Number | Date | Country | Kind |
---|---|---|---|
43 02 681.8 | Feb 1993 | DEX |
Filing Document | Filing Date | Country | Kind | 102e Date | 371c Date |
---|---|---|---|---|---|
PCT/EP93/02701 | 10/4/1993 | 5/30/1995 | 5/30/1995 |
Publishing Document | Publishing Date | Country | Kind |
---|---|---|---|
WO94/18606 | 8/18/1994 |
Number | Name | Date | Kind |
---|---|---|---|
3732273 | Heine et al. | May 1973 | |
3890147 | Monahan | Jun 1975 | |
4504372 | Kirchmayr et al. | Mar 1985 | |
5227276 | Roeschert et al. | Jul 1993 | |
5286867 | Lohaus et al. | Feb 1994 | |
5346806 | Pawlowski et al. | Sep 1994 |
Number | Date | Country |
---|---|---|
0 330 386 | Aug 1989 | EPX |
0 388 343 A2 | Sep 1990 | EPX |
0 497 342 A2 | Aug 1992 | EPX |
0 510 447 A2 | Oct 1992 | EPX |
0 510 444 A1 | Oct 1992 | EPX |
41 12 967 | Oct 1992 | DEX |
3-223864 | Oct 1991 | JPX |
Entry |
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Ueno et al., "Chemical Amplification Positive Resist Systems Using Novel Sulfonates As Acid Generators", Science and Technology, pp. 66-67, (1989) No Month Given. |
Astrologes et al., "Reactions Of Trialkoxysulfuranes (Orthosulfinates) With Trifluoromethanesulfonic Acid", Journal of the American Chemical Society, vol. 99:4400-4404, (1977) June. |
Reynolds et al., "Exploring The Chemistry Of The 2-Arthexafluoro-2-Propanol Group", J. Org. Chem., vol. 55(11):4448-4454, (1990) July. |
Allen et al., "Doubly Destabilized Carbocations. Strong Aryl Delocalization And The Attenuation of Rate Decelerating Effects of CF.sub.3 and CN Groups", J. Am. Chem. Soc., vol. 108:3470-3474, (1986) June. |