The present invention relates to a substrate holder and a plating apparatus provided with the substrate holder.
The present application claims priority from Japanese patent application JP2019-28126 filed on Feb. 20, 2019. The all disclosures including the specification, claims, drawings, and abstract are incorporated by reference in its entirety into this application.
A substrate holder for holding a substrate has been used in treatment such as plating treatment. The substrate holder exposes at least a part of the substrate on at least one of surfaces via an opening. A seal provided for the substrate holder separates an exposed part of the substrate from the other part. Typically, as disclosed in PTL 1 (see especially FIG. 15), the seal including a seal lip is pressed in a direction perpendicular to a substrate surface.
PTL 1: Japanese Patent Laid-Open No. 2018-040045
When the seal is pressed in the direction perpendicular to the substrate surface depending on a shape, the seal lip may decline toward the center of the opening (to the left side as shown in FIG. 15 of PTL1). Declining toward the center of the opening, the seal lip pushes the substrate toward the center of the opening. Generally, the seal is disposed over entire circumference of the opening. Accordingly, the substrate receives the force directed toward the center of the opening from substantially all directions.
The force received by the highly rigid substrate from the seal is substantially negligible. In the recent years, various types of the substrates are used. Rigidity of the substrate may be deteriorated depending on its thickness, size, material and the like. When the substrate with low rigidity is used, the substrate may be bent or damaged owing to the declining of seal lip.
It is an object of the present invention to solve at least a part of the above-described problems.
An embodiment according to the present invention discloses a substrate holder with an opening for exposing at least a part of a substrate on at least one of surfaces. The substrate holder includes a seal which comes in contact with a surface including the part of the substrate to be exposed, and is pressed in a direction perpendicular to a plane on which the substrate is to be positioned, and a seal support which has a seal support surface for supporting the seal, and is disposed on an outer circumference of the opening. The seal includes a seal body which comes in contact with the seal support surface, and a seal lip which extends from the seal body to come in contact with the surface of the substrate to be exposed. At least a part of the seal support surface has an inclination angle which allows an inner end of the seal support surface to approach the plane on which the substrate is to be positioned. The inner end of the seal support surface is positioned on an inner side than the seal lip.
<Plating Apparatus>
The load port 110 is disposed for loading the substrate on the plating apparatus 100, and unloading the substrate therefrom. The load port 110 may be configured to dispose the mechanism such as FOUP, or allow the substrate to be transferred to/from the mechanism such as FOUP.
The substrate loaded by the load port 110 is transferred by the transfer robot 120. The transfer robot 120 is configured to be allowed to transfer the substrate to/from the load port 110, the drier 130, and the attachment/detachment unit 140. It is possible to use any other transfer mechanism besides the transfer robot 120. The description “transfer the substrate to the load port 110” in the specification involves “transfer the substrate to the mechanism such as FOUP disposed on the load port 110”. The drier 130 is a member for drying the substrate.
The attachment/detachment unit 140 serves to attach the substrate to the substrate holder and/or detach the substrate therefrom. The attachment/detachment unit 140 has to be configured to accommodate both the substrate and the substrate holder which have been transferred. The attachment/detachment unit 140 is disposed at the position accessible for both the transfer robot 120 and the transporter 160.
The plating module 150 is disposed for executing the plating process (plating treatment) to the substrate. The plating module 150 includes one or more processing tanks. At least one of the processing tanks is a plating tank. For example, the plating module 150 as shown in
The transporter 160 is configured to transfer the substrate holder to/from the attachment/detachment unit 140, the plating module 150, and the stocker 170. The transporter 160 is configured to transfer the substrate holder among the respective processing tanks (the pre-washing tank 151 to the blow tank 158). The transporter 160 includes a transporter arm 161 for suspending the substrate holder, an arm vertical moving mechanism 162 for moving the transporter arm 161 up and down, and a horizontal moving mechanism 163 for horizontally moving the arm vertical moving mechanism 162 along the row of the processing tanks. The horizontal moving mechanism 163 may be expressed as the mechanism for horizontally moving the transporter arm 161. It is to be understood that the transporter 160 is configured as an exemplified case.
