Number | Name | Date | Kind |
---|---|---|---|
4507384 | Morita | Mar 1985 | |
4544729 | Nate et al. | Oct 1985 | |
4657843 | Fukuyama et al. | Apr 1987 | |
4734481 | Steinmann | Mar 1988 | |
4745169 | Sugiyama et al. | May 1988 | |
4931379 | Brunsvolt et al. | Jun 1990 | |
5120629 | Bauer et al. | Jun 1992 | |
5158854 | Imamura et al. | Oct 1992 |
Number | Date | Country |
---|---|---|
342496 | Nov 1987 | EPX |
1102450 | Mar 1984 | JPX |
62-287242 | Dec 1987 | JPX |
241542 | Oct 1988 | JPX |
Entry |
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Sugiyama et al., "Positive Excimer Laser Resists Prepared With Aliphatic Diazoketones", Society of Plastics Eng. Conf., pp. 51-60 (Nov. 1988). |