Patent Application
20230311342
The present invention relates to a substrate holding hand and a substrate conveying robot, and relates to a substrate holding hand and a substrate conveying robot each including a movable support unit and a movable pressing unit.
Conventionally, a substrate holding hand including a movable support unit and a movable pressing unit is known. Such a hand is disclosed in Japanese Patent Laid-Open No. 2013-069914, for example.
Japanese Patent Laid-Open No. 2013-069914 discloses a substrate conveying hand (substrate holding hand) to convey a substrate. This substrate conveying hand includes a movable support unit including a base end side support that moves back and forth to support the substrate, and a movable pressing unit including a pressing portion that moves back and forth to press the substrate.
Although not described in Japanese Patent Laid-Open No. 2013-069914, in a conventional substrate conveying hand as described in Japanese Patent Laid-Open No. 2013-069914, a movable support unit and a movable pressing unit are separately positioned. In this case, separate positioners are required for the movable support unit and the movable pressing unit, and it is difficult to simplify the structure of the positioners. Furthermore, positioning of the movable support unit and the movable pressing unit is burdensome, and thus it is also difficult to easily assemble the substrate conveying hand (substrate holding hand).
The present invention aims to provide a substrate holding hand allowing the structure of a positioner to be simplified and capable of being easily assembled, and a substrate conveying robot including the substrate holding hand.
A substrate holding hand according to a first aspect of the present invention includes a blade including a support to support a substrate, a movable support unit that moves back and forth to support the substrate, a movable pressing unit that moves back and forth to press the substrate, and a positioner to position the movable support unit and the movable pressing unit in common.
A substrate conveying robot according to a second aspect of the present invention includes a substrate holding hand and an arm to move the substrate holding hand. The substrate holding hand includes a blade including a support to support a substrate, a movable support unit that moves back and forth to support the substrate, a movable pressing unit that moves back and forth to press the substrate, and a positioner to position the movable support unit and the movable pressing unit in common.
According to the present invention, as described above, the positioner is provided to position the movable support unit and the movable pressing unit in common such that it is possible to simplify the structure of the positioner, and it is possible to save time and effort in positioning the movable support unit and the movable pressing unit as compared with a case in which the movable support unit and the movable pressing unit are separately positioned. Thus, it is possible to easily assemble the substrate holding hand. Furthermore, even when the movable support unit and the movable pressing unit are removed for maintenance of the substrate holding hand, the movable support unit and the movable pressing unit can be easily reattached (assembled), and thus the substrate holding hand can be easily maintained.
An embodiment embodying the present invention is hereinafter described on the basis of the drawings.
The configuration of a substrate conveying robot 100 according to this embodiment is now described with reference to
As shown in
According to this embodiment, as described above, the positioner 35 is provided to position the movable support unit 32 and the movable pressing units 33 and 34 in common such that it is possible to simplify the structure of the positioner 35, and it is possible to save time and effort in positioning the movable support unit 32 and the movable pressing units 33 and 34 as compared with a case in which the movable support unit 32 and the movable pressing units 33 and 34 are separately positioned. Thus, it is possible to easily assemble the substrate holding hand 1. Furthermore, even when the movable support unit 32 and the movable pressing units 33 and 34 are removed for maintenance of the substrate holding hand 1, the movable support unit 32 and the movable pressing units 33 and 34 can be easily attached (assembled), and thus the substrate holding hand 1 can be easily maintained.
The substrate holding hand 1 includes a plurality of (four) blades 31, the movable support unit 32, the movable pressing units 33 and 34, and the positioner 35, as shown in
As shown in
The positioning pins 35a extend in a direction (Z direction) perpendicular to the main surfaces 31c of the blades 31. The positioning pins 35a are inserted into the pin insertion holes 321, 322, 331, 332, 341, and 342 of the positioned portions 32a, 33a, and 34a while the movable support unit 32 and the movable pressing units 33 and 34 are aligned in the direction (Z direction) perpendicular to the main surfaces 31c of the blades 31 such that the movable support unit 32 and the movable pressing units 33 and 34 are positioned in common by the positioning pins 35a.
