Number | Name | Date | Kind |
---|---|---|---|
4209357 | Gorin et al. | Jun 1980 | |
4297162 | Mundt et al. | Oct 1981 | |
4324611 | Vogel et al. | Apr 1982 | |
4340461 | Hendricks et al. | Jul 1982 | |
4340462 | Koch | Jul 1982 | |
4367114 | Steinberg et al. | Jan 1983 |
Entry |
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IBM Technical Disclosure Bulletin, vol. 26, No. 7B, Dec. 1983, Plasma Etching Chamber, B. H. Desilets, pp. 3567-3569. |
L. M. Ephrath, "Plasma Reactor for Dry Development of Resist", IBM Tech. Disc. Bull., vol. 24, No. 12, pp. 6268-6269, May 1982. |