Number | Name | Date | Kind |
---|---|---|---|
4682503 | Higashi et al. | Jul 1987 | |
4766666 | Sugiyama et al. | Aug 1988 |
Number | Date | Country |
---|---|---|
62-76784 | Apr 1987 | JPX |
62-76785 | Apr 1987 | JPX |
Entry |
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Wert et al., Physics of Solids, McGraw-Hill, 1970, pp. 23-27. |
S. Sugiyama et al., "Micro-Diaphragm Pressure Sensor", IEDM 1986, pp. 184-187. |