The movable support unit 32 includes support members 32b to support the substrates W. The movable pressing units 33 and 34 include pressing members 33b and 34b to press the substrates W, respectively. As viewed in the direction (Z direction) perpendicular to the main surfaces 31c of the blades 31, the support members 32b and the pressing members 33b and 34b do not overlap each other, but the positioned portion 32a of the movable support unit 32 including the pin insertion holes 321 and 322, the positioned portion 33a of the movable pressing unit 33 including the pin insertion holes 331 and 332, and the positioned portion 34a of the movable pressing unit 34 including the pin insertion holes 341 and 342 overlap each other.
The support members 32b include pairs of support members 32b. The pressing members 33b and 34b include a pair of pressing members 33b and a pair of pressing members 34b, respectively. The pairs of support members 32b, the pair of pressing members 33b, and the pair of pressing members 34b are arranged at positions symmetrical with respect to a centerline L1 extending in a direction (Y direction) in which the movable support unit 32 and the movable pressing units 33 and 34 move back and forth, as viewed in the direction (Z direction) perpendicular to the main surfaces 31c of the blades 31. The pin insertion holes 321, 322, 331, 332, 341, and 342 are arranged on one side (X1 direction side) with respect to the centerline L1, as viewed in the direction (Z direction) perpendicular to the main surfaces 31c of the blades 31.
The positioning pins 35a include a pair of positioning pins 35a. The pin insertion holes include a pair of pin insertion holes 321 and 322 (331 and 332, 341 and 342) corresponding to the pair of positioning pins 35a. One (322, 332, 342) of the pair of pin insertion holes 321 and 322 (331 and 332, 341 and 342) has an elongated hole shape. Specifically, the pin insertion hole 322 (332, 342) has an elongated hole shape having a longitudinal direction in a direction (X direction) perpendicular to the direction (Y direction) in which the movable support unit 32 and the movable pressing units 33 and 34 move back and forth, as viewed in the direction (Z direction) perpendicular to the main surfaces 31c of the blades 31. Furthermore, the pin insertion hole 321 (331, 341) has a substantially circular shape, as viewed in the direction (Z direction) perpendicular to the main surfaces 31c of the blades 31.
The substrate holding hand 1 further includes fixing members 36 to fix, in common, the movable support unit 32 and the movable pressing units 33 and 34 that have been positioned in common by the positioner 35.
The positioned portion 32a of the movable support unit 32 includes the pin insertion holes 321 and 322 and fixing member insertion holes 323 into which the fixing members 36 can be inserted. The positioned portion 33a of the movable pressing unit 33 includes the pin insertion holes 331 and 332 and fixing member insertion holes 333 into which the fixing members 36 can be inserted. The positioned portion 34a of the movable pressing unit 34 includes the pin insertion holes 341 and 342 and fixing member insertion holes 343 into which the fixing members 36 can be inserted. The pin insertion holes 321 and 322 (331 and 332, 341 and 342) and the fixing member insertion holes 323 (333, 343) of the positioned portion 32a (33a, 34a) are arranged adjacent to each other in the direction (Y direction) in which the movable support unit 32 and the movable pressing units 33 and 34 move back and forth.
As shown in
The front supports 311 and the movable support unit 32 support the processed (washed) substrates W. The front supports 311 and the rear supports 312 support the substrates W prior to processing (washing). The first movable pressing unit 33 presses the processed (washed) substrates W supported by the front supports 311 and the movable support unit 32. The second movable pressing unit 34 presses the substrates W prior to processing (washing) supported by the front supports 311 and the rear supports 312. The first movable pressing unit 33 and the second movable pressing unit 34 are used properly for the substrates W prior to processing (washing) and the processed (washed) substrates W.
As shown in
The substrate conveying robot 100 further includes the base 5 to which the arm 2 is attached, and an arm elevating mechanism 6 to which the base 5 is attached. A first end of the base 5 is connected to the first end of the first arm 2a, and a second end of the base 5 is connected to the arm elevating mechanism 6. The arm elevating mechanism 6 moves the arm 2 up and down by moving the base 5 up and down. The arm elevating mechanism 6 includes a servomotor corresponding to a drive source for up-down drive, a rotational position sensor that detects the rotational position of an output shaft of the servomotor, and a power transmission mechanism that transmits the output of the servomotor to the base 5 (arm 2).
