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Rotation out of a plane parallel to the substrate
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Industry
CPC
B81B2203/058
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Parent Industries
B
PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81B
MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81B2203/00
Basic micro-electromechanical structures
Current Industry
B81B2203/058
Rotation out of a plane parallel to the substrate
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