Handling workpieces outside exposure position

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CPC
G03F7/7075

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Parent Industries

GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F7/00Photomechanical

Current Industry

G03F7/7075Handling workpieces outside exposure position

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Inner pod holding device conducive to reducing dust contamination a...
- Patent number 12,306,550
- Issue date May 20, 2025
- GUDENG EQUIPMENT CO., LTD.
- Yin-Feng Chan
- G01 - MEASURING TESTING
Information Patent Grant
Pellicle demounting method, and pellicle demounting device
- Patent number 12,271,109
- Issue date Apr 8, 2025
- Mitsui Chemicals, Inc.
- Akira Ishikawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Support for an optical element
- Patent number 12,271,117
- Issue date Apr 8, 2025
- Carl Zeiss SMT GmbH
- Toralf Gruner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Nanopositioning systems and associated methods
- Patent number 12,266,501
- Issue date Apr 1, 2025
- The Texas A&M University System
- ChaBum Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure apparatus and method of manufacturing article
- Patent number 12,216,410
- Issue date Feb 4, 2025
- Canon Kabushiki Kaisha
- Keiji Emoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Actuator assemblies comprising piezo actuators or electrostrictive...
- Patent number 12,210,294
- Issue date Jan 28, 2025
- ASML Netherlands B.V.
- Hans Butler
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Control method of driving apparatus, driving apparatus, lithography...
- Patent number 12,130,560
- Issue date Oct 29, 2024
- Canon Kabushiki Kaisha
- Hayato Hoshino
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Substrate stage and substrate processing system using the same
- Patent number 12,111,582
- Issue date Oct 8, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Huan Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Wafer processing apparatus and wafer transfer method
- Patent number 12,099,309
- Issue date Sep 24, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Xueyu Liang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Displacement device based on hall-effect sensors and planar motors
- Patent number 12,068,655
- Issue date Aug 20, 2024
- Shanghai Yinguan Semiconductor Technology Co., Ltd.
- Chenyang Ding
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Method for fast loading substrates in a flat panel tool
- Patent number 12,061,422
- Issue date Aug 13, 2024
- Applied Materials, Inc.
- Benjamin M. Johnston
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Actuator device for use in a positioning system as well as such pos...
- Patent number 12,021,432
- Issue date Jun 25, 2024
- VDL Enabling Technologies Group B.V.
- Johannes Hubertus Antonius Van De Rijdt
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Substrate holding apparatus, substrate processing apparatus having...
- Patent number 12,002,704
- Issue date Jun 4, 2024
- Ebara Corporation
- Makoto Kashiwagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transport system having a magnetically levitated transportation stage
- Patent number 11,953,836
- Issue date Apr 9, 2024
- Massachusetts Institute of Technology
- Lei Zhou
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Temperature control device and temperature control method
- Patent number 11,874,609
- Issue date Jan 16, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Enhao Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Object positioner, method for correcting the shape of an object, li...
- Patent number 11,860,554
- Issue date Jan 2, 2024
- ASML Netherlands B.V.
- Mark Johannes Hermanus Frencken
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System for a semiconductor fabrication facility and method for oper...
- Patent number 11,854,846
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- Fu-Hsien Li
- B66 - HOISTING LIFTING HAULING
Information Patent Grant
Multiphase linear motor, multiphase planar motor, stage, lithograph...
- Patent number 11,837,931
- Issue date Dec 5, 2023
- ASML Netherlands B.V.
- Maarten Hartger Kimman
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Exposure apparatus and method of manufacturing article
