Rotation out of a plane parallel to the substrate

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B2203/00Basic micro-electromechanical structures

Current Industry

B81B2203/058Rotation out of a plane parallel to the substrate

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Comb-driven MEMS resonant scanner with full-circumferential range a...
- Patent number 12,332,428
- Issue date Jun 17, 2025
- The Regents of the University of Michigan
- Haijun Li
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Actuator device
- Patent number 12,304,806
- Issue date May 20, 2025
- Hamamatsu Photonics K.K.
- Sadaharu Takimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with damping fluid vertically sandwiched between moving...
- Patent number 12,215,020
- Issue date Feb 4, 2025
- Mirrorcle Technologies, Inc.
- Stefan Richter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS and method of manufacturing the same
- Patent number 12,209,010
- Issue date Jan 28, 2025
- Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Shanshan Gu-Stoppel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fabrication of MEMS device with automated dispensing of damping flu...
- Patent number 12,195,326
- Issue date Jan 14, 2025
- Mirrocle Technologies Inc.
- Stefan Richter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical structure, micromechanical system and method of pro...
- Patent number 12,151,935
- Issue date Nov 26, 2024
- Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Christian Drabe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with improved dynamic mechanical performance through da...
- Patent number 12,116,268
- Issue date Oct 15, 2024
- Stefan Richter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical structure and method of providing the same
- Patent number 12,071,338
- Issue date Aug 27, 2024
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Christian Drabe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical scanning system using micro-electro-mechanical system (mems...
- Patent number 12,061,334
- Issue date Aug 13, 2024
- Raytheon Company
- David J. Knapp
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Thermal metamaterial for low power MEMS thermal control
- Patent number 12,055,927
- Issue date Aug 6, 2024
- Honeywell International Inc.
- Robert Compton
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Self-aligned vertical comb drive assembly
- Patent number 12,007,554
- Issue date Jun 11, 2024
- Lumentum Operations LLC
- Wenlin Jin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Light deflection device, distance measurement device, and mobile body
- Patent number 11,971,537
- Issue date Apr 30, 2024
- Ricoh Company, Ltd.
- Kazuhiko Adachi
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Actuator device
- Patent number 11,952,265
- Issue date Apr 9, 2024
- Hamamatsu Photonics K.K.
- Sadaharu Takimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical device with a structure tiltable by piezoele...
- Patent number 11,953,813
- Issue date Apr 9, 2024
- STMicroelectronics S.r.l.
- Nicolo' Boni
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with improved dynamic mechanical performance through da...
- Patent number 11,772,959
- Issue date Oct 3, 2023
- Mirrorcle Technologies, Inc.
- Stefan Richter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrode configuration for tilting micro-electro-mechanical system...
- Patent number 11,726,311
- Issue date Aug 15, 2023
- Lumentum Operations LLC
- Gonzalo Wills
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multidirectional translating and tilting platform using bending act...
- Patent number 11,697,584
- Issue date Jul 11, 2023
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Matthieu Gaudet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor
- Patent number 11,656,110
- Issue date May 23, 2023
- Kabushiki Kaisha Toshiba
- Hiroaki Yamazaki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical device with a structure tiltable by piezoele...
- Patent number 11,656,539
- Issue date May 23, 2023
- STMicroelectronics S.r.l.
- Nicolo' Boni
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Physical quantity sensor, electronic apparatus, and vehicle
- Patent number 11,656,243
- Issue date May 23, 2023
- Seiko Epson Corporation
- Satoru Tanaka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Actuator, optical scanning device, and manufacturing methods
- Patent number 11,635,615
- Issue date Apr 25, 2023
- Mitsumi Electric Co., Ltd.
- Kensuke Yamada
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Piezoelectric MEMS actuator for compensating unwanted movements and...
- Patent number 11,614,634
- Issue date Mar 28, 2023
- STMicroelectronics S.r.l.
- Domenico Giusti
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with optimized geometry for reducing the offset due to...
- Patent number 11,603,310
- Issue date Mar 14, 2023
- STMicroelectronics S.r.l.
- Francesco Rizzini
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device
- Patent number 11,472,697
- Issue date Oct 18, 2022
- Mirrorcle Technologies, Inc.
- Stefan Richter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MMS, MMS array, MEMS actuator and method for providing an MMS
- Patent number 11,459,229
- Issue date Oct 4, 2022
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Peter Duerr
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Hinged microelectromechanical and/or nanoelectromechanical device w...
- Patent number 11,459,227
- Issue date Oct 4, 2022
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Loic Joet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Actuator device
- Patent number 11,339,050
- Issue date May 24, 2022
- Hamamatsu Photonics K.K.
- Sadaharu Takimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Linearized micromechanical sensor
- Patent number 11,326,969
- Issue date May 10, 2022
- Robert Bosch GmbH
- Stefan Zehringer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device for large angle beamsteering
- Patent number 11,279,613
- Issue date Mar 22, 2022
- LaVern A. Starman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Rotation rate sensor, method for manufacturing a rotation rate sensor
- Patent number 11,187,528
- Issue date Nov 30, 2021
- Robert Bosch GmbH
- Jochen Reinmuth