The stocker 170 is configured to be allowed to store at least one substrate holder, or preferably, multiple substrate holders. Preferably, the substrate holder that does not hold the substrate is stored in the stocker 170. The substrate holder that holds the substrate may be stored in the stocker 170. The transporter 160 may be configured to transfer the substrate holder to/from the stocker 170.
<Single-Sided Holder>
A substrate mount 212 for placement of the substrate is formed in substantially the center of the first holding member 210. A plurality of clampers 213 are disposed on an outer circumference of the substrate mount 212. The clamper 213 is formed to have an inwardly protruding inverted L-like shape. In the specification, the direction separating from the center of an opening 220OP in the plane parallel to the plane on which the substrate is to be positioned (plane where the substrate mount 212 is positioned in the example as shown in
A pair of handles 214 are disposed at both ends of the first holding member 210. The handle 214 may be provided with an electrode (not shown). The electrode of the handle 214 is electrically connected to the substrate via a conductive path in the substrate holder 200. The electric current required for the plating treatment is supplied from outside of the substrate holder 200 (for example, from the plating apparatus 100).
The substrate is inserted between the substrate mount 212 and the second holding member 220. The second holding member 220 may be attached to the first holding member 210 openably/closably, for example. In an example, the second holding member 220 as shown in
The second holding member 220 has the opening 220OP for exposing a part to be plated on the substrate. The second holding member 220 includes a base 221 fixed to the hinge 211, and a body 222 fixed to the base 221. The body 222 has a seal (see
<Double-Sided Holder>
Unlike the structure as shown in
The substrate holder 200 as shown in
The clamper 213 as shown in
<Substrate Seal>
The substrate holder 200 as shown in
The substrate seal 400 is attached to the first holding member 210 and/or the second holding member 220. When using the substrate holder 200 as shown in
A seal support 430 having a seal support surface 431 is disposed on an outer circumference of the opening 210OP and/or the opening 220OP. The substrate seal 400 is supported with the (seal support surface 431 of) seal support 430. Preferably, the substrate seal 400 is configured not to protrude toward the opening 210OP or the opening 220OP so that the region to be exposed on a substrate WF is enlarged as wide as possible. The typical substrate seal 400 includes a seal body 401 and a seal lip 402. The seal body 401 constitutes a part in contact with the seal support surface 431. The seal lip 402 is a part in contact with the substrate WF. The seal lip 402 extends from the seal body 401, typically, from an inner end of the seal body 401. The seal lip 402 is formed to be smaller (may be expressed as “thinner” or “narrower”) than the seal body 401 to facilitate a securing of seal pressure.
In an example, the (seal body 401 of) substrate seal 400 is partially attached to a mount 410 disposed to the first holding member 210 and/or the second holding member 220. The mount 410 serves to attach the substrate seal 400 to a predetermined position. The mount 410 in this example is a groove with which the substrate seal 400 is partially fitted. Accordingly, in an example, the “mount” may be referred to as a “mount groove”. The mount may be formed of other than the groove. Besides the fitting, insertion (tightening) using 2 or more members, and adhesion may be carried out as the mount method. The specific structure of the mount 410 may be appropriately determined. The above-configured mount allows attachment of the substrate seal 400 to the first holding member 210 and/or the second holding member 220. In an example, the mount 410 is disposed at an outer end of the seal support 430. The structure of the mount 410 is not limited to the one as described or illustrated. Additionally or alternatively, the substrate holder 200 may be provided with a seal holder 420 for holding the substrate seal 400.
If the substrate holder 200 is the single-sided holder (see
As the second holding member 220 is pressed against the first holding member 210 (or the first holding member 210 is pressed against the second holding member 220), the substrate seal 400 is pressed in the direction perpendicular to the plane on which the substrate WF is to be positioned. The description “pressing the substrate seal 400 in the direction perpendicular to the plane on which the substrate WF is to be positioned” represents that “the force received by the substrate seal 400 includes at least the component of the direction perpendicular to the plane on which the substrate WF is to be positioned”. Specifically, the (seal support surface 431 of) seal support 430 transmits the pressing force to the substrate seal 400.
