Handling workpieces outside exposure position

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CPC
G03F7/7075

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Parent Industries

GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F7/00Photomechanical

Current Industry

G03F7/7075Handling workpieces outside exposure position

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Control method of driving apparatus, driving apparatus, lithography...
- Patent number 12,130,560
- Issue date Oct 29, 2024
- Canon Kabushiki Kaisha
- Hayato Hoshino
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Substrate stage and substrate processing system using the same
- Patent number 12,111,582
- Issue date Oct 8, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Huan Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Wafer processing apparatus and wafer transfer method
- Patent number 12,099,309
- Issue date Sep 24, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Xueyu Liang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Displacement device based on hall-effect sensors and planar motors
- Patent number 12,068,655
- Issue date Aug 20, 2024
- Shanghai Yinguan Semiconductor Technology Co., Ltd.
- Chenyang Ding
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Method for fast loading substrates in a flat panel tool
- Patent number 12,061,422
- Issue date Aug 13, 2024
- Applied Materials, Inc.
- Benjamin M. Johnston
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Actuator device for use in a positioning system as well as such pos...
- Patent number 12,021,432
- Issue date Jun 25, 2024
- VDL Enabling Technologies Group B.V.
- Johannes Hubertus Antonius Van De Rijdt
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Substrate holding apparatus, substrate processing apparatus having...
- Patent number 12,002,704
- Issue date Jun 4, 2024
- Ebara Corporation
- Makoto Kashiwagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transport system having a magnetically levitated transportation stage
- Patent number 11,953,836
- Issue date Apr 9, 2024
- Massachusetts Institute of Technology
- Lei Zhou
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Temperature control device and temperature control method
- Patent number 11,874,609
- Issue date Jan 16, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Enhao Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Object positioner, method for correcting the shape of an object, li...
- Patent number 11,860,554
- Issue date Jan 2, 2024
- ASML Netherlands B.V.
- Mark Johannes Hermanus Frencken
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System for a semiconductor fabrication facility and method for oper...
- Patent number 11,854,846
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- Fu-Hsien Li
- B66 - HOISTING LIFTING HAULING
Information Patent Grant
Multiphase linear motor, multiphase planar motor, stage, lithograph...
- Patent number 11,837,931
- Issue date Dec 5, 2023
- ASML Netherlands B.V.
- Maarten Hartger Kimman
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Exposure apparatus and method of manufacturing article
- Patent number 11,762,299
- Issue date Sep 19, 2023
- Canon Kabushiki Kaisha
- Keiji Emoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Control method of driving apparatus, driving apparatus, lithography...
- Patent number 11,754,932
- Issue date Sep 12, 2023
- Canon Kabushiki Kaisha
- Hayato Hoshino
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate stage, substrate processing system using the same, and me...
- Patent number 11,747,741
- Issue date Sep 5, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Huan Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure machine
- Patent number 11,662,667
- Issue date May 30, 2023
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Bo Liu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Fast high power pulsed light source system for high speed metrology...
- Patent number 11,573,498
- Issue date Feb 7, 2023
- Mitutoyo Corporation
- Paul Gerard Gladnick
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Actuator, linear motor and lithographic apparatus
- Patent number 11,539,280
- Issue date Dec 27, 2022
- ASML Netherlands B.V.
- Niels Cornelis Petrus Johannes Geerts
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Substrate processing apparatus, substrate processing method, and st...
