Claims
- 1. An apparatus for the melting of silicon which comprises:
- a solid silicon body having juxtaposed therein a pair of silicon electrodes;
- means for passing an electric current through said electrodes of a magnitude sufficient to generate an electric arc within said body between said electrodes to melt silicon of said body and form a cavity containing a silicon melt therein; and
- means for cooling said body.
- 2. The apparatus defined in claim 1, further comprising an arc-striking electrode movable toward and away from at least one other electrode for striking said arc therewith.
- 3. The apparatus defined in claim 1, further comprising means for heating said electrodes independently of said arc.
- 4. The apparatus defined in claim 1, further comprising means for drawing a silicon bar from said melt.
- 5. The apparatus defined in claim 1, further comprising a vacuum chamber receiving said body.
- 6. The apparatus defined in claim 5, further comprising means in said vacuum chamber for depositing silicon vapors from said melt on a substrate.
CROSS REFERENCE TO RELATED APPLICATIONS
The present application is a division of the commonly assigned copending application Ser. No. 633,124 filed July 20, 1984 by me and entitled SILICON MELTING AND EVAPORATION METHOD FOR HIGH PURITY APPLICATIONS. The present application is also related to the commonly assigned copending application Ser. No. 618,192 filed June 7, 1984 by me and entitled METHOD OF AND APPARATUS FOR THE DRAWING OF BARS OF MONOCRYSTALLINE SILICON.
Divisions (1)
|
Number |
Date |
Country |
Parent |
633124 |
Jul 1984 |
|