- Patent number 11,762,299
- Issue date Sep 19, 2023
- Canon Kabushiki Kaisha
- Keiji Emoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Control method of driving apparatus, driving apparatus, lithography...
- Patent number 11,754,932
- Issue date Sep 12, 2023
- Canon Kabushiki Kaisha
- Hayato Hoshino
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate stage, substrate processing system using the same, and me...
- Patent number 11,747,741
- Issue date Sep 5, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Huan Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure machine
- Patent number 11,662,667
- Issue date May 30, 2023
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Bo Liu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Fast high power pulsed light source system for high speed metrology...
- Patent number 11,573,498
- Issue date Feb 7, 2023
- Mitutoyo Corporation
- Paul Gerard Gladnick
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Actuator, linear motor and lithographic apparatus
- Patent number 11,539,280
- Issue date Dec 27, 2022
- ASML Netherlands B.V.
- Niels Cornelis Petrus Johannes Geerts
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Substrate processing apparatus, substrate processing method, and st...
- Patent number 11,520,233
- Issue date Dec 6, 2022
- Tokyo Electron Limited
- Keiichi Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Carrier system, exposure apparatus, carrier method, exposure method...
- Patent number 11,511,438
- Issue date Nov 29, 2022
- Nikon Corporation
- Hideaki Hara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Piezoelectric actuator, actuator system, substrate support, and lit...
- Patent number 11,467,504
- Issue date Oct 11, 2022
- ASML Netherlands B.V.
- Bas Jansen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Positioning system and a method for positioning a substage or a sta...
- Patent number 11,460,786
- Issue date Oct 4, 2022
- ASML Netherlands B.V.
- Yang-Shan Huang
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Reticle retaining system
- Patent number 11,442,370
- Issue date Sep 13, 2022
- Gudeng Precision Industrial Co., Ltd.
- Chia-Ho Chuang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Movable body apparatus, moving method, exposure apparatus, exposure...
- Patent number 11,402,762
- Issue date Aug 2, 2022
- Nikon Corporation
- Yasuo Aoki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SCREW TRANSMISSION DRIVE, AND RETICLE STAGE AND MEASURING DEVICE FO...
- Publication number 20250237968
- Publication date Jul 24, 2025
- Carl Zeiss SMT GMBH
- Stephan Zschäck
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TRANSFER APPARATUS AND WAFER STORAGE CONTAINER CLEANING APPARATUS
- Publication number 20250236470
- Publication date Jul 24, 2025
- SHIBAURA MECHATRONICS CORPORATION
- Yukinobu NISHIBE
- B08 - CLEANING
Information Patent Application
PLACEMENT MEMBER
- Publication number 20250233009
- Publication date Jul 17, 2025
- KYOCERA CORPORATION
- Koji AKASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND SU...
- Publication number 20250201586
- Publication date Jun 19, 2025
- TOKYO ELECTRON LIMITED
- Shinsuke TAKAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE AND ERROR COMPENSATION SYSTEM USING THE SAME
- Publication number 20250164897
- Publication date May 22, 2025
- SAMSUNG DISPLAY CO., LTD.
- Jungwoong Byun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTOLITHOGRAPHY RETICLE STAGE ACTUATORS
- Publication number 20250155825
- Publication date May 15, 2025
- Massachusetts Institute of Technology
- Charles Byron Seaberg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHOTOLITHOGRAPHY RETICLE STAGE DRIVE SYSTEM
- Publication number 20250155826
- Publication date May 15, 2025
- Massachusetts Institute of Technology
- Charles Byron Seaberg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ACTUATED PHOTOLITHOGRAPHY RETICLE STAGE
- Publication number 20250155827
- Publication date May 15, 2025
- Massachusetts Institute of Technology
- Charles Byron Seaberg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MASSIVE MEASUREMENT SAMPLING USING MULTIPLE CHUCKS AND OPTICAL COLUMNS
- Publication number 20250138435
- Publication date May 1, 2025
- KLA Corporation
- Jonathan Madsen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20250130505
