Number | Name | Date | Kind |
---|---|---|---|
4639288 | Price et al. | Jan 1987 | A |
6159823 | Song et al. | Dec 2000 | A |
6177331 | Koga | Jan 2001 | B1 |
6372602 | Mitsuiki | Apr 2002 | B1 |
6548371 | Fujimaki | Apr 2003 | B2 |
Entry |
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Scott Clark, “Chemical Etching of Silicon Nitride (Si3N4) with Hot Phosphoric Acid (H3PO4),” Bold Technologies Technical Paper (2000), pp. 1-6.* |
Nathan Cheung, Lecture notes (handout) EE 143, Lecture 15, University of California Berkeley (2000). |