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
ACCELERATION SENSOR
- Publication number 20250230034
- Publication date Jul 17, 2025
- AAC Kaitai Technologies (Wuhan) CO., LTD
- Shitao Yan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ACCELEROMETER HAVING A HIGH MECHANICAL ROBUSTNESS
- Publication number 20250223152
- Publication date Jul 10, 2025
- STMicroelectronics International N.V.
- Francesco RIZZINI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE
- Publication number 20250206595
- Publication date Jun 26, 2025
- Murata Manufacturing Co., Ltd.
- Matti LIUKKU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMIRROR DEVICE AND OPTICAL SCANNING DEVICE
- Publication number 20250208405
- Publication date Jun 26, 2025
- FUJIFILM CORPORATION
- Keisuke AOSHIMA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANTI-STICTION ELECTRODES
- Publication number 20250197193
- Publication date Jun 19, 2025
- InvenSense, Inc.
- Roberto Martini
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Device
- Publication number 20250187902
- Publication date Jun 12, 2025
- SensorTek technology Corp.
- Chao-Lin Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL MOTION SENSOR DEVICE HAVING A SINGLE PROOF MASS
- Publication number 20250178885
- Publication date Jun 5, 2025
- STMicroelectronics International N.V.
- Massimiliano PESATURO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMB STRUCTURE FOR MEMS ACCELEROMETER
- Publication number 20250138044
- Publication date May 1, 2025
- Matti LIUKKU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL DEVICE WITH RECOVERY FROM STICTION CONDITIONS
- Publication number 20250042718
- Publication date Feb 6, 2025
- STMicroelectronics International N.V.
- Manuel RIANI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Three-axis Gyroscope
- Publication number 20240425355
- Publication date Dec 26, 2024
- SensorTek technology Corp.
- Shih-Hsiung TSENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Inertial Sensor
- Publication number 20240425357
- Publication date Dec 26, 2024
- SensorTek technology Corp.
- Shih-Yuan LIU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PIEZOELECTRIC ACTUATING APPARATUS
- Publication number 20240365670
- Publication date Oct 31, 2024
- Coretronic MEMS Corporation
- Hao-Chien Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANCHOR AND CAVITY CONFIGURATION FOR MEMS-BASED COOLING SYSTEMS
- Publication number 20240351862
- Publication date Oct 24, 2024
- Frore Systems Inc.
- Suryaprakash Ganti
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTICAL REFLECTIVE DEVICE
- Publication number 20240317576
- Publication date Sep 26, 2024
- Panasonic Intellectual Property Management Co., Ltd.
- Kensuke MIHARA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
IN-PLANE AND OUT-OF-PLANE ACCELEROMETER
- Publication number 20240300805
- Publication date Sep 12, 2024
- Murata Manufacturing Co., Ltd.
- Ville-Pekka RYTKÖNEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SELF-ALIGNED VERTICAL COMB DRIVE ASSEMBLY
- Publication number 20240295728
- Publication date Sep 5, 2024
- Lumentum Operations LLC
- Wenlin JIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROSCANNER HAVING MEANDER SPRING-BASED MIRROR SUSPENSION
- Publication number 20240288683
- Publication date Aug 29, 2024
- OQMENTED GMBH
- Ulrich HOFMANN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACTUATOR DEVICE
- Publication number 20240190699
- Publication date Jun 13, 2024
- HAMAMATSU PHOTONICS K. K.
- Sadaharu TAKIMOTO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FABRICATION OF MEMS DEVICE WITH AUTOMATED DISPENSING OF DAMPING FLU...
- Publication number 20240174510
- Publication date May 30, 2024
- Mirrorcle Technologies, Inc.
- Stefan Richter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE WITH DAMPING FLUID VERTICALLY SANDWICHED BETWEEN MOVING...
- Publication number 20240174509
- Publication date May 30, 2024
- Mirrorcle Technologies, Inc.
- Stefan Richter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Low Voltage Electrostatic MEMS Actuators for Large Angle Tip, Tilt,...
- Publication number 20240158223
- Publication date May 16, 2024
- Government of the United States, as represented by the Secretary of the Air F...
- John PK Walton
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SCANNING MIRROR SYSTEMS AND METHODS OF MANUFACTURE
- Publication number 20240012237
- Publication date Jan 11, 2024
- Magic Leap, Inc.
- Julien Gamet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE WITH IMPROVED DYNAMIC MECHANICAL PERFORMANCE THROUGH DA...
- Publication number 20230399224
- Publication date Dec 14, 2023
- Mirrorcle Technologies, Inc.
- Stefan Richter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FLIP CHIP MICROMIRROR TECHNOLOGY
- Publication number 20230375822
- Publication date Nov 23, 2023
- Microsoft Technology Licensing, LLC
- Xiao Chuan ONG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PIEZOELECTRIC DRIVE ELEMENT
- Publication number 20230356997
- Publication date Nov 9, 2023
- Panasonic Intellectual Property Management Co., Ltd.
- Ryouichi TAKAYAMA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL DEVICE WITH A STRUCTURE TILTABLE BY PIEZOELE...
- Publication number 20230251556
- Publication date Aug 10, 2023
- STMicroelectronics S.r.l
- Nicolo' BONI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PIEZOELECTRIC MEMS ACTUATOR FOR COMPENSATING UNWANTED MOVEMENTS AND...
- Publication number 20230204974
- Publication date Jun 29, 2023
- STMicroelectronics S.r.l
- Domenico GIUSTI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LIGHT SCANNER PACKAGE AND METHOD FOR MANUFACTURING SAME
- Publication number 20230127991
- Publication date Apr 27, 2023
- WEMEMS CO.,LTD.
- Jonghyun LEE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTICAL SCANNING SYSTEM USING MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS...
- Publication number 20230022548
- Publication date Jan 26, 2023
- Raytheon Company
- David J. Knapp
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE WITH IMPROVED DYNAMIC MECHANICAL PERFORMANCE THROUGH DA...
- Publication number 20230002215
- Publication date Jan 5, 2023
- Mirrocle Technologies, Inc.
- Stefan Richter
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Rotation out of a plane parallel to the substrate

