Number | Name | Date | Kind |
---|---|---|---|
3050387 | Neugebauer et al. | Aug 1962 | |
3802885 | Lawson et al. | Apr 1974 | |
4089766 | Paal et al. | May 1978 | |
4197128 | Watanabe et al. | Apr 1980 | |
4308368 | Kubo et al. | Dec 1981 |
Entry |
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Dinaburg, M. S., "Photosensitive Diazo Cpds.", Focal Press, 1964, pp. 184 and 206. |
DeForest, W. S., "Photoresist Materials and Processes", McGraw-Hill Book Co., 1975, pp. 47-59. |