Number | Name | Date | Kind |
---|---|---|---|
4357183 | Fan et al. | Nov 1982 | |
4529455 | Bean et al. | Jul 1985 | |
4806996 | Luryi | Feb 1989 | |
4861393 | Bean et al. | Aug 1989 | |
4891329 | Reisman et al. | Jan 1990 | |
4994867 | Biegelsen | Feb 1991 | |
5013681 | Godbey et al. | May 1991 | |
5218213 | Gaul et al. | Jun 1993 |
Entry |
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J. Cuomo et al., "Method of Making Unstrained Thin Films" Feb. 1973 IBM TDB vol. 15, No. 9 pp. 2698-2699. |
T. B. Light et al., "Stress-Free Hetero-Epitaxial Layers" Feb. 1970 IBM TDB vol. 12, No. 9 p. 1496. |
M. Berkenblit, 4et al., "Reduction of Stress In Single Crystal Hetero-Epitaxial Layers" Feb. 1970 IBM TDB vol. 12, No. 9, p. 1489. |
Anonoymously "Thin Film Wafer-Bonded Silicon-on-Insulator" Dec. 1991 Research Disclosure vol. 969 No. 33277. |