SUBSTRATE CARRIER HAVING AN INTERIOR LINING

Abstract

The invention provides apparatus and manufacturing methods for a liner adapted to enclose a space within a substrate carrier and further adapted to prevent gas from reaching the enclosed space. The liner may be removable from the substrate carrier. The liner may be self-supporting and/or the liner may be supported by interior walls of the substrate carrier. The liner may be adapted to absorb particles to prevent contamination of substrates stored in the substrate carrier. The liner may be an interior glass coating in a substrate carrier that prevents outgassing from the substrate carrier. Numerous other aspects are disclosed.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a side-cross-sectional view of an exemplary substrate carrier in accordance with an embodiment of the present invention.

FIG. 2 is a side-cross-sectional view of a second exemplary substrate carrier in accordance with an embodiment of the present invention.

Claims

1. A substrate carrier, comprising: a substrate carrier body, wherein the substrate carrier body defines an interior region bounded by an inner top wall, an inner bottom wall and a plurality of inner side walls;a substrate carrier door coupled to the substrate carrier body, wherein the substrate carrier door has an inner wall which further defines the interior region; anda lining along at least a portion of the inner walls of the substrate carrier body and the inner wall of the substrate carrier door adapted to prevent permeation of a gas into and out of the interior region of the substrate carrier.

2. The substrate carrier of claim 1, wherein the lining comprises at least one of silicon nitride and silicon dioxide.

3. The substrate carrier of claim 1, wherein the lining has a thickness ranging from about 1 micron to about 50 microns.

4. The substrate carrier of claim 1, wherein the lining is further adapted to prevent outgassing from the interior region of the substrate carrier.

5. The substrate carrier of claim 1, wherein the lining is further adapted to prevent transport of particles into the substrate carrier from the surrounding environment and from the interior region of the substrate carrier to the surrounding environment.

6. The substrate carrier of claim 1, wherein the lining is formed from an impermeable material.

7. The substrate carrier of claim 6, wherein the lining is a glass sheet or a glass coating.

8. The substrate carrier of claim 1, wherein the lining is formed from a dielectric material.

9. The substrate carrier of claim 1, wherein the lining is further adapted to absorb particles from the interior region of the substrate carrier or from the surrounding environment.

10. The substrate carrier of claim 9, wherein the lining is formed from a desiccant material or desiccant-like material.

11. The substrate carrier of claim 1, wherein the lining is adapted to be at least one of reconditioned, reapplied and replaced.

12. The substrate carrier of claim 1, wherein the substrate carrier is adapted to store one substrate.

13. The substrate carrier of claim 1, wherein the substrate carrier is adapted to store more than one substrate.

14. A substrate carrier lining, comprising: a top portion adapted to be positioned along an inner top wall of the substrate carrier defined by a substrate carrier body;a bottom portion adapted to be positioned along a bottom wall of the substrate carrier defined by the substrate carrier body;a plurality of side portions adapted to be positioned along corresponding inner side walls of the substrate carrier defined by the substrate carrier body; andan additional portion adapted to be positioned along an inner wall of a door of the substrate carrier;wherein the portions of the lining are adapted to prevent permeation of a gas into and out of the interior region of the substrate carrier.

15. The substrate carrier lining of claim 14, wherein one or more of the portions of the lining comprise at least one of silicon nitride and silicon dioxide.

16. The substrate carrier lining of claim 14, wherein one or more of the portions of the lining have a thickness ranging from about 1 micron to about 50 microns.

17. The substrate carrier lining of claim 14 wherein one or more of the portions of the lining are further adapted to prevent outgassing from the interior region of the substrate carrier.

18. The substrate carrier lining of claim 14 wherein one or more of the portions of the lining are further adapted to prevent transport of particles into the substrate carrier from the surrounding environment and from the interior region of the substrate to the surrounding environment.

19. The substrate carrier lining of claim 14 wherein one or more of the portions of the lining are formed from an impermeable material.

20. The substrate carrier lining of claim 19 wherein one or more of the portions of the lining are glass sheets or glass coatings.

21. The substrate carrier lining of claim 14 wherein one or more of the portions of the lining are formed from a dielectric material.

22. The substrate carrier lining of claim 14 wherein one or more of the portions of the lining are further adapted to absorb particles from the interior region of the substrate carrier or from the surrounding environment.

23. The substrate carrier lining of claim 22 wherein one or more of the portions of the lining are formed from a desiccant material or desiccant-like material.

24. The substrate carrier lining of claim 14 wherein one or more of the portions of the lining are adapted to be at least one of reconditioned, reapplied and replaced.

25. A method of manufacturing a substrate carrier, comprising: forming a substrate carrier body, wherein the substrate carrier body defines an interior region bounded by an inner top wall, an inner bottom wall and a plurality of inner side walls;forming a substrate carrier door, wherein the substrate carrier door has an inner wall which further defines the interior region; andforming a lining along at least a portion of the inner walls of the substrate carrier body and the inner wall of the substrate carrier door;wherein the lining is adapted to prevent permeation of a gas into and out of the interior region of the substrate carrier.

26. The method of claim 25 wherein forming the substrate carrier body includes forming the substrate carrier body from a cheaper or more manufacturable material than that employed for a conventional substrate carrier body.

27. The method of claim 25 wherein forming the lining along at least a portion of the inner walls of the substrate carrier body and the inner wall of the substrate carrier door includes gluing, spraying or vapor depositing the lining along at least a portion of the inner walls of the substrate carrier body and the inner wall of the substrate carrier door.

28. An apparatus comprising: a substrate carrier; anda liner adapted to enclose a space within the substrate carrier and further adapted to prevent gas from reaching the enclosed space.

29. The apparatus of claim 28 wherein the liner is removable from the substrate carrier.

30. The apparatus of claim 28 wherein the liner is self-supporting.

31. The apparatus of claim 28 wherein the liner is supported by interior walls of the substrate carrier.

32. The apparatus of claim 28 wherein the liner is adapted to absorb particles to prevent contamination of substrates stored in the substrate carrier.