THREE-DIMENSIONAL NETWORK FOR CHEMICAL MECHANICAL POLISHING

Abstract

The polishing pad (104) is useful for polishing at least one of magnetic, optical and semiconductor substrates (112) in the presence of a polishing medium (120). The polishing pad (104) includes a three-dimensional network of interconnected unit cells (225). The interconnected unit cells (225) are reticulated for allowing fluid flow and removal of polishing debris. A plurality of polishing elements (208, 308 and 408) form the three-dimensional network of interconnected unit cells (225). The polishing elements (208, 308 and 408) have a first end connected to a first adjacent polishing element at a first junction (209, 309 and 409) and a second end connected to a second adjacent polishing element at a second junction (209, 309 and 409) and having a cross-sectional area (222, 322 and 422) that remains within 30% between the first and the second junctions (209, 309 and 409). The polishing surface (200, 300 and 400) formed from the plurality of polishing elements (208, 308 and 408) remains consistent for multiple polishing operations.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a perspective view of a portion of a dual-axis polisher suitable for use with the present invention;

FIG. 2A is a highly enlarged schematic cross-sectional view of the polishing pad of FIG. 1 having a polishing structure according to the present invention;

FIG. 2B is a highly enlarged schematic plan view of the polishing pad of FIG. 1 having a polishing structure according to the present invention;

FIG. 3 is a highly enlarged schematic cross-sectional view of an alternative polishing pad polishing structure of the present invention; and

FIG. 4 is a highly enlarged schematic cross-sectional view of another alternative polishing pad polishing structure of the present invention.

Claims

1. A polishing pad useful for polishing at least one of a magnetic, optical and semiconductor substrate in the presence of a polishing medium, the polishing pad comprising: a) a three-dimensional network of interconnected unit cells, the interconnected unit cells being reticulated for allowing fluid flow and removal of polishing debris;b) a plurality of polishing elements forming the three-dimensional network of interconnected unit cells, the interconnected unit cells having a height of at least three unit cells, the polishing elements having a first end connected to a first adjacent polishing element at a first junction and a second end connected to a second adjacent polishing element at a second junction and having a cross-sectional area that remains within 30% between the first and the second junctions; andc) a polishing surface formed from the plurality of polishing elements, the polishing surface having a surface area, measured in a plane parallel to the polishing surface, that remains consistent for multiple polishing operations.

2. The polishing pad according to claim 1, wherein the plurality of polishing elements constitute 5 to 75 percent of polishing pad volume.

3. The polishing pad according to claim 1, wherein a total cross sectional area of the polishing surface varies less than 25 percent between an initial total cross sectional area and a half-height of the interconnected unit cells.

4. The polishing pad according to claim 1, wherein a total cross sectional area of the polishing surface varies less than 10 percent between an initial total cross sectional area and a half-height of the interconnected unit cells.

5. The polishing pad according to claim 1, wherein cross-sectional areas of the plurality of polishing elements are rectangular.

6. The polishing pad according to claim 1, wherein cross-sectional areas of the plurality of polishing elements are streamlined with respect to fluid flow in a plane of cross-sectional area of the plurality of polishing elements.

7. A polishing pad useful for polishing at least one of a magnetic, optical and semiconductor substrate in the presence of a polishing medium, the polishing pad comprising: a) a three-dimensional network of interconnected unit cells, the interconnected unit cells having a height of at least ten unit cells, the interconnected unit cells being formed with linear polishing elements and the interconnected unit cells being reticulated for allowing fluid flow and removal of polishing debris;b) a plurality of the linear polishing elements forming the three-dimensional network of interconnected unit cells, the linear polishing elements having a first end connected to a first adjacent polishing element at a first junction and a second end connected to a second adjacent polishing element at a second junction and having a cross-sectional area that remains within 30% between the first and the second junctions; andc) a polishing surface formed from the plurality of polishing elements, the polishing surface having a surface area, measured in a plane parallel to the polishing surface, that remains consistent for multiple polishing operations.

8. The polishing pad according to claim 7, wherein the linear elements of the three-dimensional network bend at a polishing layer of the three-dimensional network during polishing.

9. A method of polishing at least one of a magnetic, optical and semiconductor substrate with a polishing pad in the presence of a polishing medium, comprising the steps of: creating dynamic contact between the polishing pad and the substrate to polish the substrate, the polishing pad comprising: a three-dimensional network of interconnected unit cells, the interconnected unit cells being reticulated for allowing fluid flow and removal of polishing debris; a plurality of polishing elements forming the three-dimensional network of interconnected unit cells, the interconnected unit cells having a height of at least ten unit cells, the polishing elements having a first end connected to a first adjacent polishing element at a first junction and a second end connected to a second adjacent polishing element at a second junction and having a cross-sectional area that remains within 30% between the first and the second junctions; a polishing surface formed from the plurality of polishing elements, the polishing surface having a surface area, measured in a plane parallel to the polishing surface, that remains consistent for multiple polishing operations; andtrapping polishing debris in the polishing elements of the three-dimensional network.

10. The method of claim 9 wherein the dynamic contact polishes a series of patterned semiconductor wafers.