Claims
- 1. A stainproof protector for preventing a mask for lithography from staining, which has a protective film made of a polymer having a fluorine-containing aliphatic cyclic structure.
- 2. The stainproof protector according to claim 1, wherein the polymer is a polymer having the cyclic structure in its main chain, obtained by cyclic polymerization.
- 3. The stainproof protector according to claim 1, wherein the polymer is a polymer having the cyclic structure in its main chain, obtained by cyclic polymerization of a monomer having two carbon-carbon multiple bonds differing in the polymerizability in its molecule.
- 4. The stainproof protector according to claim 3, wherein the monomer is the one wherein the straight chain portion of the linking chain connecting the two carbon-carbon multiple bonds has from 2 to 7 atoms.
- 5. The stainproof protector according to claim 1, wherein the polymer is a polymer having the cyclic structure in its main chain, obtained by cyclic polymerization of at least one monomer selected from the group consisting of a perfluoroallyl vinyl ether and a perfluorobutenyl vinyl ether.
- 6. The stainproof protector according to claim 1, wherein the polymer is a polymer having the cyclic structure in its main chain, obtained by radical polymerization of a cyclic monomer.
- 7. The stainproof protector according to claim 1, wherein the polymer is a polymer having the cyclic structure in its main chain, obtained by radical polymerization of perfluoro-2,2-dimethyl-1,3-dioxol.
- 8. The stainproof protector according to claim 1, wherein the polymer is a polymer having a fluorine content of at least 30% by weight.
- 9. The stainproof protector according to claim 1, wherein the polymer is a polymer containing at least 20 mol % of the cyclic structure.
- 10. The stainproof protector according to claim 1, wherein the mask is a photo mask.
- 11. The stainproof protector according to claim 1, wherein the mask is a reticule.
- 12. The stainproof protector according to claim 1, which comprises a ring-shaped frame and the protective film.
- 13. The stainproof protector according to claim 12, wherein the protective film is supported by the ring-shaped frame.
- 14. The stainproof protector according to claim 1, wherein the protective film is a laminate of a transparent synthetic resin and the polymer having a fluorine-containing aliphatic cyclic structure.
Priority Claims (1)
Number |
Date |
Country |
Kind |
1-136178 |
May 1989 |
JPX |
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Parent Case Info
This application is a continuation of application Ser. No. 07/531,166, filed on May 31, 1990, now abandoned.
US Referenced Citations (4)
Continuations (1)
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Number |
Date |
Country |
Parent |
531166 |
May 1990 |
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