- Publication date Apr 24, 2025
- Canon Kabushiki Kaisha
- Keiji Emoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING AND DEVELOPING DEVICE
- Publication number 20250130511
- Publication date Apr 24, 2025
- ACM RESEARCH (SHANGHAI), INC.
- Mark Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VIBRATION CONTROL OF STRUCTURAL ELEMENTS OF EXPOSURE APPARATUS
- Publication number 20250130510
- Publication date Apr 24, 2025
- Nikon Corporation
- Pai-Hsueh Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ACTUATOR ASSEMBLIES COMPRISING PIEZO ACTUATORS OR ELECTROSTRICTIVE...
- Publication number 20250123574
- Publication date Apr 17, 2025
- ASML NETHERLANDS B.V.
- Hans BUTLER
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
LITHOGRAPHY APPARATUS
- Publication number 20250123573
- Publication date Apr 17, 2025
- Samsung Electronics Co., Ltd.
- Sung Yong BAE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR COMPENSATING ACTUATOR EFFECTS OF ACTUATORS
- Publication number 20250110413
- Publication date Apr 3, 2025
- Carl Zeiss SMT GMBH
- Markus RAAB
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE HOLDING APPARATUS, SUBSTRATE PROCESSING APPARATUS, SEPARA...
- Publication number 20250093788
- Publication date Mar 20, 2025
- Canon Kabushiki Kaisha
- YUICHIRO MORIKUNI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250044713
- Publication date Feb 6, 2025
- TOKYO ELECTRON LIMITED
- Toshiaki Odaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CONTROL METHOD OF DRIVING APPARATUS, DRIVING APPARATUS, LITHOGRAPHY...
- Publication number 20250021023
- Publication date Jan 16, 2025
- Canon Kabushiki Kaisha
- Hayato Hoshino
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
Rotary Substrate Support Having an Actuator for Aligning a Substrate
- Publication number 20240427255
- Publication date Dec 26, 2024
- Applied Materials, Inc.
- Nagesha JANSALE VENKATESHA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SEMICONDUCTOR PROCESSING APPARATUS
- Publication number 20240404780
- Publication date Dec 5, 2024
- HITACHI HIGH-TECH CORPORATION
- Masahiro KAMIGAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHIC APPARATUS STAGE COUPLING
- Publication number 20240402622
- Publication date Dec 5, 2024
- ASML NETHERLANDS B.V.
- Johannes Petrus Martinus Bernardus VERMEULEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240393705
- Publication date Nov 28, 2024
- SEMES CO., LTD.
- Sang Hyun PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FIRST HOLDING APPARATUS, THIRD HOLDING APPARATUS, FIFTH HOLDING APP...
- Publication number 20240377763
- Publication date Nov 14, 2024
- Nikon Corporation
- Arata OCHINO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SEMICONDUCTOR SUBSTRATE STAGE FOR CARRING SUBSTRATE
- Publication number 20240377762
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Huan CHEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
A POSITION MEASUREMENT SYSTEM, A POSITIONING SYSTEM, A LITHOGRAPHIC...
- Publication number 20240361706
- Publication date Oct 31, 2024
- ASML NETHERLANDS B.V.
- Marcus Adrianus Van De Kerkhof
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND SU...
- Publication number 20240355644
- Publication date Oct 24, 2024
- TOKYO ELECTRON LIMITED
- Shinsuke TAKAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ACTUATOR DEVICE FOR USE IN A POSITIONING SYSTEM AS WELL AS SUCH POS...
- Publication number 20240339910
- Publication date Oct 10, 2024
- VDL Enabling Technologies Group B.V.
- Johannes Hubertus Antonius VAN DE RIJDT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INNER POD HOLDING DEVICE CONDUCIVE TO REDUCING DUST CONTAMINATION A...
- Publication number 20240329544
- Publication date Oct 3, 2024
- GUDENG EQUIPMENT CO., LTD.
- YIN-FENG CHAN
- G01 - MEASURING TESTING
Information Patent Application
IMPRINTING APPARATUS
- Publication number 20240329521
- Publication date Oct 3, 2024
- Koninklijke Philips N.V.
- Didier Mathijs Maria Justina Petit
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY SYSTEM, SUBSTRATE SAG COMPENSATOR, AND METHOD
- Publication number 20240329546
- Publication date Oct 3, 2024
- ASML NETHERLANDS B.V.
- Marcus Adrianus Van De Kerkhof
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Handling workpieces outside exposure position