- Patent number 11,520,233
- Issue date Dec 6, 2022
- Tokyo Electron Limited
- Keiichi Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Carrier system, exposure apparatus, carrier method, exposure method...
- Patent number 11,511,438
- Issue date Nov 29, 2022
- Nikon Corporation
- Hideaki Hara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Piezoelectric actuator, actuator system, substrate support, and lit...
- Patent number 11,467,504
- Issue date Oct 11, 2022
- ASML Netherlands B.V.
- Bas Jansen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Positioning system and a method for positioning a substage or a sta...
- Patent number 11,460,786
- Issue date Oct 4, 2022
- ASML Netherlands B.V.
- Yang-Shan Huang
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Reticle retaining system
- Patent number 11,442,370
- Issue date Sep 13, 2022
- Gudeng Precision Industrial Co., Ltd.
- Chia-Ho Chuang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Movable body apparatus, moving method, exposure apparatus, exposure...
- Patent number 11,402,762
- Issue date Aug 2, 2022
- Nikon Corporation
- Yasuo Aoki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetically-levitated transporter
- Patent number 11,393,706
- Issue date Jul 19, 2022
- Massachusetts Institute of Technology
- Lei Zhou
- B60 - VEHICLES IN GENERAL
Information Patent Grant
System for a semiconductor fabrication facility and method for oper...
- Patent number 11,380,566
- Issue date Jul 5, 2022
- Taiwan Semiconductor Manufacturing Company Ltd.
- Fu-Hsien Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage driving apparatus, lithography apparatus, and method of manuf...
- Patent number 11,381,196
- Issue date Jul 5, 2022
- Canon Kabushiki Kaisha
- Takayasu Matsui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer device, transfer method and photolithography app...
- Patent number 11,367,636
- Issue date Jun 21, 2022
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Fulong Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transport system having a magnetically levitated transportation stage
- Patent number 11,360,400
- Issue date Jun 14, 2022
- Massachusetts Institute of Technology
- David L. Trumper
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Detection apparatus, exposure apparatus, and article manufacturing...
- Patent number 11,333,986
- Issue date May 17, 2022
- Canon Kabushiki Kaisha
- Kazuki Ota
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Rotary Substrate Support Having an Actuator for Aligning a Substrate
- Publication number 20240427255
- Publication date Dec 26, 2024
- Applied Materials, Inc.
- Nagesha JANSALE VENKATESHA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SEMICONDUCTOR PROCESSING APPARATUS
- Publication number 20240404780
- Publication date Dec 5, 2024
- HITACHI HIGH-TECH CORPORATION
- Masahiro KAMIGAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHIC APPARATUS STAGE COUPLING
- Publication number 20240402622
- Publication date Dec 5, 2024
- ASML NETHERLANDS B.V.
- Johannes Petrus Martinus Bernardus VERMEULEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240393705
- Publication date Nov 28, 2024
- SEMES CO., LTD.
- Sang Hyun PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FIRST HOLDING APPARATUS, THIRD HOLDING APPARATUS, FIFTH HOLDING APP...
- Publication number 20240377763
- Publication date Nov 14, 2024
- Nikon Corporation
- Arata OCHINO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SEMICONDUCTOR SUBSTRATE STAGE FOR CARRING SUBSTRATE
- Publication number 20240377762
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Huan CHEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
A POSITION MEASUREMENT SYSTEM, A POSITIONING SYSTEM, A LITHOGRAPHIC...
- Publication number 20240361706
- Publication date Oct 31, 2024
- ASML NETHERLANDS B.V.
- Marcus Adrianus Van De Kerkhof
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND SU...
- Publication number 20240355644
- Publication date Oct 24, 2024
- TOKYO ELECTRON LIMITED
- Shinsuke TAKAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ACTUATOR DEVICE FOR USE IN A POSITIONING SYSTEM AS WELL AS SUCH POS...
- Publication number 20240339910
- Publication date Oct 10, 2024
- VDL Enabling Technologies Group B.V.
- Johannes Hubertus Antonius VAN DE RIJDT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INNER POD HOLDING DEVICE CONDUCIVE TO REDUCING DUST CONTAMINATION A...
