Number | Name | Date | Kind |
---|---|---|---|
3873371 | Wolf | Mar 1975 | |
4801988 | Kenney | Jan 1989 | |
4918027 | Fuse et al. | Apr 1990 | |
4922313 | Tsuchiya | May 1990 | |
4969022 | Nishimoto et al. | Nov 1990 | |
5021355 | Dhong et al. | Jun 1991 | |
5041887 | Kumagai et al. | Aug 1991 | |
5047359 | Nagatomo | Sep 1991 | |
5112762 | Anderson et al. | May 1992 | |
5240874 | Roberts | Sep 1993 | |
5248894 | Beasom | Sep 1993 |
Number | Date | Country |
---|---|---|
52-72585 | Jun 1977 | JPX |
Entry |
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Soychak, F. J. et al., "Technique to Selectively Dope Semiconductor Trench Walls and Bottom," IBM Technical Disclosure Bulletin, vol. 30, No. 8, pp. 268-269, Jan. 1988. |