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Inner pod holding device conducive to reducing dust contamination a...

Pellicle demounting method, and pellicle demounting device

Support for an optical element

Nanopositioning systems and associated methods

Exposure apparatus and method of manufacturing article

Actuator assemblies comprising piezo actuators or electrostrictive...

Control method of driving apparatus, driving apparatus, lithography...

Substrate stage and substrate processing system using the same

Wafer processing apparatus and wafer transfer method

Displacement device based on hall-effect sensors and planar motors

Method for fast loading substrates in a flat panel tool

Actuator device for use in a positioning system as well as such pos...

Substrate holding apparatus, substrate processing apparatus having...

Transport system having a magnetically levitated transportation stage

Temperature control device and temperature control method

Object positioner, method for correcting the shape of an object, li...

System for a semiconductor fabrication facility and method for oper...

Multiphase linear motor, multiphase planar motor, stage, lithograph...

Exposure apparatus and method of manufacturing article

Control method of driving apparatus, driving apparatus, lithography...

Substrate stage, substrate processing system using the same, and me...

Exposure machine

Fast high power pulsed light source system for high speed metrology...

Actuator, linear motor and lithographic apparatus

Substrate processing apparatus, substrate processing method, and st...

Carrier system, exposure apparatus, carrier method, exposure method...

Piezoelectric actuator, actuator system, substrate support, and lit...

Positioning system and a method for positioning a substage or a sta...

Reticle retaining system

Movable body apparatus, moving method, exposure apparatus, exposure...

Patents Applicationslast 30 patents

SCREW TRANSMISSION DRIVE, AND RETICLE STAGE AND MEASURING DEVICE FO...

TRANSFER APPARATUS AND WAFER STORAGE CONTAINER CLEANING APPARATUS

PLACEMENT MEMBER

SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND SU...

STAGE AND ERROR COMPENSATION SYSTEM USING THE SAME

PHOTOLITHOGRAPHY RETICLE STAGE ACTUATORS

PHOTOLITHOGRAPHY RETICLE STAGE DRIVE SYSTEM

ACTUATED PHOTOLITHOGRAPHY RETICLE STAGE

MASSIVE MEASUREMENT SAMPLING USING MULTIPLE CHUCKS AND OPTICAL COLUMNS

EXPOSURE APPARATUS AND METHOD OF MANUFACTURING ARTICLE

COATING AND DEVELOPING DEVICE

VIBRATION CONTROL OF STRUCTURAL ELEMENTS OF EXPOSURE APPARATUS

ACTUATOR ASSEMBLIES COMPRISING PIEZO ACTUATORS OR ELECTROSTRICTIVE...

LITHOGRAPHY APPARATUS

METHOD FOR COMPENSATING ACTUATOR EFFECTS OF ACTUATORS

SUBSTRATE HOLDING APPARATUS, SUBSTRATE PROCESSING APPARATUS, SEPARA...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

CONTROL METHOD OF DRIVING APPARATUS, DRIVING APPARATUS, LITHOGRAPHY...

Rotary Substrate Support Having an Actuator for Aligning a Substrate

SEMICONDUCTOR PROCESSING APPARATUS

LITHOGRAPHIC APPARATUS STAGE COUPLING

SUBSTRATE PROCESSING APPARATUS

FIRST HOLDING APPARATUS, THIRD HOLDING APPARATUS, FIFTH HOLDING APP...

SEMICONDUCTOR SUBSTRATE STAGE FOR CARRING SUBSTRATE

A POSITION MEASUREMENT SYSTEM, A POSITIONING SYSTEM, A LITHOGRAPHIC...

SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND SU...

ACTUATOR DEVICE FOR USE IN A POSITIONING SYSTEM AS WELL AS SUCH POS...

INNER POD HOLDING DEVICE CONDUCIVE TO REDUCING DUST CONTAMINATION A...

IMPRINTING APPARATUS

LITHOGRAPHY SYSTEM, SUBSTRATE SAG COMPENSATOR, AND METHOD