- Publication number 20240329544
- Publication date Oct 3, 2024
- GUDENG EQUIPMENT CO., LTD.
- YIN-FENG CHAN
- G01 - MEASURING TESTING
Information Patent Application
IMPRINTING APPARATUS
- Publication number 20240329521
- Publication date Oct 3, 2024
- Koninklijke Philips N.V.
- Didier Mathijs Maria Justina Petit
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY SYSTEM, SUBSTRATE SAG COMPENSATOR, AND METHOD
- Publication number 20240329546
- Publication date Oct 3, 2024
- ASML NETHERLANDS B.V.
- Marcus Adrianus Van De Kerkhof
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TRANSFER METHOD AND SUBSTRATE TRANSFER APPARATUS
- Publication number 20240310740
- Publication date Sep 19, 2024
- TOKYO ELECTRON LIMITED
- Kenichirou MATSUYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROMAGNETIC MOTOR SYSTEM, POSTION CONTROL SYSTEM, STAGE APPARAT...
- Publication number 20240313684
- Publication date Sep 19, 2024
- ASML NETHERLANDS B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
STAGE APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING M...
- Publication number 20240290650
- Publication date Aug 29, 2024
- Canon Kabushiki Kaisha
- KAZUNORI NAKAJIMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE HOLDING APPARATUS, SUBSTRATE PROCESSING APPARATUS HAVING...
- Publication number 20240282619
- Publication date Aug 22, 2024
- EBARA CORPORATION
- Makoto KASHIWAGI
- B24 - GRINDING POLISHING
Information Patent Application
STRUCTURES FOR PATTERNING SUBSTRATES AND METHODS AND SYSTEMS FOR TH...
- Publication number 20240274313
- Publication date Aug 15, 2024
- ASM IP HOLDING B.V.
- Fatemeh Davodi
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
SUBSTRATE TREATMENT APPARATUS
- Publication number 20240272562
- Publication date Aug 15, 2024
- CONTEMPORARY AMPEREX TECHNOLOGY CO., LIMITED
- Xiaosong LIU
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SUBSTRATE HOLDER AND METHOD
- Publication number 20240264540
- Publication date Aug 8, 2024
- ASML NETHERLANDS B.V.
- Marcus Adrianus Van de Kerkhof
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240248417
- Publication date Jul 25, 2024
- TOKYO ELECTRON LIMITED
- Yoji SAKATA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240201602
- Publication date Jun 20, 2024
- ACM RESEARCH (SHANGHAI), INC.
- Hui Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MANUFACTURING EQUIPMENT FOR LIGHT-EMITTING DEVICE
- Publication number 20240186160
- Publication date Jun 6, 2024
- SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Shunpei YAMAZAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VERTICAL MOTION AXIS FOR IMAGING OPTICAL HEAD
- Publication number 20240168395
- Publication date May 23, 2024
- ORBOTECH LTD.
- Tal Goichman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROCESS CELL FOR FILED GUIDED POST EXPOSURE BAKE PROCESS
- Publication number 20240160117
- Publication date May 16, 2024
- Applied Materials, Inc.
- Dmitry LUBOMIRSKY
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MASK EXPOSURE SYSTEM AND MASK EXPOSURE METHOD
- Publication number 20240152062
- Publication date May 9, 2024
- Samsung Electronics Co., Ltd.
- Sukjong Bae
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, CONTROL METHOD, AND DEVICE MANUFACTURING METHOD
- Publication number 20240126178
- Publication date Apr 18, 2024
- Nikon Corporation
- Masaki KATO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
STAGE APPARATUS, PATTERN FORMING APPARATUS, AND METHOD FOR MANUFACT...
- Publication number 20240085806
- Publication date Mar 14, 2024
- Canon Kabushiki Kaisha
- YUICHI OZAWA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Transport System Having a Magnetically Levitated Transportation Stage
- Publication number 20240085809
- Publication date Mar 14, 2024
- Massachusetts Institute of Technology
- Lei ZHOU
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
ACTIVE LINEAR MOTOR PARASITIC FORCE COMPENSATION
- Publication number 20240045345
- Publication date Feb 8, 2024
- Applied Materials, Inc.
- Ulrich MUELLER
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
SUBSTRATE TREATMENT SYSTEM AND SUBSTRATE TREATMENT METHOD
- Publication number 20240036482
- Publication date Feb 1, 2024
- TOKYO ELECTRON LIMITED
- Masashi TSUCHIYAMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Handling workpieces outside exposure position