As shown in
As shown in
As shown in
The pair of front supports 311 and the pair of rear supports 312 are provided on the main surface 31c of each blade 31. The support surfaces of the pair of front supports 311 and the pair of rear supports 312 support the rear surface (the surface on the Z2 direction side) of the outer peripheral edge of a substantially circular substrate W from below.
As shown in
The support members 32b include the pairs of support members 32b aligned in the X direction. The pairs of support members 32b corresponding to the number (four sets) of blades 31 are aligned in the direction (Z direction) perpendicular to the main surfaces 31c of the blades 31. The pairs of support members 32b have support surfaces at heights substantially the same as the heights of the upper (Z1 direction side) support surfaces of pairs of front supports 311. Each support surface of the pairs of support members 32b supports the rear surface (the surface on the Z2 direction side) of the outer peripheral edge of the substantially circular substrate W from below. The air cylinder 32c includes a rod 324 that moves back and forth in the Y direction. The rod 324 of the air cylinder 32c is connected to the base end of the mount 32d. The mount 32d has a shape in which the tip end side (Y1 direction side) is bifurcated. In the mount 32d, the pairs of support members 32b are distributed to the bifurcated portions.
The first movable pressing unit 33 includes the pressing members 33b, an air cylinder 33c corresponding to an actuator that moves the pressing members 33b back and forth in the Y direction, and a mount 33d to which the pressing members 33b are mounted and that connects the pressing members 33b to the air cylinder 33c. In the first movable pressing unit 33, the pressing members 33b can be moved forward in the Y1 direction via the mount 33d by the air cylinder 33c to press the substrates W. Furthermore, in the first movable pressing unit 33, the pressing members 33b can be moved backward in the Y2 direction via the mount 33d by the air cylinder 33c to be placed at retracted positions at which the pressing members 33b do not press the substrates W.
The pressing members 33b include the pair of pressing members 33b aligned in the X direction. The pair of pressing members 33b extend in the direction (Z direction) perpendicular to the main surfaces 31c of the blades 31 so as to be able to collectively press the plurality of substrates W supported by the plurality of blades 31. The air cylinder 33c includes a rod 334 that moves back and forth in the Y direction. The rod 334 of the air cylinder 33c is connected to the base end of the mount 33d. The mount 33d has a shape in which the tip end side (Y1 direction side) is bifurcated. In the mount 33d, the pair of pressing members 33b are distributed to the bifurcated portions.
The second movable pressing unit 34 includes the pressing members 34b, an air cylinder 34c corresponding to an actuator that moves the pressing members 34b back and forth in the Y direction, and a mount 34d to which the pressing members 34b are mounted and that connects the pressing members 34b to the air cylinder 34c. In the second movable pressing unit 34, the pressing members 34b can be moved forward in the Y1 direction via the mount 34d by the air cylinder 34c to press the substrates W. Furthermore, in the second movable pressing unit 34, the pressing members 34b can be moved backward in the Y2 direction via the mount 34d by the air cylinder 34c to be placed at retracted positions at which the pressing members 34b do not press the substrates W.
The pressing members 34b include the pair of pressing members 34b aligned in the X direction. The pair of pressing members 33b extend in the direction (Z direction) perpendicular to the main surfaces 31c of the blades 31 so as to be able to collectively press the plurality of substrates W supported by the plurality of blades 31. The air cylinder 34c includes a rod 344 that moves back and forth in the Y direction. The rod 344 of the air cylinder 34c is connected to the base end of the mount 34d. The mount 34d has a shape in which the tip end side (Y1 direction side) is bifurcated. In the mount 34d, the pair of pressing members 34b are distributed to the bifurcated portions.
