These and other objects, advantages and features of the invention will become apparent from the following description thereof taken in conjunction with the accompanying drawings which illustrate a specific embodiment of the invention.
In the drawings:
The following describes embodiments of the present invention with reference to drawings.
The image sensor includes a semiconductor substrate 1, a photo-shielding film 4, an interlayer insulating film 5, gray filters 6a, 6b, and 6c, a flattening film 7, a microlens 8, and color filters 9a, 9b, and 9c.
Photoelectric converters 2 and transistors 3 are provided on the semiconductor substrate 1. The photoelectric converters 2 are formed by covering the semiconductor substrate 1 with a mask having apertures of a same size, and introducing a dopant to the semiconductor substrate 1 by ion implantation.
The photo-shielding film 4 covers the semiconductor substrate 1, and has apertures 4a at positions corresponding to the photoelectric converters 2. In the first embodiment, all of the apertures 4a have a substantially same size.
The gray filters 6a, 6b, and 6c each transmit light of all wavelength regions of visible light with a predetermined transmittance. The transmittance differs for each of the gray filters 6a, 6b, and 6c. In detail, the transmittances of the gray filters 6a, 6b, and 6c decrease in this order. A different transmittance of visible light can be easily realized by using a different material, composition ratio, film thickness, and the like for a gray filter. In this embodiment, the gray filters 6a, 6b, and 6c have different film thicknesses, thereby achieving the different visible light transmittances. A material for composing the gray filters 6a, 6b, and 6c is silicon nitride, as one example.
The color filters 9a, 9b, and 9c respectively transmit light of wavelength regions of red, green, and blue. It is assumed here that the color filters 9a, 9b, and 9c are arranged in a Bayer array.
The interlayer insulating film 5, the flattening film 7, and the microlens 8 are general construction elements of an image sensor, and so their explanation has been omitted here.
Light passing through the gray filter 6a enters the photoelectric converters 2 belonging to columns C1 and C2. Light passing through the gray filter 6b enters the photoelectric converters 2 belonging to columns C3 and C4. Light passing through the gray filter 6c enters the photoelectric converters 2 belonging to columns C5 and C6.
Only lines L1 and L2 are shown in
The solid-state imaging device includes an image sensor 100, a signal processing unit 110, a storage 120, a timing generator 130, and a system control unit 140.
The image sensor 100 includes an imaging unit 101, a vertical scanning circuit 102, a horizontal scanning circuit 103, and an amplifier 104. The imaging unit 101 has the photoelectric converters 2 and the like arranged two-dimensionally. The vertical scanning circuit 102 and the horizontal scanning circuit 103 each output electric signals based on an amount of charge accumulated in each photoelectric converter 2, in sequence. The electric signals are amplified by the amplifier 104.
The signal processing unit 110 includes a frame memory 111, a signal synthesis circuit 112, and a compression circuit 113.
The frame memory 111 stores each electric signal output from the image sensor 100, in units of frames.
The signal synthesis circuit 112 obtains one composite signal by combining electric signals of a predetermined number of photoelectric converters. Here, the predetermined number of photoelectric converters are three photoelectric converters of a same color adjacent on a same line.
The compression circuit 113 applies image compression such as JPEG (Joint Photographic Experts Group) or MPEG (Moving Picture Experts Group) to the composite signal.
The storage 120 stores data obtained as a result of image compression.
The timing generator 130 generates a vertical sync signal, a horizontal sync signal, and the like. The vertical sync signal is a signal for driving the vertical scanning circuit 102, while the horizontal sync signal is a signal for driving the horizontal scanning circuit 103.
The system control unit 140 generates signals such as a trigger signal for initiating photographing. The trigger signal is a signal for driving the timing generator 130.
Curves 51, 52, and 53 indicate output characteristics of the photoelectric converters belonging to columns C1, C3, and C5. A curve 54 indicates output characteristics when output signals of these photoelectric converters are combined by signal processing.
The gray filters 6a, 6b, and 6c are disposed respectively on columns C1, C3, and C5. This makes each of the photoelectric converters belonging to columns C1, C3, and C5 differ in sensitivity. As a result, a light intensity at which an electric signal becomes saturated is different for each of the photoelectric converters belonging to columns C1, C3, and C5. By combining electric signals obtained from such three photoelectric converters having different sensitivities, the dynamic range can be considerably widened. Also, since the sensitivity of the photoelectric converters differs by three levels, smoother output characteristics of a composite signal than in conventional techniques can be achieved.
