Stamper, method of forming a concave/convex pattern, and method of manufacturing an information recording medium

Abstract

A stamper is formed so that a thickness between a concave/convex pattern formation surface, where a concave/convex pattern is formed, and a rear surface gradually decreases in a predetermined area of the stamper. The predetermined area corresponds to an area where pressure is likely to be concentrated when the concave/convex pattern of the stamper is used to form a concave/convex pattern on a substrate. A method of forming a concave/convex pattern uses such stamper, and a method of manufacturing an information recording medium uses a concave/convex pattern formed by such method.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

These and other objects and features of the present invention will be explained in more detail below with reference to the attached drawings, wherein:

FIG. 1 is a cross-sectional view of a stamper;

FIG. 2 is a cross-sectional view of a magnetic disk;

FIG. 3 is a cross-sectional view of an outer edge area and a rim area of the stamper;

FIG. 4 is a cross-sectional view of a stamper in a state where a resist layer has been formed thereupon and the preform has been set on a substrate attachment portion of a press and the stamper in a state where the stamper has been set on a stamper attachment portion;

FIG. 5 is a cross-sectional view of the stamper and the preform in a state where a concave/convex pattern is being pressed onto the resist layer;

FIG. 6 is a cross-sectional view of the stamper and the preform in a state where the stamper has been separated from the resist layer;

FIG. 7 is a schematic cross-sectional view of another stamper and a preform which is useful in explaining the thicknesses of various parts of the stamper;

FIG. 8 is a schematic cross-sectional view of yet another stamper and a preform which is useful in explaining the thicknesses of various parts of the stamper;

FIG. 9 is a schematic cross-sectional view of yet another stamper and a preform which is useful in explaining the thicknesses of various parts of the stamper;

FIG. 10 is a figure-substitute photograph produced by photographing the pressure distribution during imprinting when using a conventional stamper whose thickness is equal across the entire stamper;

FIG. 11 is a figure-substitute photograph produced by photographing the pressure distribution during imprinting when using the stamper shown in FIG. 8 (or the stamper shown in FIG. 9);

FIG. 12 is a schematic cross-sectional view of yet another stamper and a preform which is useful in explaining the thicknesses of various parts of the stamper;

FIG. 13 is a schematic cross-sectional view of yet another stamper and a preform which is useful in explaining the thicknesses of various parts of the stamper;

FIG. 14 is a schematic cross-sectional view of yet another stamper and a preform which is useful in explaining the thicknesses of various parts of the stamper;

FIG. 15 is a cross-sectional view of yet another stamper;

FIG. 16 is a cross-sectional view of an outer edge area and a rim area of the stamper shown in FIG. 15;

FIG. 17 is a cross-sectional view of a preform in a state where a resist layer has been formed thereupon and the preform has been set on a substrate attachment portion of a press and of a stamper and an elastic body that have been set on a stamper attachment portion;

FIG. 18 is a cross-sectional view of the stamper, the elastic body, and the preform in a state where a concave/convex pattern is being pressed onto the resist layer;

FIG. 19 is a cross-sectional view of the stamper, the elastic body, and the preform in a state where the stamper has been separated from the resist layer;

FIG. 20 is a schematic cross-sectional view of yet another stamper, an elastic body, and a preform which is useful in explaining the thicknesses of various parts of the stamper;

FIG. 21 is a schematic cross-sectional view of yet another stamper, an elastic body, and a preform which is useful in explaining the thicknesses of various parts of the stamper;

FIG. 22 is a schematic cross-sectional view of yet another stamper, an elastic body, and a preform which is useful in explaining the thicknesses of various parts of the stamper;

FIG. 23 is a figure-substitute photograph produced by photographing the pressure distribution during imprinting when using a conventional stamper whose thickness is equal across the entire stamper and an elastic body;

FIG. 24 is a schematic cross-sectional view of yet another stamper, an elastic body, and a preform which is useful in explaining the thicknesses of various parts of the stamper;

FIG. 25 is a schematic cross-sectional view of yet another stamper, an elastic body, and a preform which is useful in explaining the thicknesses of various parts of the stamper; and

FIG. 26 is a schematic cross-sectional view of yet another stamper, an elastic body, and a preform which is useful in explaining the thicknesses of various parts of the stamper.

