |
55-157472A | Dec 1980 | JPX |
64-51268A | Feb 1989 | JPX |
64-71663A | Mar 1989 | JPX |
1-246070A | Oct 1989 | JPX |
1151436A | Apr 1985 | SUX |
Entry |
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E. Mendel and J. S. Basi, IBM Data Systems Division, Multiple Wafer Free Polishing-Part 2, Process, Apr. 10, 1980. |