A second embodiment of the present invention is different from the first embodiment in the construction for differing the sensitivity. The rest of the construction of the second embodiment is the same as that of the first embodiment and so its explanation has been omitted here.
The image sensor includes the semiconductor substrate 1, the photo-shielding film 4, the interlayer insulating film 5, the microlens 8, and the color filters 9a, 9b, and 9c.
The photoelectric converters 2 and the transistors 3 are provided on the semiconductor substrate 1. The photoelectric converters 2 are formed by covering the semiconductor substrate 1 with a mask having apertures of a same size, and introducing a dopant to the semiconductor substrate 1 by ion implantation.
The photo-shielding film 4 covers the semiconductor substrate 1, and has apertures 4a, 4b, and 4c at positions corresponding to the photoelectric converters 2. In the second embodiment, the apertures 4a, 4b, and 4c have different sizes. In detail, the apertures 4a, 4b, and 4c decrease in size in this order.
The color filters 9a, 9b, and 9c respectively transmit light of wavelength regions of red, green, and blue. It is assumed here that the color filters 9a, 9b, and 9c are arranged in a Bayer array.
Light passing through the aperture 4a enters the photoelectric converters 2 belonging to columns C1 and C2. Light passing through the aperture 4b enters the photoelectric converters 2 belonging to columns C3 and C4. Light passing through the aperture 4c enters the photoelectric converters 2 belonging to columns C5 and C6.
By differing the aperture size in this way, the photoelectric converters having different sensitivities can be realized.
A third embodiment of the present invention is different from the first embodiment in that a monochrome image sensor is used.
The image sensor includes the semiconductor substrate 1, the photo-shielding film 4, the interlayer insulating film 5, the gray filters 6a, 6b, and 6c, the flattening film 7, and the microlens 8. Since the image sensor according to the third embodiment is for monochrome photographing, no color filter is provided.
The gray filters 6a, 6b, and 6c each transmit light of all wavelength regions of visible light with a predetermined transmittance. The transmittance differs for each of the gray filters 6a, 6b, and 6c. In detail, the transmittances of the gray filters 6a, 6b, and 6c decrease in this order. A different transmittance of visible light can be easily realized by using a different material, composition ratio, film thickness, and the like for a gray filter. In this embodiment, the gray filters 6a, 6b, and 6c have different film thicknesses, thereby achieving the different visible light transmittances. A material for composing the gray filters 6a, 6b, and 6c is silicon nitride, as one example.
Light passing through the gray filter 6a enters the photoelectric converters 2 belonging to columns C1 and C4. Light passing through the gray filter 6b enters the photoelectric converters 2 belonging to columns C2 and C5. Light passing through the gray filter 6c enters the photoelectric converters 2 belonging to columns C3 and C6.
Only lines L1, L2, and L3 are shown in
A fourth embodiment of the present invention is different from the second embodiment in that a monochrome image sensor is used.
The image sensor includes the semiconductor substrate 1, the photo-shielding film 4, the interlayer insulating film 5, and the microlens 8. Since the image sensor according to the fourth embodiment is for monochrome photographing, no color filter is provided.
The photo-shielding film 4 covers the semiconductor substrate 1, and has the apertures 4a, 4b, and 4c at positions corresponding to the photoelectric converters 2. In the fourth embodiment, the apertures 4a, 4b, and 4c have different sizes. In detail, the apertures 4a, 4b, and 4c decrease in size in this order.
Light passing through the aperture 4a enters the photoelectric converters 2 belonging to columns C1 and C4. Light passing through the aperture 4b enters the photoelectric converters 2 belonging to columns C2 and C5. Light passing through the aperture 4c enters the photoelectric converters 2 belonging to columns C3 and C6. By differing the aperture size in this way, the photoelectric converters having different sensitivities can be realized.
A fifth embodiment of the present invention is different from the first embodiment in the processing of an electric signal that has reached a saturation level. As a construction for differing the sensitivity, gray filters are used as in the first embodiment.
The solid state imaging device includes the image sensor 100, a signal processing unit 150, the storage 120, the timing generator 130, and the system control unit 140.