The support members 32b of the movable support unit 32, the pressing members 33b of the first movable pressing unit 33, and the pressing members 34b of the second movable pressing unit 34 are arranged from the inside (the side closer to the centerline L1) toward the outside (the side farther from the centerline L1) in the X direction in this order. The support members 32b of the movable support unit 32, the pressing members 33b of the first movable pressing unit 33, and the pressing members 34b of the second movable pressing unit 34 do not overlap each other, as viewed in the direction (Z direction) perpendicular to the main surfaces 31c of the blades 31.
The air cylinder 32c of the movable support unit 32, the air cylinder 33c of the first movable pressing unit 33, and the air cylinder 34c of the second movable pressing unit 34 are aligned in the direction (Z direction) perpendicular to the main surfaces 31c of the blades 31. Specifically, the air cylinder 32c of the movable support unit 32, the air cylinder 33c of the first movable pressing unit 33, and the air cylinder 34c of the second movable pressing unit 34 overlap each other, as viewed in the direction (Z direction) perpendicular to the main surfaces 31c of the blades 31.
A method for attaching the movable support unit 32, the first movable pressing unit 33, and the second movable pressing unit 34 is described with reference to
As shown in
Then, the first movable pressing unit 33 arranged in the middle is positioned with respect to the frame 37 by the common positioner 35. Specifically, the first movable pressing unit 33 is moved from the upper side (Z1 direction side) toward the lower side (Z2 direction side) and placed on the positioned (already arranged) second movable pressing unit 34. At this time, the first movable pressing unit 33 is moved until the lower surface of the positioned portion 33a of the first movable pressing unit 33 contacts the upper surface of the positioned portion 34a of the second movable pressing unit 34. Thus, the positioning pins 35a protruding upward (in the Z1 direction) from the pin insertion holes 341 and 342 are inserted into the pin insertion holes 331 and 332 of the positioned portion 33a of the first movable pressing unit 33 from the lower side (Z2 direction side) toward the upper side (Z1 direction side). Consequently, the positioning pins 35a of the positioner 35 restrict movement of the first movable pressing unit 33 in the XY directions, and thus the first movable pressing unit 33 is positioned with respect to the frame 37. When the first movable pressing unit 33 is positioned, the positioning pins 35a protrude (expose) upward (in the Z1 direction) from the pin insertion holes 331 and 332 of the positioned portion 33a of the first movable pressing unit 33.
Then, the movable support unit 32 arranged on the uppermost side (Z1 direction side) is positioned with respect to the frame 37 by the common positioner 35. Specifically, the movable support unit 32 is moved from the upper side (Z1 direction side) toward the lower side (Z2 direction side) and placed on the positioned (already arranged) first movable pressing unit 33. At this time, the movable support unit 32 is moved until the lower surface of the positioned portion 32a of the movable support unit 32 contacts the upper surface of the positioned portion 33a of the first movable pressing unit 33. Thus, the positioning pins 35a protruding upward (in the Z1 direction) from the pin insertion holes 331 and 332 are inserted into the pin insertion holes 321 and 322 of the positioned portion 32a of the movable support unit 32 from the lower side (Z2 direction side) toward the upper side (Z1 direction side). Consequently, the positioning pins 35a of the positioner 35 restrict movement of the movable support unit 32 in the XY directions, and thus the movable support unit 32 is positioned with respect to the frame 37. When the movable support unit 32 is positioned, the positioning pins 35a do not protrude upward (in the Z1 direction) from the pin insertion holes 321 and 322 of the positioned portion 32a of the movable support unit 32.
Then, as shown in
According to this embodiment, the following advantages are achieved.
According to this embodiment, as described above, the positioner 35 is provided to position the movable support unit 32 and the movable pressing units 33 and 34 in common such that it is possible to simplify the structure of the positioner 35, and it is possible to save time and effort in positioning the movable support unit 32 and the movable pressing units 33 and 34 as compared with a case in which the movable support unit 32 and the movable pressing units 33 and 34 are separately positioned. Thus, it is possible to easily assemble the substrate holding hand 1. Furthermore, even when the movable support unit 32 and the movable pressing units 33 and 34 are removed for maintenance of the substrate holding hand 1, the movable support unit 32 and the movable pressing units 33 and 34 can be easily reattached (assembled), and thus the substrate holding hand 1 can be easily maintained.
