Claims
- 1. A tunable laser system, comprising:
a laser; and at least one compliant mechanism configured to vary a wavelength of light output by the laser.
- 2. The tunable laser system according to claim 1, wherein the laser is a semiconductor laser.
- 3. The tunable laser system according to claim 1, wherein the compliant mechanism comprises a mirror, and varying the position of the mirror varies a wavelength output by the laser.
- 4. The tunable laser system according to claim 3, wherein the compliant mechanism comprises a compliant support to which the mirror is fixed, and at least a portion of the compliant support is substantially flexible.
- 5. The tunable laser system according to claim 3, wherein the compliant mechanism comprises a compliant support to which the mirror is fixed, and at least a portion of the compliant support comprises silicon, and another portion of the compliant optical support comprises a compliant material.
- 6. The tunable laser system according to claim 5, wherein the compliant material comprises an elastomer.
- 7. The tunable laser system according to claim 3, wherein the mirror is movable by an actuator.
- 8. The tunable laser system according to claim 7, wherein the compliant support comprises:
an island, to which the mirror is affixed; and a frame, wherein the island and the frame are flexibly joined by a compliant member.
- 9. The tunable laser system according to claim 8, wherein at least a portion of the actuator is attached to the island.
- 10. The tunable laser system according to claim 8, wherein the compliant member comprises an elastomer.
- 11. The tunable laser system according to claim 8, wherein the island and the frame comprise silicon.
- 12. The tunable laser system according to claim 8, wherein the actuator comprises:
a plurality of electrodes positioned on a surface of the island opposite a surface to which the second mirror is attached; and an electrode disposed on an actuator support.
- 13. The tunable laser system according to claim 12, wherein the actuator support comprises silicon.
- 14. The tunable laser system according to claim 1, further comprising an output optical fiber into which output light is directed.
- 15. The tunable laser system according to claim 14, further comprising:
a lens configured to focus light into the output optical fiber.
- 16. The tunable laser system according to claim 1, further comprising:
a lens configured to collimate light output by the laser.
- 17. The tunable laser system according to claim 1, wherein the compliant mechanism is positioned between the laser and an output optical fiber.
- 18. The tunable laser system according to claim 1, wherein the laser is positioned between the compliant mechanism and an output optical fiber.
- 19. The tunable laser system according to claim 3, wherein the mirror is curved.
- 20. The tunable laser system according to claim 19, wherein the laser is positioned between the compliant mechanism and an output optical fiber.
- 21. The tunable laser system according to claim 1, wherein the at least one compliant mechanism comprises two compliant mechanisms.
- 22. The tunable laser system according to claim 21, wherein the laser is positioned between the two compliant mechanisms.
- 23. The tunable laser system according to claim 22, wherein the laser comprises an anti-reflective on one end and an approximately 30% reflective coating on the other end.
- 24. The tunable laser system according to claim 21, further comprising:
an output optical fiber positioned to receive output light.
- 25. The tunable laser system according to claim 24, further comprising:
a lens configured to focus the output light into the output optical fiber.
- 26. The tunable laser system according to claim 21, wherein the two compliant mechanisms each comprise a mirror, and wherein varying the position of either mirror varies a wavelength output by the tunable laser.
- 27. The tunable laser system according to claim 26, wherein each mirror is curved.
- 28. The tunable laser system according to claim 1, wherein the laser comprises a first fixed mirror and an active region, and the compliant mechanism further comprises a second mirror mounted thereon, wherein a first laser cavity is formed between the first and second mirror, and wherein adjusting the position of the second mirror varies a wavelength of light output by the tunable laser.
- 29. The tunable laser system according to claim 28, wherein the compliant mechanism further comprising a partially reflective coating, wherein a second laser cavity is formed between the partially reflective coating and the first mirror, which is tunable by adjusting the position of the partially reflective coating, and wherein a third laser cavity is formed between the partially reflective coating and the second mirror, which is tunable by adjusting the position of the second mirror.
- 30. A tunable laser, comprising:
a first fixed mirror; a second mirror mounted on a compliant mechanism; and an active region formed between the first and second mirrors.
- 31. The tunable laser according to claim 20, wherein varying the position of the second mirror varies a wavelength output by the tunable laser.
- 32. A telecommunication system comprising the tunable laser system of claim 1.
Parent Case Info
[0001] This application is a continuation-in-part of U.S. patent application Ser. No. 10/085,143 (Attorney Docket No. SMT-0039) filed Mar. 1, 2002, entitled “Compliant Mechanism and Method of Forming Same”, which is hereby incorporated by reference.
Provisional Applications (2)
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Number |
Date |
Country |
|
60284943 |
Apr 2001 |
US |
|
60303772 |
Jul 2001 |
US |
Continuation in Parts (1)
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Number |
Date |
Country |
| Parent |
10085143 |
Mar 2002 |
US |
| Child |
10102208 |
Mar 2002 |
US |