Claims

1. A stamper formed so that a thickness between a concave/convex pattern formation surface, where a concave/convex pattern is formed, and a rear surface gradually decreases in an outer edge area of the stamper toward an outer edge side of the outer edge area.

2. A stamper that has a center hole formed in a center thereof and is formed so that a thickness between a concave/convex pattern formation surface, where a concave/convex pattern is formed, and a rear surface gradually decreases in a rim area of the center hole toward a rim side of the rim area.

3. A stamper formed so that a thickness between a concave/convex pattern formation surface, where a concave/convex pattern is formed, and a rear surface gradually decreases in at least one of a first area, which is located on an outer edge side of a predetermined area located between an outer edge and a center of the stamper, and a second area, which is located on a center side of the predetermined area, as a distance from a middle position in a radial direction of the predetermined area increases.

4. A stamper formed so that a thickness between a concave/convex pattern formation surface, where a concave/convex pattern is formed, and a rear surface gradually decreases in an outer edge area of the stamper toward a center of the stamper.

5. A stamper that has a center hole formed in a center thereof and is formed so that a thickness between a concave/convex pattern formation surface, where a concave/convex pattern is formed, and a rear surface gradually decreases in a rim area of the center hole toward an outer edge side of the rim area.

6. A stamper formed so that a thickness between a concave/convex pattern formation surface, where a concave/convex pattern is formed, and a rear surface gradually decreases in at least one of a first area, which is located on an outer edge side of a predetermined area located between an outer edge and a center of the stamper, and a second area, which is located on a center side of the predetermined area, toward a middle position in a radial direction of the predetermined area.

7. A method of forming a concave/convex pattern comprising: pressing a stamper according to claim 1 onto a resin layer formed on a substrate; andtransferring the concave/convex pattern of the stamper to the resin layer, thereby forming a concave/convex pattern on the substrate.

8. A method of forming a concave/convex pattern comprising: pressing a stamper according to claim 2 onto a resin layer formed on a substrate; andtransferring the concave/convex pattern of the stamper to the resin layer, thereby forming a concave/convex pattern on the substrate.

9. A method of forming a concave/convex pattern comprising: pressing a stamper according to claim 3 onto a resin layer formed on a substrate; andtransferring the concave/convex pattern of the stamper to the resin layer, thereby forming a concave/convex pattern on the substrate.

10. A method of forming a concave/convex pattern comprising: pressing a stamper according to claim 4 onto a resin layer formed on a substrate; andtransferring the concave/convex pattern of the stamper to the resin layer, thereby forming a concave/convex pattern on the substrate.

11. A method of forming a concave/convex pattern comprising: pressing a stamper according to claim 5 onto a resin layer formed on a substrate; andtransferring the concave/convex pattern of the stamper to the resin layer, thereby forming a concave/convex pattern on the substrate.

12. A method of forming a concave/convex pattern comprising: pressing a stamper according to claim 6 onto a resin layer formed on a substrate; andtransferring the concave/convex pattern of the stamper to the resin layer, thereby forming a concave/convex pattern on the substrate.

13. A method of manufacturing an information recording medium that manufactures an information recording medium using the concave/convex pattern formed on the substrate in accordance with a method of forming a concave/convex pattern according to claim 7.

14. A method of manufacturing an information recording medium that manufactures an information recording medium using the concave/convex pattern formed on the substrate in accordance with a method of forming a concave/convex pattern according to claim 8.

15. A method of manufacturing an information recording medium that manufactures an information recording medium using the concave/convex pattern formed on the substrate in accordance with a method of forming a concave/convex pattern according to claim 9.

16. A method of manufacturing an information recording medium that manufactures an information recording medium using the concave/convex pattern formed on the substrate in accordance with a method of forming a concave/convex pattern according to claim 10.

17. A method of manufacturing an information recording medium that manufactures an information recording medium using the concave/convex pattern formed on the substrate in accordance with a method of forming a concave/convex pattern according to claim 11.

18. A method of manufacturing an information recording medium that manufactures an information recording medium using the concave/convex pattern formed on the substrate in accordance with a method of forming a concave/convex pattern according to claim 12.