The signal processing unit 150 includes a frame memory 151, a signal synthesis circuit 152, a compression circuit 153, and a signal level judgment circuit 154.
The signal level judgment circuit 154 prohibits, if an electric signal output from the image sensor 100 is at a saturation level, the electric signal from being combined in the signal synthesis circuit 152.
Only lines L1, L2, and L3 are shown in
Thus, in the low-brightness photographing mode, the three pixel signals are combined together, with it being possible to considerably widen the dynamic range. In the high-brightness photographing mode, meanwhile, only the unsaturated pixel signals out of the three pixel signals are combined together, with it being possible to suppress a drop in resolution.
A sixth embodiment of the present invention applies the electric signal processing of the fifth embodiment to the second embodiment. As a construction for differing the sensitivity, apertures of a photo-shielding film are used as in the second embodiment. In detail, when the electric signals obtained from the three photoelectric converters adjacent on the same line are below the saturation level, the electric signals are all combined in the signal synthesis circuit 152. When any of the electric signals obtained from the three photoelectric converters adjacent on the same line has reached the saturation level, on the other hand, only the unsaturated electric signals are combined in the signal synthesis circuit 152.
Thus, in the low-brightness photographing mode, the three pixel signals are combined together, with it being possible to considerably widen the dynamic range. In the high-brightness photographing mode, meanwhile, only the unsaturated pixel signals out of the three pixel signals are combined together, with it being possible to suppress a drop in resolution.
A seventh embodiment of the present invention is different from the first embodiment in the construction for differing the sensitivity. The rest of the construction of the seventh embodiment is the same as that of the first embodiment, so that its explanation has been omitted here.
Only the imaging unit 101, vertical scanning circuits 102a, 102b, and 102c, the horizontal scanning circuit 103, and the timing generator 130 are shown in
The photoelectric converters 2 are arranged two-dimensionally in the imaging unit 101. The photoelectric converters 2 are formed by covering the semiconductor substrate 1 with a mask having apertures of a same size, and introducing a dopant to the semiconductor substrate 1 by ion implantation.
The vertical scanning circuit 102a drives the photoelectric converters 2 belonging to lines L1 and L4. The vertical scanning circuit 102b drives the photoelectric converters 2 belonging to lines L2 and L5. The vertical scanning circuit 102c drives the photoelectric converters 2 belonging to lines L3 and L6. Each photoelectric converter 2 accumulates a charge in accordance with a driving pulse of a corresponding vertical scanning circuit, and outputs an electric signal based on the accumulated charge amount.
The horizontal scanning circuit 103 sequentially outputs electric signals output from the photoelectric converters 2, in units of columns.
An electronic shutter pulse is a pulse for discharging an entire charge accumulated in a photoelectric converter 2. A read pulse is a pulse for outputting a charge accumulated in a photoelectric converter 2 as an electric signal.
Each of the vertical scanning circuits 102a, 102b, and 102c outputs a read pulse after outputting an electronic shutter pulse. A period from the output of the electric shutter pulse to the output of the read pulse is an exposure time. Exposure times determined by the vertical scanning circuits 102a, 102b, and 102c are respectively 33 mS, 16.5 mS, and 8.25 mS.
Only lines L1, L2, and L3 are shown in
An eighth embodiment of the present invention is a combination of the first and seventh embodiments.
The gray filters 6a, 6b, and 6c differ in visible light transmittance. In detail, the transmittances of the gray filters 6a, 6b, and 6c decrease in this order. The vertical scanning circuits 102a, 102b, and 102c differ in exposure time. In detail, the exposure times of the vertical scanning circuits 102a, 102b, and 102c decrease in this order. The apertures of the photo-shielding film 4 have a substantially same size.
The signal synthesis circuit 112 combines electric signals obtained from nine photoelectric converters belonging to three adjacent lines and three adjacent columns.
Only lines L1, L2, and L3 are shown in
A ninth embodiment of the present invention is a combination of the second and seventh embodiments.
The apertures 4a, 4b, and 4c of the photo-shielding film 4 differ in size. In detail, the sizes of the apertures 4a, 4b, and 4c decrease in this order. The vertical scanning circuits 102a, 102b, and 102c differ in exposure time. In detail, the exposures times of the vertical scanning circuits 102a, 102b, and 102c decrease in this order.