<Declining of Seal Lip>
As the seal lip 402 declines inward, the substrate WF receives the force directed inward (arrow direction in
Assuming that the substrate holder 200 is the single-sided holder, when the substrate holder 200 is immersed in the plating solution, the substrate WF receives water pressure from one direction. As the substrate WF is pressed against the substrate mount 212 under the water pressure, bending of the substrate WF may be offset. Assuming that the substrate holder 200 is the double-sided holder, the substrate WF receives water pressure from the upper and the lower surfaces. Accordingly, the use of the double-sided holder cannot offset bending of the substrate WF. In view of the above-described circumstances, the problem caused by the declining of seal lip becomes conspicuous especially when the substrate holder 200 is the double-sided holder. Even if the substrate holder 200 is the single-sided holder, bending of the substrate WF cannot be necessarily offset completely. Even if the bending of the substrate WF is completely offset, the substrate WF may still be damaged under the force applied from the substrate seal 400. Therefore, even if the substrate holder 200 is the single-sided holder, the problem caused by the declining of seal lip 402 still exists.
<Inclination of Seal Support Surface>
Preferably, the inclination angle of the seal support surface 431 corresponds to the angle at which the seal lip 402 declines outward when the substrate seal 400 is pressed. When the seal lip 402 declines outward, the substrate WF receives the force directed outward. The force directed outward becomes the one directed to pull the substrate WF. The substrate WF, thus, hardly bends. In another example, the inclination angle of the seal support surface 431 is determined so that the seal lip 402 does not decline inward or outward when the substrate seal 400 is pressed. This example is effective in that the force directed either inward or outward is hardly applied to the substrate WF. Meanwhile, as described above, the substrate seal 400 is formed as the elastic body, and accordingly is likely to be easily deformed. Even if the inclination angle is designed to prevent declining of the seal lip 402, the seal lip 402 may actually decline either inward or outward. In another example, the inclination angle of the seal support surface 431 may be determined so that the seal lip 402 declines inward. If the seal lip 402 inclines inward, it is difficult to completely exclude the possibility that the substrate WF bends. If the seal support 430 has the inclination angle as shown in
In an example, the inclination angle of at least a part of the seal support surface 431, for example, the inclination angle of a second section 900S to be described later may be equal to or larger than 5°, and equal to or smaller than 20°. If the seal support surface 431 is parallel to the plane on which the substrate WF is to be positioned, the inclination angle of the seal support surface 431 is assumed to be 0°.
Changing the shape of the substrate seal 400 may prevent inward declining of the seal lip 402 to be described later. Generally, however, the substrate seal 400 is formed through such techniques as molding and injection molding. It may be technically or financially difficult to form the substrate seal 400 to have the complicated shape. Meanwhile, it may be easier to incline the seal support surface 431 than change the shape of the substrate seal 400.
Referring to the example as shown in
<Structure Having Substrate Seal Provided with Protrusion>
As
The substrate holder 200 may be configured to have the protrusion 800, if any, positioned on the inner side than a leading end of the seal lip 402. The term “the leading end of the seal lip 402” refers to the part of the seal lip 402, which is expected to come in first contact with the substrate WF. The protrusion 800 protrudes from the seal body 401. Therefore, the pressing force from the seal support 430 is transmitted to the substrate seal 400 mainly via the protrusion 800. A transmission point of the pressing force on the inner side than the leading end of the seal lip 402 may be effective in promoting outward declining of the seal lip 402.
<Difference in Inclination Angle Between a First Section and a Second Section>
Each of the opening 210OP and/or 220OP (to be simply referred to as “opening” with no codes) of the substrate holder 200 according to the embodiment has a polygonal shape (see, for example
The polygonal opening includes angular sections and side sections. The term “side section” as used herein may have the length equal to or longer than 80%, and equal to or shorter than 95% of the length of the side of the substrate to be held. The term “angular section” as used herein may be the part except the “side section”, or the part except the “side section” and the “transition section” to be described later. If each length of the sides of the substrate is different from one another, each of the “side sections” of the opening may have the different length. The explanation as described above is a mere example. The criterion with respect to each length of the “angular section” and the “side section”, or differentiation therebetween may be determined by factors to be described later, for example, the declining amount of the seal lip 402 and/or distortion of the substrate holder 200.