According to this embodiment, as described above, the positioner 35 includes the positioning pins 35a. Furthermore, the movable support unit 32, the movable pressing unit 33, and the movable pressing unit 34 include the positioned portion 32a including the pin insertion holes 321 and 322 that allow the positioning pins 35a to be inserted thereinto along the positioning pins 35a, the positioned portion 33a including the pin insertion holes 331 and 332 that allow the positioning pins 35a to be inserted thereinto along the positioning pins 35a, and the positioned portion 34a including the pin insertion holes 341 and 342 that allow the positioning pins 35a to be inserted thereinto along the positioning pins 35a, respectively. Accordingly, the movable support unit 32 and the movable pressing units 33 and 34 can be positioned simply by inserting the positioning pins 35a of the positioner 35 into the pin insertion holes 321, 322, 331, 332, 341, and 342 of the positioned portions 32a, 33a, and 34a, and thus the substrate holding hand 1 can be more easily assembled.
According to this embodiment, as described above, the positioning pins 35a extend in the direction perpendicular to the main surfaces 31c of the blades 31. Furthermore, the movable support unit 32 and the movable pressing units 33 and 34 are positioned in common by the positioning pins 35a by inserting the positioning pins 35a into the pin insertion holes 321, 322, 331, 332, 341, and 342 of the positioned portions 32a, 33a, and 34a while the movable support unit 32 and the movable pressing units 33 and 34 are aligned in the direction perpendicular to the main surfaces 31c of the blades 31. Accordingly, the movable support unit 32 and the movable pressing units 33 and 34 can be positioned (assembled) from the direction perpendicular to the main surfaces 31c of the blades 31, in which there are relatively few structures, and thus the substrate holding hand 1 can be still more easily assembled. Furthermore, the movable support unit 32 and the movable pressing units 33 and 34 can be aligned in the direction perpendicular to the main surfaces 31c of the blades 31, and thus the movable support unit 32 and the movable pressing units 33 and 34 can be compactly arranged in the direction parallel to the main surfaces 31c of the movable support units 31 and perpendicular to the direction in which the movable support unit 32 and the movable pressing units 33 and 34 move back and forth.
According to this embodiment, as described above, the movable support unit 32 includes the support members 32b to support the substrates W. The movable pressing units 33 and 34 include the pressing members 33b and 34b to press the substrates W, respectively. As viewed in the direction perpendicular to the main surfaces 31c of the blades 31, the support members 32b and the pressing members 33b and 34b are located so as not to overlap each other, and the positioned portion 32a, 33a, and 34a of the movable support unit 32 including the pin insertion holes 321, 322, 331, 332, 341, and 342 and the positioned portions 32a, 33a, and 34a of the movable pressing units 33 and 34 including the pin insertion holes 321, 322, 331, 332, 341, and 342 are located so as to overlap each other. Accordingly, the positions of the support members 32b of the movable support unit 32 and the positions of the pressing members 33b and 34b of the movable pressing units 33 and 34 can be shifted from each other, and thus when the movable support unit 32 and the movable pressing units 33 and 34 are positioned (assembled), the support members 32b of the movable support unit 32 and the pressing members 33b and 34b of the movable pressing units 33 and 34 do not interfere with each other. Consequently, the movable support unit 32 and the movable pressing units 33 and 34 can be easily arranged, and thus the movable support unit 32 and the movable pressing units 33 and 34 can be easily positioned (assembled). Furthermore, the positions of the support members 32b of the movable support unit 32 and the positions of the pressing members 33b and 34b of the movable pressing units 33 and 34 can be shifted from each other, and thus the substrates W can be supported and pressed by the support members 32b of the movable support unit 32 and the pressing members 33b and 34b of the movable pressing units 33 and 34 at the same height.