The signal synthesis circuit 112 combines electric signals obtained from nine photoelectric converters belonging to three adjacent lines and three adjacent columns.
By combining the second embodiment (the adjustment of three sensitivities using aperture sizes) and the seventh embodiment (the adjustment of three sensitivities using exposure times) in this way, nine different sensitivities can be provided.
A tenth embodiment of the present invention is a combination of the fifth and seventh embodiments.
The gray filters 6a, 6b, and 6c differ in visible light transmittance. In detail, the transmittances of the gray filters 6a, 6b, and 6c decrease in this order. The vertical scanning circuits 102a, 102b, and 102c differ in exposure time. In detail, the exposure times of the vertical scanning circuits 102a, 102b, and 102c decrease in this order. The apertures of the photo-shielding film 4 have a substantially same size.
The signal synthesis circuit 112 combines electric signals obtained from nine photoelectric converters belonging to three adjacent lines and three adjacent columns.
The signal level judgment circuit 154 prohibits, if an electric signal output from the image sensor 100 is at the saturation level, the electric signal from being combined in the signal synthesis circuit 152.
Only lines L1, L2, and L3 are shown in
Thus, in the low-brightness photographing mode, the nine pixel signals are combined together, with it being possible to considerably widen the dynamic range. In the high-brightness photographing mode, meanwhile, only the unsaturated pixel signals out of the nine pixel signals are combined together, with it being possible to suppress a drop in resolution.
An eleventh embodiment of the present invention is a combination of the sixth and seventh embodiments.
The apertures 4a, 4b, and 4c of the photo-shielding film 4 differ in size. In detail, the sizes of the apertures 4a, 4b, and 4c decrease in this order. The vertical scanning circuits 102a, 102b, and 102c differ in exposure time. In detail, the exposure times of the vertical scanning circuits 102a, 102b, and 102c decrease in this order.
The signal level judgment circuit 154 prohibits, if an electric level output from the image sensor 100 is at the saturation level, the electric signal from being combined in the signal synthesis circuit 152.
By doing so, the same effects as the tenth embodiment can be achieved.
A twelfth embodiment of the present invention is different from the first embodiment in the construction of gray filters. The rest of the construction of the twelfth embodiment is the same as that of the first embodiment, and so its explanation has been omitted here.
In this embodiment, liquid crystal filters are employed as the gray filters 6a, 6b, and 6c. A liquid crystal filter varies in visible light transmittance depending on an applied voltage. Accordingly, the sensitivity of a photoelectric converter can be changed by changing an applied voltage.
Although the solid-state imaging device according to the present invention has been described by way of the embodiments, the present invention should not be limited to the above. For example, the following modifications are possible.
(1) The above embodiments describe the case where the signal level judgment circuit and the signal synthesis circuit are included in the signal processing unit, but the present invention is not limited to this.
The solid-state imaging device includes an image sensor 200, a signal processing unit 210, a storage 220, a timing generator 230, and a system control unit 240.
The image sensor 200 includes an imaging unit 201, a vertical scanning circuit 202, a horizontal scanning circuit 203, an amplifier 204, a signal level judgment circuit 205, and a signal synthesis circuit 206.
The signal processing unit 210 includes a frame memory 211 and a compression circuit 213.
Thus, the signal level judgment circuit and the signal synthesis circuit may be included in the image sensor 200.
(2) The above embodiments describe the use of three levels or nine levels of sensitivity, but the present invention is not limited to such.
Curves 61 to 67 each indicate output characteristics of a photoelectric converter 2 having a different rate of suppressing an amount of received light. A curve 68 indicates output characteristics when output signals of these photoelectric converters 2 are combined by signal processing. By such combining three or more electric signals, smooth output characteristics of a composite signal can be attained and the dynamic range can be greatly widened.
(3) The above embodiments describe the case where each photoelectric converter 2 has a substantially same capacity and a substantially same dopant concentration. However, this is not a limit for the present invention, which can equally be realized even when the photoelectric converters differ in capacity and dopant concentration.
Although the present invention has been fully described by way of examples with reference to the accompanying drawings, it is to be noted that various changes and modifications will be apparent to those skilled in the art.
Therefore, unless such changes and modifications depart from the scope of the present invention, they should be construed as being included therein.
Number | Date | Country | Kind |
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2006-159606 | Jun 2006 | JP | national |