As described above, the seal support 430 and the seal support surface 431 are formed on the outer circumference of the opening. Therefore, if the opening has the polygonal shape, each of the seal support 430 and the seal support surface 431 has substantially the polygonal shape as seen from the direction perpendicular to the plane on which the substrate WF is to be positioned. As a result, the substrate seal 400 attached to the substrate holder 200 also has the polygonal shape. The substrate seal 400 as the elastic body cannot necessarily keep the polygonal shape after it is detached from the substrate holder 200.
If the opening has the polygonal shape, the inward declining amount of the seal lip 402 at the angular section is thought to be small or zero in the extreme case. As described above, if the opening has the polygonal shape, the substrate seal 400 may have the polygonal shape. When the seal lip 402 on one of the sides in contact with the angle is about to decline inward around the angular section, interference with the seal lip 402 on the other side may occur. Therefore, declining of the seal lip 402 at the angular section of the opening does not have to be regarded as being of importance, and may be negligible in the extreme case.
<Transition Section>
If the inclination angle of the first section 900C is different from the inclination angle of the second section 900S, a stepped portion is generated at the boundary between the first section 900C and the second section 900S. When the stepped portion exists, it may be difficult to exhibit sufficient seal performance. The seal support 430 and the seal support surface 431 of the embodiment include a transition section 900T (third section 900T) for connecting the first section 900C and the second section 900S. The transition section 900T has its inclination angle gradually changed so as not to generate the stepped portion at the boundary between the first section 900C and the transition section 900T, and the boundary between the second section 900S and the transition section 900T. In other words, the inclination angle of the transition section 900T gradually changes so that the first section 900C and the second section 900S are smoothly connected. The transition section 900T may have its length equal to or longer than 10 mm, and equal to or shorter than 50 mm, for example.
<Distance Between Inner End of Seal Support Surface and Mount>
In association with the positional difference in the inclination angle of the seal support surface 431, the contact position between the seal lip 402 and the substrate WF may vary. If the inclination angle is 0° (see
In the embodiment, the distance L1 is longer than the distance L2. The distance L1 herein refers to the distance between the inner end of the seal support surface 431 in the first section 900C projected to the plane on which the substrate is to be positioned, and the mount 410. The distance L2 herein refers to the distance between the inner end of the seal support surface 431 in the second section 900S projected to the plane on which the substrate is to be positioned, and the mount 410. The side section of the opening (inner end of the seal support surface 431) linearly extends from the first section 900C to the second section 900S in a plan view of the plane on which the substrate is to be positioned (consequently, the part of the substrate to be exposed is formed into a square shape or a rectangular shape, for example). Meanwhile, compared with the second section 900S, in the first section 900C, the mount is directed into the inner side of the opening. The shorter the distance between the inner end of the seal support surface 431 and the mount 410 becomes, the closer the seal lip 402 is positioned to the inner side (close to the opening). As the distance from the mount 410 to the opening is changed in accordance with the inclination angle, the change in the position of the seal lip 402 owing to inclination of the seal support surface 431 may be compensated for. That is, in spite of using the seal having each cross section of the angular section and the side section kept uniform, it is possible to linearize or substantially linearize the position at which the seal lip 402 of the seal comes in contact with the substrate WF between the angular section and the side section. The term “compensate for” as used herein is not limited to “complete compensation”. The mount 410 of the transition section 900T may be configured to smoothly connect the mount 410 of the first section 900C with the mount 410 of the second section 900S. If the side section of the opening is non-linear, it may be preferable to make the distance L1 equivalent to the distance L2, or the distance L1 shorter than the distance L2.
<Distortion of Substrate Holder 200>
In the explanation that has been made, most members other than the substrate seal 400 are ideal rigid bodies so that no distortion occurs in the substrate holder 200. Actually, however, the ideal rigid body never exists at the time when the application has been made. Therefore, distortion may occur in the actual substrate holder 200.