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Control method of driving apparatus, driving apparatus, lithography...

Substrate stage and substrate processing system using the same

Wafer processing apparatus and wafer transfer method

Displacement device based on hall-effect sensors and planar motors

Method for fast loading substrates in a flat panel tool

Actuator device for use in a positioning system as well as such pos...

Substrate holding apparatus, substrate processing apparatus having...

Transport system having a magnetically levitated transportation stage

Temperature control device and temperature control method

Object positioner, method for correcting the shape of an object, li...

System for a semiconductor fabrication facility and method for oper...

Multiphase linear motor, multiphase planar motor, stage, lithograph...

Exposure apparatus and method of manufacturing article

Control method of driving apparatus, driving apparatus, lithography...

Substrate stage, substrate processing system using the same, and me...

Exposure machine

Fast high power pulsed light source system for high speed metrology...

Actuator, linear motor and lithographic apparatus

Substrate processing apparatus, substrate processing method, and st...

Carrier system, exposure apparatus, carrier method, exposure method...

Piezoelectric actuator, actuator system, substrate support, and lit...

Positioning system and a method for positioning a substage or a sta...

Reticle retaining system

Movable body apparatus, moving method, exposure apparatus, exposure...

Magnetically-levitated transporter

System for a semiconductor fabrication facility and method for oper...

Stage driving apparatus, lithography apparatus, and method of manuf...

Substrate transfer device, transfer method and photolithography app...

Transport system having a magnetically levitated transportation stage

Detection apparatus, exposure apparatus, and article manufacturing...

Patents Applicationslast 30 patents

Rotary Substrate Support Having an Actuator for Aligning a Substrate

SEMICONDUCTOR PROCESSING APPARATUS

LITHOGRAPHIC APPARATUS STAGE COUPLING

SUBSTRATE PROCESSING APPARATUS

FIRST HOLDING APPARATUS, THIRD HOLDING APPARATUS, FIFTH HOLDING APP...

SEMICONDUCTOR SUBSTRATE STAGE FOR CARRING SUBSTRATE

A POSITION MEASUREMENT SYSTEM, A POSITIONING SYSTEM, A LITHOGRAPHIC...

SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND SU...

ACTUATOR DEVICE FOR USE IN A POSITIONING SYSTEM AS WELL AS SUCH POS...

INNER POD HOLDING DEVICE CONDUCIVE TO REDUCING DUST CONTAMINATION A...

IMPRINTING APPARATUS

LITHOGRAPHY SYSTEM, SUBSTRATE SAG COMPENSATOR, AND METHOD

SUBSTRATE TRANSFER METHOD AND SUBSTRATE TRANSFER APPARATUS

ELECTROMAGNETIC MOTOR SYSTEM, POSTION CONTROL SYSTEM, STAGE APPARAT...

STAGE APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING M...

SUBSTRATE HOLDING APPARATUS, SUBSTRATE PROCESSING APPARATUS HAVING...

STRUCTURES FOR PATTERNING SUBSTRATES AND METHODS AND SYSTEMS FOR TH...

SUBSTRATE TREATMENT APPARATUS

SUBSTRATE HOLDER AND METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS

MANUFACTURING EQUIPMENT FOR LIGHT-EMITTING DEVICE

VERTICAL MOTION AXIS FOR IMAGING OPTICAL HEAD

PROCESS CELL FOR FILED GUIDED POST EXPOSURE BAKE PROCESS

MASK EXPOSURE SYSTEM AND MASK EXPOSURE METHOD

EXPOSURE APPARATUS, CONTROL METHOD, AND DEVICE MANUFACTURING METHOD

STAGE APPARATUS, PATTERN FORMING APPARATUS, AND METHOD FOR MANUFACT...

Transport System Having a Magnetically Levitated Transportation Stage

ACTIVE LINEAR MOTOR PARASITIC FORCE COMPENSATION

SUBSTRATE TREATMENT SYSTEM AND SUBSTRATE TREATMENT METHOD