SUBSTRATE PROCESSING APPARATUS, METHOD FOR MODIFYING SUBSTRATE PROCESSING CONDITIONS AND STORAGE MEDIUM

Abstract

A substrate processing apparatus includes a setting unit for setting substrate processing conditions for a substrate in a substrate processing unit for performing a process on the substrate; a detection unit for detecting an abnormality of the substrate processing unit while the substrate processing unit performs the process on the substrate under the substrate processing conditions; a stopping unit for stopping the process on the substrate of the substrate processing unit if the abnormality is detected; and a modifying unit for modifying the substrate processing conditions for a substrate on which the process is stopped to be performed by the stopping unit. Further, a method for modifying substrate processing conditions includes the steps of setting processing conditions; detecting an abnormality of the substrate processing unit; stopping the process if the abnormality is detected; and modifying the processing conditions for a substrate on which the process is stopped.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

The above and other objects and features of the present invention will become apparent from the following description of embodiments, given in conjunction with the accompanying drawings, in which:

FIG. 1 is a plan view for schematically showing a configuration of a substrate processing apparatus in accordance with an embodiment of the present invention;

FIG. 2A is a cross sectional view of a second process unit of FIG. 1, which is taken along the line II-II of FIG. 1;

FIG. 2B is an enlarged view of a portion A in FIG. 2A;

FIG. 3 is a perspective view for schematically showing a configuration of a second process ship of FIG. 1;

FIG. 4 describes a schematic configuration of a system controller in the substrate processing apparatus of FIG. 1;

FIG. 5 a block diagram for showing a schematic configuration of a main part of an EC of FIG. 4;

FIG. 6 is a flow chart for explaining a sequence of a first substrate process performed by the substrate processing apparatus in accordance with an embodiment of the present invention;

FIGS. 7A and 7B show a recipe edit view shown in a display of an operation panel;

FIG. 8 is a flow chart for explaining a sequence of a second substrate process performed by the substrate processing apparatus in accordance with an embodiment of the present invention;

FIGS. 9A and 9B show a recipe edit view shown in the display of the operation panel;

FIGS. 10 and 11 are flow charts for explaining a sequence of a third substrate process performed by the substrate processing apparatus in accordance with an embodiment of the present invention;

FIGS. 12A and 12B shows a recipe edit view shown in the display of the operation panel;

FIG. 13 is a plan view for schematically showing a configuration of a substrate processing apparatus in accordance with a first modified example of the embodiment of the present invention; and

FIG. 14 is a plan view for schematically showing a configuration of a substrate processing apparatus in accordance with a second modified example of the embodiment of the present invention.

Claims

1. A substrate processing apparatus, comprising: a setting unit for setting substrate processing conditions for a substrate in a substrate processing unit for performing a process on the substrate;a detection unit for detecting an abnormality of the substrate processing unit while the substrate processing unit performs the process on the substrate under the substrate processing conditions;a stopping unit for stopping the process on the substrate of the substrate processing unit if the abnormality is detected; anda modifying unit for modifying the substrate processing conditions for a substrate on which the process is stopped to be performed by the stopping unit.

2. The substrate processing apparatus of claim 1, wherein the modifying unit modifies the substrate processing conditions by revising the substrate processing conditions.

3. The substrate processing apparatus of claim 1, wherein the substrate processing conditions include a plurality of processing conditions, and the modifying unit modifies the substrate processing conditions by selecting one or more processing conditions among the plurality of processing conditions.

4. The substrate processing apparatus of claim 2, wherein the substrate processing conditions include a plurality of processing conditions, and the modifying unit modifies the substrate processing conditions by selecting one or more processing conditions among the plurality of processing conditions.

5. A method for modifying substrate processing conditions, comprising the steps of: setting substrate processing conditions for a substrate in a substrate processing unit for performing a process on the substrate;detecting an abnormality of the substrate processing unit while the substrate processing unit performs the process on the substrate under the substrate processing conditions;stopping the process of the substrate processing unit on the substrate if the abnormality is detected; andmodifying the substrate processing conditions for a substrate on which the process is stopped to be performed in the stopping step.

6. The method of claim 5, wherein, in the modifying step, the processing conditions are modified by revising the processing conditions.

7. The method of claim 5, wherein the substrate processing conditions include a plurality of processing conditions, and, in the modifying step, the substrate processing conditions are modified by selecting one or more processing conditions among the plurality of the processing conditions.

8. The method of claim 6, wherein the substrate processing conditions include a plurality of processing conditions, and, in the modifying step, the substrate processing conditions are modified by selecting processing conditions among the plurality of the processing conditions.

9. A computer readable storage medium for storing therein a program executable on a computer, wherein the program includes:a setting module for setting substrate processing conditions for a substrate in a substrate processing unit for performing a process on the substrate;a detection module for detecting an abnormality of the substrate processing unit while the substrate processing unit performs the process on the substrate under the substrate processing conditions;a stopping module for stopping the process of the substrate processing apparatus on the substrate if the abnormality is detected; anda modifying module for modifying the substrate processing conditions for a substrate on which the process is stopped to be performed by the stopping module.