The first holding member 210 and the second holding member 220 are fixed by the clampers 213 while being pressed to each other. In the case of the typical substrate holder 200, the substrate seal 400 exists at a position far from the clamper 213. From a different point of view, in the typical substrate holder 200, the substrate WF presses the first holding member 210 and the second holding member 220 via the substrate seal 400. This may distort the substrate holder 200 so that the first holding member 210 is separated from the second holding member 220. Upon distortion of the substrate holder 200, the distance between the seal support surface 431 and the substrate WF becomes longer. As a result, the crushing amount (crushing margin) of the seal lip 402 may be reduced. The term “distance between the seal support surface 431 and the substrate WF” herein refers to the distance in the direction perpendicular to the surface of the substrate WF.
In an example,
As the graph at the right side of
The substrate holder 200 according to the embodiment is configured to compensate for the change in the crushing amount of the seal lip 402, which has been caused by distortion of the substrate holder 200. As seen from the comparison between the structures as shown in
Considering that the crushing amount of the seal lip 402 on the side section of the opening is likely to become small, the inclination angle of the seal support surface 431 at the second section 900S may be set to a large value. In this case, however, the crushing amount of the seal lip 402 on the side section of the opening is not necessarily made constantly small. Distribution of the crushing amount of the seal lip 402 is variable under various conditions, for example, rigidity of each component of the substrate holder 200, the seal pressure applied by the substrate seal 400, positions and the number of the clampers 213, and clamping strength. The distribution of the inclination angle of the seal support surface 431 may be determined in accordance with the distribution of the crushing amount of the seal lip 402. The declining direction of the seal lip 402 may be considered when determining the distribution of the inclination angle of the seal support surface 431.
<Seal Shape for Declining Prevention and Compensation of Change in Crushing Amount>
The explanation has been made on the structure in which the inclination angle of the seal support surface 431 serves to prevent declining of the seal lip 402, and/or compensate for the change in the crushing amount of the seal lip 402. Hereinafter, the explanation will be made on the structure in which the shape of the substrate seal 400 serves to prevent declining of the seal lip 402 and/or compensate for the change in the crushing amount of the seal lip 402.
As described above, the seal lip 402 is unlikely to decline around the angular section of the opening. Meanwhile, the seal lip 402 is likely to decline around the side section of the opening. In the embodiment, an extending direction of the seal lip 402 varies depending on the position.
Furthermore, as described above, the crushing amount of the seal lip 402 around the side section of the opening is likely to be smaller than the crushing amount of the seal lip 402 around the angular section of the opening. Accordingly, in the embodiment, the height of the seal lip 402 differs in accordance with the position.
As
Embodiments of the present invention have been described. The embodiments are not intended to restrict the present invention, but to facilitate understanding of the invention. The present invention may be modified and improved as well as have the equivalents without departing from the scope of the invention. It is also possible to combine the respective components described in the claims and the specification arbitrarily or omit them so long as the problem as described above is at least partially solved, or the resultant effect is at least partially obtained. For example, it is possible to combine the embodiment as described referring to
An embodiment according to the present application discloses a substrate holder including an opening for exposing at least a part of a substrate on at least one of surfaces. The substrate holder includes a seal which comes in contact with a surface including the part of the substrate to be exposed, and is pressed in a direction perpendicular to a plane on which the substrate is to be positioned, and a seal support which has a seal support surface for supporting the seal, and is disposed on an outer circumference of the opening. The seal includes a seal body which comes in contact with the seal support surface, and a seal lip which extends from the seal body to come in contact with the surface of the substrate to be exposed. At least a part of the seal support surface has an inclination angle which allows an inner end of the seal support surface to approach the plane on which the substrate is to be positioned. The inner end of the seal support surface is positioned on an inner side than the seal lip. In an embodiment, the seal lip extends from the inner end of the seal body.
The substrate holder as an example provides an effect of preventing inward declining of the seal lip.
In the substrate holder as an embodiment according to the present application, the inclination angle of the seal support surface is an angle at which the seal lip bends outward when the seal is pressed in the direction perpendicular to the plane on which the substrate is to be positioned.
The substrate holder as an, example provides the effect of securely preventing inward declining of the seal lip.
An embodiment according to the present application discloses the substrate holder configured to have the inclination angle of at least a part of the seal support surface equal to or larger than 5°, and equal to or smaller than 20°.
The disclosure clarifies an example of the inclination angle of the seal support surface.
