The invention relates to a sensor as defined in the preamble of claim 1, as well as to a method for manufacturing such sensors, as defined in the preamble of claim 6.
Such sensors serve, for example, for measuring temperature. A layer resistor represents the active sensor element. The layer resistor is located on a substrate-platelet, which is made, for example, of ceramic. Such temperature sensors are known, for example, from U.S. Pat. No. 5,202,665 and DE-C1 100 20 932.
EP-B1 1 047 923 shows a sensor component, in the case of which a metal film is applied to a ceramic support. Connection wires are connected with contact areas of the metal film.
A method for cost-effective manufacture of such sensor components is presented in EP-A2 1 124 238.
Known are also capacitive moisture sensors, where the electrodes and associated connection points are arranged on a substrate. Such a sensor is known from WO-A1 00/25120.
Sensors of the aforementioned kind serve for measuring a physical variable, thus, for example, the temperature or humidity of a gas. Under the influence of the physical variable, the sensor changes its properties. In the case of temperature sensors, this can be, for example, the electrical resistance of the sensor, while, in the case of moisture sensors, it is the capacitance of the sensor. The measured value of the physical variable is ascertained from the property change of the sensor by means of an evaluating circuit. The sensor is, in such case, connected by at least two electrical connections with the evaluating circuit. Here, there is then the problem, that the measured value can be degraded by this connection with the evaluating circuit.
In the case of a temperature sensor, the degradation of the measured value can by caused by the fact that heat can be conducted away from the sensor and into the evaluating circuit. When low temperatures, for example below freezing, are to be measured with the temperature sensor, conversely, heat can move from the evaluating circuit to the sensor and, in this way, degrade the measured value.
In the case of sensors for other physical variables, similar problems can arise. In a humidity sensor, a temperature change at the sensor relative to the temperature of the gas, whose humidity is to be measured, likewise leads to an erroneous measured value for the humidity.
An object of the invention is to avoid the described problems by reducing heat conduction via the connection between sensor and evaluating circuit, in order, in this way, to improve both response and accuracy.
Such object is achieved according to the invention by the features of claim 1. Advantageous further developments of the invention result from the dependent claims.
An example of an embodiment of the invention will now be explained in more detail on the basis of the drawing, the figures of which show as follows:
According to the invention, connection leads 3 have between the connection areas 7 and 8 a plurality of perforations 9, which are preferably triangular in shape. Neighboring triangular perforations 9 are rotated 180-degrees with respect to one another. In the region of the perforations 9, the connection leads 3 thus form a planar lattice of longitudinal legs 10 and inclined, transverse legs 11. Characteristic of this lattice is a high mechanical load carrying ability, due to its bending stiffness. At the same time, however, the cross section responsible for heat conduction is very markedly reduced. The markedly lessened heat conduction from sensor element to evaluating circuit, and vice versa, means improved response sensitivity of the sensor element 4 and, therewith, improved accuracy of measurement. Reduction of the cross section responsible for heat conduction is also achievable by other forms of perforations 9, for example by round, hexagonal or four-sided perforations 9; however, the illustrated triangular form is most advantageous from the point of view of bending stiffness.
Advantageously, the connection areas 7 and/or the connection areas 8 (
The perforations 9 in the connection leads 3 offer yet another advantage when the sensor 1 including its leads are partially potted in plastic. The potting compound then flows into the perforations 9, in order to form a traversing connection, from above the connection leads 3 to below them.
The invention can also be advantageously applied in the case of sensors which simultaneously measure a plurality of physical variables.
Number | Date | Country | Kind |
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222/05 | Feb 2005 | CH | national |
Filing Document | Filing Date | Country | Kind | 371c Date |
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PCT/CH05/00230 | 4/25/2005 | WO | 00 | 6/3/2008 |