According to this embodiment, as described above, the support members 32b include the pairs of support members 32b. The pressing members 33b and 34b include the pair of pressing members 33b and the pair of pressing members 34b. The pairs of support members 32b, the pair of pressing members 33b, and the pair of pressing members 34b are arranged at the positions symmetrical with respect to the centerline L1 extending in the direction in which the movable support unit 32 and the movable pressing units 33 and 34 move back and forth, as viewed in the direction perpendicular to the main surfaces 31c of the blades 31. The pin insertion holes 321, 322, 331, 332, 341, and 342 are arranged on one side with respect to the centerline L1, as viewed in the direction perpendicular to the main surfaces 31c of the blades 31. Accordingly, the pairs of support members 32b of the movable support unit 32 and the pair of pressing members 33b and the pair of pressing members 34b of the movable pressing units 33 and 34 can be arranged at appropriate positions, and when drives (air cylinders 32c, 33c, and 34c) of the movable support unit 32 and the movable pressing units 33 and 34 are arranged on the centerline L1, the pin insertion holes 321, 322, 331, 332, 341, and 342 of the positioned portions 32a, 33a, and 34a can be arranged at appropriate positions while avoiding the drives.
According to this embodiment, as described above, the positioning pins 35a include the pair of positioning pins 35a. The pin insertion holes 321, 322, 331, 332, 341, and 342 include the pair of pin insertion holes 321 and 322, the pair of pin insertion holes 331 and 332, and the pair of pin insertion holes 341 and 342 corresponding to the pair of positioning pins 35a. One of the pair of pin insertion holes 321 and 322, one of the pair of pin insertion holes 331 and 332, and one of the pair of pin insertion holes 341 and 342 have an elongated hole shape. Accordingly, as compared with a case in which both of the pair of pin insertion holes 321 and 322, both of the pair of pin insertion holes 331 and 332, and both of the pair of pin insertion holes 341 and 342 are circular, the pair of positioning pins 35a can be easily inserted into the pair of pin insertion holes 321 and 322, the pair of pin insertion holes 331 and 332, and the pair of pin insertion holes 341 and 342, and thus the movable support unit 32 and the movable pressing units 33 and 34 can be easily positioned (assembled).
According to this embodiment, as described above, the substrate holding hand 1 further includes the fixing members 36 to fix, in common, the movable support unit 32 and the movable pressing units 33 and 34 that have been positioned in common by the positioner 35. Accordingly, it is possible to save time and effort in fixing the movable support unit 32 and the movable pressing units 33 and 34 as compared with a case in which the movable support unit 32 and the movable pressing units 33 and 34 are separately fixed, and thus the substrate holding hand 1 can be more easily assembled. Furthermore, as compared with a case in which the movable support unit 32 and the movable pressing units 33 and 34 are separately fixed, the number of fixing members 36 can be reduced.
According to this embodiment, as described above, the positioner 35 includes the positioning pins 35a. The movable support unit 32 and the movable pressing units 33 and 34 include the positioned portions 32a, 33a, and 34a including the pin insertion holes 321, 322, 331, 332, 341, and 342 that allow the positioning pins 35a to be inserted thereinto along the positioning pins 35a, and the fixing member insertion holes 323, 333, and 343 that allow the fixing members 36 to be inserted thereinto, respectively. The pin insertion holes 321, 322, 331, 332, 341, and 342 and the fixing member insertion holes 323, 333, and 343 of the positioned portions 32a, 33a, and 34a are arranged adjacent to each other in the direction in which the movable support unit 32 and the movable pressing units 33 and 34 move back and forth. Accordingly, the pin insertion holes 321, 322, 331, 332, 341, and 342 and the fixing member insertion holes 323, 333, and 343 of the positioned portions 32a, 33a, and 34a can be compactly arranged in the direction parallel to the main surfaces 31c of the blades 31 and perpendicular to the direction in which the movable support unit 32 and the movable pressing units 33 and 34 move back and forth, and thus the positioned portions 32a, 33a, and 34a can be made compact in the direction parallel to the main surfaces 31c of the blades 31 and perpendicular to the direction in which the movable support unit 32 and the movable pressing units 33 and 34 move back and forth.