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Comb-driven MEMS resonant scanner with full-circumferential range a...

Actuator device

MEMS device with damping fluid vertically sandwiched between moving...

MEMS and method of manufacturing the same

Fabrication of MEMS device with automated dispensing of damping flu...

Micromechanical structure, micromechanical system and method of pro...

MEMS device with improved dynamic mechanical performance through da...

Micromechanical structure and method of providing the same

Optical scanning system using micro-electro-mechanical system (mems...

Thermal metamaterial for low power MEMS thermal control

Self-aligned vertical comb drive assembly

Light deflection device, distance measurement device, and mobile body

Actuator device

Microelectromechanical device with a structure tiltable by piezoele...

MEMS device with improved dynamic mechanical performance through da...

Electrode configuration for tilting micro-electro-mechanical system...

Multidirectional translating and tilting platform using bending act...

Sensor

Microelectromechanical device with a structure tiltable by piezoele...

Physical quantity sensor, electronic apparatus, and vehicle

Actuator, optical scanning device, and manufacturing methods

Piezoelectric MEMS actuator for compensating unwanted movements and...

MEMS device with optimized geometry for reducing the offset due to...

MEMS device

MMS, MMS array, MEMS actuator and method for providing an MMS

Hinged microelectromechanical and/or nanoelectromechanical device w...

Actuator device

Linearized micromechanical sensor

MEMS device for large angle beamsteering

Rotation rate sensor, method for manufacturing a rotation rate sensor

Patents Applicationslast 30 patents

ACCELERATION SENSOR

MEMS ACCELEROMETER HAVING A HIGH MECHANICAL ROBUSTNESS

MEMS DEVICE

MICROMIRROR DEVICE AND OPTICAL SCANNING DEVICE

ANTI-STICTION ELECTRODES

MEMS Device

MICROELECTROMECHANICAL MOTION SENSOR DEVICE HAVING A SINGLE PROOF MASS

COMB STRUCTURE FOR MEMS ACCELEROMETER

MICROELECTROMECHANICAL DEVICE WITH RECOVERY FROM STICTION CONDITIONS

Three-axis Gyroscope

Inertial Sensor

PIEZOELECTRIC ACTUATING APPARATUS

ANCHOR AND CAVITY CONFIGURATION FOR MEMS-BASED COOLING SYSTEMS

OPTICAL REFLECTIVE DEVICE

IN-PLANE AND OUT-OF-PLANE ACCELEROMETER

SELF-ALIGNED VERTICAL COMB DRIVE ASSEMBLY

MICROSCANNER HAVING MEANDER SPRING-BASED MIRROR SUSPENSION

ACTUATOR DEVICE

FABRICATION OF MEMS DEVICE WITH AUTOMATED DISPENSING OF DAMPING FLU...

MEMS DEVICE WITH DAMPING FLUID VERTICALLY SANDWICHED BETWEEN MOVING...

Low Voltage Electrostatic MEMS Actuators for Large Angle Tip, Tilt,...

SCANNING MIRROR SYSTEMS AND METHODS OF MANUFACTURE

MEMS DEVICE WITH IMPROVED DYNAMIC MECHANICAL PERFORMANCE THROUGH DA...

FLIP CHIP MICROMIRROR TECHNOLOGY

PIEZOELECTRIC DRIVE ELEMENT

MICROELECTROMECHANICAL DEVICE WITH A STRUCTURE TILTABLE BY PIEZOELE...

PIEZOELECTRIC MEMS ACTUATOR FOR COMPENSATING UNWANTED MOVEMENTS AND...

LIGHT SCANNER PACKAGE AND METHOD FOR MANUFACTURING SAME

OPTICAL SCANNING SYSTEM USING MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS...

MEMS DEVICE WITH IMPROVED DYNAMIC MECHANICAL PERFORMANCE THROUGH DA...