An embodiment according to the present application discloses the substrate holder. In the substrate holder, the opening has a polygonal shape, the seal support surface includes a first section corresponding to an angular section of the opening, and a second section corresponding to a side section of the opening, and the seal support surface is formed to have an inclination angle of the first section smaller than an inclination angle of the second section.
The substrate holder as an example provides the effect of preventing the inward declining of the seal lip especially at the second section (the section corresponding to the side section of the opening).
An embodiment according to the present application discloses the substrate holder, in which the inclination angle of the first section is 0°.
The disclosure clarifies an example of the inclination angle of the first section.
An embodiment according to the present application discloses the substrate holder in which the seal support surface includes a transition section having its inclination angle gradually varied for connecting the first section and the second section.
The substrate holder as an example provides an effect of preventing generation of the stepped portion in a boundary between the first section and the second section.
An embodiment according to the present application discloses the substrate holder in which the side section has a length equal to or longer than 80%, and equal to or shorter than 95% of a length of a side of the substrate to be held.
The disclosure clarifies an example of the length of the side section.
An embodiment according to the present application discloses the substrate holder which includes a mount for attaching the seal to a predetermined position. The side section is linearly formed in a plan view of the plane on which the substrate is to be positioned. A distance between the inner end of the seal support surface on the first section and the mount in a plan view of the plane on which the substrate is to be positioned is longer than a distance between the inner end of the seal support surface on the second section and the mount in a plan view of the plane on which the substrate is to be positioned.
The substrate holder as an example provides an effect of compensating for change in the position of the seal lip owing to the inclined seal support surface.
An embodiment according to the present application discloses the substrate holder, in which the seal has a protrusion which is formed on a part of the seal body in contact with the seal support surface, and positioned to confront a counterforce received by the seal lip from the substrate. In an embodiment, the protrusion is formed around an inner edge of a part of the seal body in contact with the seal support surface.
The substrate holder as an example provides an effect of securely preventing an outflow of a fluid.
An embodiment according to the present application discloses the substrate holder which includes a polygonal opening for exposing at least a part of a substrate on at least one of surfaces. The substrate holder includes a seal which comes in contact with a surface that includes the part of the substrate to be exposed, and is pressed in a direction perpendicular to a plane of the substrate, and a seal support disposed on an outer circumference of the opening. The seal includes a seal body which comes in contact with the seal support surface, and a seal lip which extends from the seal body to come in contact with the surface of the substrate to be exposed. In the embodiment, (a) the seal lip around a side section of the opening extends to an outer side than the seal lip around an angular section of the opening, or (b) the seal lip on the side section of the opening is higher than the seal lip on the angular section of the opening. In an embodiment, the seal lip extends from an inner end of the seal body.
The substrate holder as an example provides effects that the seal structure serves to prevent declining of the seal lip and/or compensate for change in the crushing amount of the seal lip without being affected by inclination angle of the seal support surface.
An embodiment according to the present application discloses the substrate holder. In the substrate holder, the seal support includes a seal support surface, at least a part of the seal support surface has an inclination angle which allows an inner end of the seal support surface to approach the plane on which the substrate is to be positioned, and the inner end of the seal support surface is positioned on an inner side than the seal lip.
The disclosure clarifies that both the inclination angle of the seal support surface and the seal structure serve to prevent declining of the seal lip and/or compensate for change in the crushing amount of the seal lip.
An embodiment according to the present application discloses a plating apparatus which includes the substrate holder as any one of those described in the specification, and at least one plating tank.
The disclosure clarifies the apparatus to which the substrate holder is applied.
Number | Date | Country | Kind |
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JP2019/028126 | Feb 2019 | JP | national |
Number | Name | Date | Kind |
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6645356 | Woodruff | Nov 2003 | B1 |
6939448 | Batz, Jr. | Sep 2005 | B2 |
20030010641 | Kholodenko | Jan 2003 | A1 |
20130306465 | Zimmerman | Nov 2013 | A1 |
20160108539 | Yahagi | Apr 2016 | A1 |
20170009369 | Berke | Jan 2017 | A1 |
Number | Date | Country |
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2018-040045 | Mar 2018 | JP |
Number | Date | Country | |
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20200263316 A1 | Aug 2020 | US |