According to this embodiment, as described above, the supports 311 and 312 include the front supports 311 on the tip end 31a side of each blade 31 and the rear supports 312 on the base end 31b side of each blade 31. The movable support unit 32 supports the substrates W together with the front supports 311. The movable pressing units 33 and 34 include the first movable pressing unit 33 to press the substrates W supported by the front supports 311 and the movable support unit 32, and the second movable pressing unit 34 to press the substrates W supported by the front supports 311 and the rear supports 312. Accordingly, two (two types of) substrates W can be held by one blade 31. Furthermore, even when the substrate holding hand 1 includes three units, which are the movable support unit 32, the first movable pressing unit 33, and the second movable pressing unit 34, the common positioner can position the three unit in common. Consequently, it is possible to save time and effort in positioning the movable support unit 32, the first movable pressing unit 33, and the second movable pressing unit 34, and thus it is possible to easily assemble the substrate holding hand 1.
The embodiment disclosed this time must be considered as illustrative in all points and not restrictive. The scope of the present invention is not shown by the above description of the embodiment but by the scope of claims for patent, and all modifications (modified examples) within the meaning and scope equivalent to the scope of claims for patent are further included.
For example, while the example in which the arm is a horizontal articulated robot arm has been shown in the aforementioned embodiment, the present invention is not limited to this. For example, the arm may be an arm other than a horizontal articulated robot arm, such as a vertical articulated robot arm.
While the example in which the substrate holding hand includes a plurality of blades has been shown in the aforementioned embodiment, the present invention is not limited to this. For example, the substrate holding hand may include one blade.
While the example in which the substrate holding hand includes four blades has been shown in the aforementioned embodiment, the present invention is not limited to this. For example, the substrate holding hand may include a plurality of blades other than four.
While the example in which each of the blades has a bifurcated shape has been shown in the aforementioned embodiment, the present invention is not limited to this. For example, each of the blades may have a shape other than a bifurcated shape.
While the example in which each of the blades can support two substrates at different heights has been shown in the aforementioned embodiment, the present invention is not limited to this. For example, each of the blades may be able to support only one substrate (able to support a substrate at only one height).
While the example in which the movable support unit includes pairs of support members has been shown in the aforementioned embodiment, the present invention is not limited to this. For example, the movable support unit may include one support member.
While the example in which two pressing units, which are the first movable pressing unit and the second movable pressing unit, are provided has been shown in the aforementioned embodiment, the present invention is not limited to this. For example, only one movable pressing unit may be provided.
While the example in which each of the movable pressing units includes a pair of pressing members has been shown in the aforementioned embodiment, the present invention is not limited to this. For example, each of the movable pressing units may include one pressing member.
While the example in which the positioner includes the positioning pins has been shown in the aforementioned embodiment, the present invention is not limited to this. For example, the positioner may include a positioning structure such as a positioning wall other than the positioning pins. Alternatively, the positioner may perform positioning by combining a plurality of types of positioning structures such as the positioning pins and the positioning wall.
While the example in which the positioning pins extend in the direction perpendicular to the main surfaces of the blades has been shown in the aforementioned embodiment, the present invention is not limited to this. For example, the positioning pins may extend in a direction perpendicular to the direction perpendicular to the main surfaces of the blades.
While the example in which a pair of (two) positioning pins are provided has been shown in the aforementioned embodiment, the present invention is not limited to this. For example, one or three or more positioning pins may be provided.
While the example in which the movable support unit and the movable pressing units that have been positioned in common by the positioner are fixed by the common fixing members has been shown in the aforementioned embodiment, the present invention is not limited to this. For example, the movable support unit and the movable pressing units that have been positioned in common by the positioner may be fixed by separate fixing members.
While the example in which the second movable pressing unit, the first movable pressing unit, and the movable support unit are positioned in this order by the positioning pins of the positioner has been shown in the aforementioned embodiment, the present invention is not limited to this. In the present invention, either the movable pressing units or the movable support unit may be positioned first.
| Number | Date | Country | Kind |
|---|---|---|---|
| 2020-148490 | Sep 2020 | JP | national |
| Filing Document | Filing Date | Country | Kind |
|---|---|---|---|
| PCT/JP2020/041025 | 11/2/2020 | WO |
